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Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry
- Matthias Müller,
- Philipp Hönicke,
- Blanka Detlefs and
- Claudia Fleischmann
The accurate characterization of nanolayered systems is an essential topic for today’s developments in many fields of material research. Thin high-k layers and gate stacks are technologically required for the design of current and future electronic d...