Next Article in Journal
Different Ways to Apply a Measurement Instrument of E-Nose Type to Evaluate Ambient Air Quality with Respect to Odour Nuisance in a Vicinity of Municipal Processing Plants
Next Article in Special Issue
PCA Based Stress Monitoring of Cylindrical Specimens Using PZTs and Guided Waves
Previous Article in Journal
A Subnano-g Electrostatic Force-Rebalanced Flexure Accelerometer for Gravity Gradient Instruments
Previous Article in Special Issue
A High Sensitivity Preamplifier for Quartz Tuning Forks in QEPAS (Quartz Enhanced PhotoAcoustic Spectroscopy) Applications
Open AccessArticle

Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China
*
Authors to whom correspondence should be addressed.
Sensors 2017, 17(11), 2672; https://doi.org/10.3390/s17112672
Received: 21 September 2017 / Revised: 10 November 2017 / Accepted: 17 November 2017 / Published: 19 November 2017
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG. View Full-Text
Keywords: angle generator; angular deflection; angle calibration; flexure hinge; capacitive sensor; Monte Carlo method angle generator; angular deflection; angle calibration; flexure hinge; capacitive sensor; Monte Carlo method
Show Figures

Figure 1

MDPI and ACS Style

Tan, X.; Zhu, F.; Wang, C.; Yu, Y.; Shi, J.; Qi, X.; Yuan, F.; Tan, J. Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors. Sensors 2017, 17, 2672. https://doi.org/10.3390/s17112672

AMA Style

Tan X, Zhu F, Wang C, Yu Y, Shi J, Qi X, Yuan F, Tan J. Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors. Sensors. 2017; 17(11):2672. https://doi.org/10.3390/s17112672

Chicago/Turabian Style

Tan, Xinran; Zhu, Fan; Wang, Chao; Yu, Yang; Shi, Jian; Qi, Xue; Yuan, Feng; Tan, Jiubin. 2017. "Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors" Sensors 17, no. 11: 2672. https://doi.org/10.3390/s17112672

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Search more from Scilit
 
Search
Back to TopTop