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Sensors 2017, 17(5), 1056;

Inkjet-Printed Membrane for a Capacitive Acoustic Sensor: Development and Characterization Using Laser Vibrometer

Centre Microélectronique de Provence (CMP), École Nationale Supérieure des Mines de Saint-Étienne, 13541 Gardanne, France
Laboratoire de Mécanique et d’Acoustique UPR7051 CNRS, 4 impasse Nikola Tesla, CS 40006, 13453 Marseille Cedex 13, France
Authors to whom correspondence should be addressed.
Academic Editors: Jae-Won Choi and Erik D. Engeberg
Received: 5 April 2017 / Revised: 24 April 2017 / Accepted: 3 May 2017 / Published: 6 May 2017
(This article belongs to the Special Issue 3D Printed Sensors)
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This paper describes the fabrication process and the method to determine the membrane tension and defects of an inkjet-printed circular diaphragm. The membrane tension is an important parameter to design and fabricate an acoustic sensor and resonator with the highest sensitivity and selectivity over a determined range of frequency. During this work, the diaphragms are fabricated by inkjet printing of conductive silver ink on pre-strained Mylar thin films, and the membrane tension is determined using the resonant frequency obtained from its measured surface velocity response to an acoustic excitation. The membrane is excited by an acoustic pressure generated by a loudspeaker, and its displacement (response) is acquired using a laser Doppler vibrometer (LDV). The response of the fabricated membrane demonstrates good correlation with the numerical result. However, the inkjet-printed membrane exhibits undesired peaks, which appeared to be due to defects at their boundaries as observed from the scanning mode of LDV. View Full-Text
Keywords: membrane; printed electronics; thin film; laser Doppler vibrometer membrane; printed electronics; thin film; laser Doppler vibrometer

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Haque, R.I.; Ogam, E.; Benaben, P.; Boddaert, X. Inkjet-Printed Membrane for a Capacitive Acoustic Sensor: Development and Characterization Using Laser Vibrometer. Sensors 2017, 17, 1056.

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