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Journal: Sensors, 2017
Volume: 17
Number: 2672
Article:
Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors
Authors:
by
Xinran Tan, Fan Zhu, Chao Wang, Yang Yu, Jian Shi, Xue Qi, Feng Yuan and Jiubin Tan
Link:
https://www.mdpi.com/1424-8220/17/11/2672
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