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Sensors 2017, 17(4), 877;

Out-of-Plane Continuous Electrostatic Micro-Power Generators

Department of Electrical and Computer Engineering, Ain Shams University, 1156 Cairo, Egypt
Department of Systems Design Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada
Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, N2L 3G1 ON, Canada
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 15 March 2017 / Revised: 10 April 2017 / Accepted: 11 April 2017 / Published: 16 April 2017
(This article belongs to the Special Issue MEMS and Nano-Sensors)
Full-Text   |   PDF [4410 KB, uploaded 18 April 2017]   |  


This paper presents an out-of-plane electrostatic micro-power generator (MPG). Electret-based continuous MPGs with different gaps and masses are fabricated to demonstrate the merits of this topology. Experimental results of the MPG demonstrate output power of 1 mW for a base acceleration amplitude and frequency of 0.08 g and 86 Hz. The MPGs also demonstrate a wideband harvesting bandwidth reaching up to 9 Hz. A free-flight and an impact mode model of electrostatic MPGs are also derived and validated by comparison to experimental results. View Full-Text
Keywords: micro-power generators; electrostatic; out-of-plane; wideband micro-power generators; electrostatic; out-of-plane; wideband

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Mahmoud, M.A.E.; Abdel-Rahman, E.M.; Mansour, R.R.; El-Saadany, E.F. Out-of-Plane Continuous Electrostatic Micro-Power Generators. Sensors 2017, 17, 877.

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