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Journal: Sensors, 2018
Volume: 18
Number: 643
Article:
Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity
Authors:
by
Jiangbo He, Wu Zhou, Huijun Yu, Xiaoping He and Peng Peng
Link:
https://www.mdpi.com/1424-8220/18/2/643
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