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Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity

School of Mechanical Engineering, Xihua University, Chengdu 610039, China
School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China
Authors to whom correspondence should be addressed.
Sensors 2018, 18(2), 643;
Received: 14 December 2017 / Revised: 11 February 2018 / Accepted: 18 February 2018 / Published: 22 February 2018
(This article belongs to the Special Issue Sensors for MEMS and Microsystems)
PDF [4039 KB, uploaded 22 February 2018]


The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing of a bulk MEMS capacitive accelerometer is developed for both low temperature coefficient and high linearity. Firstly, the contrary effect of the wide-narrow gaps ratio (WNGR) on the temperature coefficient of the scale factor (TCSF) and linearity error is discussed. Secondly, the ability of an improved structure that can avoid the contrary effect is illustrated. The improved structure is proposed in our previous work for reducing the temperature coefficient of bias (TCB) and TCSF. Within the improved structure, both the TCSF and linearity error decrease with increasing WNGR. Then, the precise designing of the improved structure is developed for achieving lower TCB, TCSF, and linearity error. Finally, the precise structural designing is experimentally verified. View Full-Text
Keywords: MEMS; capacitive accelerometer; temperature coefficient; linearity error MEMS; capacitive accelerometer; temperature coefficient; linearity error

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He, J.; Zhou, W.; Yu, H.; He, X.; Peng, P. Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity. Sensors 2018, 18, 643.

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