- Article
A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations
- Zhaoyang Zhai,
- Xingyin Xiong,
- Liangbo Ma,
- Zheng Wang,
- Kunfeng Wang,
- Bowen Wang,
- Mingjiang Zhang and
- Xudong Zou
This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. This method uses a series of voltage signals to simulate the inertial forces caused by the acceleration input, rather than frequent...