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Keywords = poly-Si channel

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12 pages, 2241 KiB  
Article
Wordline Input Bias Scheme for Neural Network Implementation in 3D-NAND Flash
by Hwiho Hwang, Gyeonghae Kim, Dayeon Yu and Hyungjin Kim
Biomimetics 2025, 10(5), 318; https://doi.org/10.3390/biomimetics10050318 - 15 May 2025
Viewed by 669
Abstract
In this study, we propose a neuromorphic computing system based on a 3D-NAND flash architecture that utilizes analog input voltages applied through wordlines (WLs). The approach leverages the velocity saturation effect in short-channel MOSFETs, which enables a linear increase in drain current with [...] Read more.
In this study, we propose a neuromorphic computing system based on a 3D-NAND flash architecture that utilizes analog input voltages applied through wordlines (WLs). The approach leverages the velocity saturation effect in short-channel MOSFETs, which enables a linear increase in drain current with respect to gate voltage in the saturation region. A NAND flash array with a TANOS (TiN/Al2O3/Si3N4/SiO2/poly-Si) gate stack was fabricated, and its electrical and reliability characteristics were evaluated. Output characteristics of short-channel (L = 1 µm) and long-channel (L = 50 µm) devices were compared, confirming the linear behavior of short-channel devices due to velocity saturation. In the proposed system, analog WL voltages serve as inputs, and the summed bitline (BL) currents represent the outputs. Each synaptic weight is implemented using two paired devices, and each WL layer corresponds to a fully connected (FC) layer, enabling efficient vector-matrix multiplication (VMM). MNIST pattern recognition is conducted, demonstrated only a 0.32% accuracy drop for the short-channel device compared to the ideal linear case, and 0.95% degradation under 0.5 V threshold variation, while maintaining robustness. These results highlight the strong potential of 3D-NAND flash memory, which offers high integration density and technological maturity, for neuromorphic computing applications. Full article
(This article belongs to the Special Issue Advances in Brain–Computer Interfaces 2025)
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14 pages, 3406 KiB  
Article
Implication of Surface Passivation on the In-Plane Charge Transport in the Oriented Thin Films of P3HT
by Nisarg Hirens Purabiarao, Kumar Vivek Gaurav, Shubham Sharma, Yoshito Ando and Shyam Sudhir Pandey
Electron. Mater. 2025, 6(2), 6; https://doi.org/10.3390/electronicmat6020006 - 7 May 2025
Viewed by 1101
Abstract
Optimizing charge transport in organic semiconductors is crucial for advancing next-generation optoelectronic devices. The performance of organic field-effect transistors (OFETs) is significantly influenced by the alignment of films in the channel direction and the quality of the dielectric surface, which should be uniform, [...] Read more.
Optimizing charge transport in organic semiconductors is crucial for advancing next-generation optoelectronic devices. The performance of organic field-effect transistors (OFETs) is significantly influenced by the alignment of films in the channel direction and the quality of the dielectric surface, which should be uniform, smooth, and free of charge-trapping defects. Our study reports the enhancement of OFET performance using large-area, uniform, and oriented thin films of regioregular poly[3-hexylthiophene] (RR-P3HT), prepared via the Floating Film Transfer Method (FTM) on octadecyltrichlorosilane (OTS) passivated SiO2 surfaces. SiO2 surfaces inherently possess dangling bonds that act as charge traps, but these can be effectively passivated through optimized surface treatments. OTS treatment has improved the optical anisotropy of thin films and the surface wettability of SiO2. Notably, using octadecene as a solvent during OTS passivation, as opposed to toluene, resulted in a significant enhancement of charge carrier transport. Specifically, passivation with OTS-F (10 mM OTS in octadecene at 100 °C for 48 h) led to a >150 times increase in mobility and a reduction in threshold voltage compared to OTS-A (5 mM OTS in toluene for 12 h at room temperature). Under optimal conditions, these FTM-processed RR-P3HT films achieved the best device performance, with a saturated mobility (μsat) of 0.18 cm2V−1s−1. Full article
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11 pages, 2732 KiB  
Article
Innovative Programming Approaches to Address Z-Interference in High-Density 3D NAND Flash Memory
by Yu Jin Choi, Seul Ki Hong and Jong Kyung Park
Electronics 2024, 13(16), 3123; https://doi.org/10.3390/electronics13163123 - 7 Aug 2024
Viewed by 2284
Abstract
Increasing the bit density in 3D NAND flash memory involves reducing the pitch of ON (Oxide-Nitride) molds in the Z-direction. However, this reduction drastically increases Z-interference, adversely affecting cell distribution and accelerating degradation of reliability limits. Previous studies have shown that programming from [...] Read more.
Increasing the bit density in 3D NAND flash memory involves reducing the pitch of ON (Oxide-Nitride) molds in the Z-direction. However, this reduction drastically increases Z-interference, adversely affecting cell distribution and accelerating degradation of reliability limits. Previous studies have shown that programming from the top word line (WL) to the bottom WL, instead of the traditional bottom-to-top approach, alleviates Z-interference. Nevertheless, detailed analysis of how Z-interference varies at each WL depending on the programming sequence remains insufficient. This paper investigates the causes of Z-interference variations at Top, Middle, and Bottom WLs through TCAD analysis. It was found that as more electrons are programmed into WLs within the string, Z-interference variations increase due to increased resistance in the poly-Si channel. These variations are exacerbated by tapered vertical channel profiles resulting from high aspect ratio etching. To address these issues, a method is proposed to adjust bitline biases during verification operations of each WL. This method has been validated to enhance the performance and reliability of 3D NAND flash memory. Full article
(This article belongs to the Special Issue Advanced Non-Volatile Memory Devices and Systems)
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22 pages, 5283 KiB  
Article
Manufacturing of 3D-Printed Hybrid Scaffolds with Polyelectrolyte Multilayer Coating in Static and Dynamic Culture Conditions
by Yanny Marliana Baba Ismail, Yvonne Reinwald, Ana Marina Ferreira, Oana Bretcanu, Kenneth Dalgarno and Alicia J. El Haj
Materials 2024, 17(12), 2811; https://doi.org/10.3390/ma17122811 - 8 Jun 2024
Viewed by 1544
Abstract
Three-dimensional printing (3DP) has emerged as a promising method for creating intricate scaffold designs. This study assessed three 3DP scaffold designs fabricated using biodegradable poly(lactic) acid (PLA) through fused deposition modelling (FDM): mesh, two channels (2C), and four channels (4C). To address the [...] Read more.
Three-dimensional printing (3DP) has emerged as a promising method for creating intricate scaffold designs. This study assessed three 3DP scaffold designs fabricated using biodegradable poly(lactic) acid (PLA) through fused deposition modelling (FDM): mesh, two channels (2C), and four channels (4C). To address the limitations of PLA, such as hydrophobic properties and poor cell attachment, a post-fabrication modification technique employing Polyelectrolyte Multilayers (PEMs) coating was implemented. The scaffolds underwent aminolysis followed by coating with SiCHA nanopowders dispersed in hyaluronic acid and collagen type I, and finally crosslinked the outermost coated layers with EDC/NHS solution to complete the hybrid scaffold production. The study employed rotating wall vessels (RWVs) to investigate how simulating microgravity affects cell proliferation and differentiation. Human mesenchymal stem cells (hMSCs) cultured on these scaffolds using proliferation medium (PM) and osteogenic media (OM), subjected to static (TCP) and dynamic (RWVs) conditions for 21 days, revealed superior performance of 4C hybrid scaffolds, particularly in OM. Compared to commercial hydroxyapatite scaffolds, these hybrid scaffolds demonstrated enhanced cell activity and survival. The pre-vascularisation concept on 4C hybrid scaffolds showed the proliferation of both HUVECs and hMSCs throughout the scaffolds, with a positive expression of osteogenic and angiogenic markers at the early stages. Full article
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23 pages, 5634 KiB  
Article
Ovine Mesenchymal Stem Cell Chondrogenesis on a Novel 3D-Printed Hybrid Scaffold In Vitro
by Arianna De Mori, Agathe Heyraud, Francesca Tallia, Gordon Blunn, Julian R. Jones, Tosca Roncada, Justin Cobb and Talal Al-Jabri
Bioengineering 2024, 11(2), 112; https://doi.org/10.3390/bioengineering11020112 - 24 Jan 2024
Cited by 5 | Viewed by 2424
Abstract
This study evaluated the use of silica/poly(tetrahydrofuran)/poly(ε-caprolactone) (SiO2/PTHF/PCL-diCOOH) 3D-printed scaffolds, with channel sizes of either 200 (SC-200) or 500 (SC-500) µm, as biomaterials to support the chondrogenesis of sheep bone marrow stem cells (oBMSC), under in vitro conditions. The objective was [...] Read more.
This study evaluated the use of silica/poly(tetrahydrofuran)/poly(ε-caprolactone) (SiO2/PTHF/PCL-diCOOH) 3D-printed scaffolds, with channel sizes of either 200 (SC-200) or 500 (SC-500) µm, as biomaterials to support the chondrogenesis of sheep bone marrow stem cells (oBMSC), under in vitro conditions. The objective was to validate the potential use of SiO2/PTHF/PCL-diCOOH for prospective in vivo ovine studies. The behaviour of oBMSC, with and without the use of exogenous growth factors, on SiO2/PTHF/PCL-diCOOH scaffolds was investigated by analysing cell attachment, viability, proliferation, morphology, expression of chondrogenic genes (RT-qPCR), deposition of aggrecan, collagen II, and collagen I (immunohistochemistry), and quantification of sulphated glycosaminoglycans (GAGs). The results showed that all the scaffolds supported cell attachment and proliferation with upregulation of chondrogenic markers and the deposition of a cartilage extracellular matrix (collagen II and aggrecan). Notably, SC-200 showed superior performance in terms of cartilage gene expression. These findings demonstrated that SiO2/PTHF/PCL-diCOOH with 200 µm pore size are optimal for promoting chondrogenic differentiation of oBMSC, even without the use of growth factors. Full article
(This article belongs to the Special Issue Biomaterials in Bone and Cartilage Tissue Engineering)
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11 pages, 4128 KiB  
Article
Effects of Poly-Si Grain Boundary on Retention Characteristics under Cross-Temperature Conditions in 3-D NAND Flash Memory
by Ukju An, Gilsang Yoon, Donghyun Go, Jounghun Park, Donghwi Kim, Jongwoo Kim and Jeong-Soo Lee
Micromachines 2023, 14(12), 2199; https://doi.org/10.3390/mi14122199 - 30 Nov 2023
Cited by 1 | Viewed by 2660
Abstract
Electrical characteristics with various program temperatures (TPGM) in three-dimensional (3-D) NAND flash memory are investigated. The cross-temperature conditions of the TPGM up to 120 °C and the read temperature (TREAD) at 30 °C are used to [...] Read more.
Electrical characteristics with various program temperatures (TPGM) in three-dimensional (3-D) NAND flash memory are investigated. The cross-temperature conditions of the TPGM up to 120 °C and the read temperature (TREAD) at 30 °C are used to analyze the influence of grain boundaries (GB) on the bit line current (IBL) and threshold voltage (VT). The VT shift in the E-P-E pattern is successfully decomposed into the charge loss (ΔVT,CL) component and the poly-Si GB (ΔVT,GB) component. The extracted ΔVT,GB increases at higher TPGM due to the reduced GB potential barrier. Additionally, the ΔVT,GB is evaluated using the Technology Computer Aided Design (TCAD) simulation, depending on the GB position (XGB) and the bit line voltage (VBL). Full article
(This article belongs to the Section D1: Semiconductor Devices)
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12 pages, 1955 KiB  
Article
Enhanced Synaptic Behaviors in Chitosan Electrolyte-Based Electric-Double-Layer Transistors with Poly-Si Nanowire Channel Structures
by Dong-Hee Lee, Hwi-Su Kim, Ki-Woong Park, Hamin Park and Won-Ju Cho
Biomimetics 2023, 8(5), 432; https://doi.org/10.3390/biomimetics8050432 - 18 Sep 2023
Cited by 3 | Viewed by 2054
Abstract
In this study, we enhance the synaptic behavior of artificial synaptic transistors by utilizing nanowire (NW)-type polysilicon channel structures. The high surface-to-volume ratio of the NW channels enables efficient modulation of the channel conductance, which is interpreted as the synaptic weight. As a [...] Read more.
In this study, we enhance the synaptic behavior of artificial synaptic transistors by utilizing nanowire (NW)-type polysilicon channel structures. The high surface-to-volume ratio of the NW channels enables efficient modulation of the channel conductance, which is interpreted as the synaptic weight. As a result, NW-type synaptic transistors exhibit a larger hysteresis window compared to film-type synaptic transistors, even within the same gate voltage sweeping range. Moreover, NW-type synaptic transistors demonstrate superior short-term facilitation and long-term memory transition compared with film-type ones, as evidenced by the measured paired-pulse facilitation and excitatory post-synaptic current characteristics at varying frequencies and pulse numbers. Additionally, we observed gradual potentiation/depression characteristics, making these artificial synapses applicable to artificial neural networks. Furthermore, the NW-type synaptic transistors exhibit improved Modified National Institute of Standards and Technology pattern recognition rate of 91.2%. In conclusion, NW structure channels are expected to be a promising technology for next-generation artificial intelligence (AI) semiconductors, and the integration of NW structure channels has significant potential to advance AI semiconductor technology. Full article
(This article belongs to the Special Issue Bionic Engineering for Boosting Multidisciplinary Integration)
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11 pages, 2618 KiB  
Article
Optimization of Gas-Sensing Properties in Poly(triarylamine) Field-Effect Transistors by Device and Interface Engineering
by Youngnan Kim, Donggeun Lee, Ky Van Nguyen, Jung Hun Lee and Wi Hyoung Lee
Polymers 2023, 15(16), 3463; https://doi.org/10.3390/polym15163463 - 18 Aug 2023
Cited by 5 | Viewed by 1738
Abstract
In this study, we investigated the gas-sensing mechanism in bottom-gate organic field-effect transistors (OFETs) using poly(triarylamine) (PTAA). A comparison of different device architectures revealed that the top-contact structure exhibited superior gas-sensing performance in terms of field-effect mobility and sensitivity. The thickness of the [...] Read more.
In this study, we investigated the gas-sensing mechanism in bottom-gate organic field-effect transistors (OFETs) using poly(triarylamine) (PTAA). A comparison of different device architectures revealed that the top-contact structure exhibited superior gas-sensing performance in terms of field-effect mobility and sensitivity. The thickness of the active layer played a critical role in enhancing these parameters in the top-contact structure. Moreover, the distance and pathway for charge carriers to reach the active channel were found to significantly influence the gas response. Additionally, the surface treatment of the SiO2 dielectric with hydrophobic self-assembled mono-layers led to further improvement in the performance of the OFETs and gas sensors by effectively passivating the silanol groups. Under optimal conditions, our PTAA-based gas sensors achieved an exceptionally high response (>200%/ppm) towards NO2. These findings highlight the importance of device and interface engineering for optimizing gas-sensing properties in amorphous polymer semiconductors, offering valuable insights for the design of advanced gas sensors. Full article
(This article belongs to the Special Issue Polymer Materials in Sensors, Actuators and Energy Conversion II)
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14 pages, 1200 KiB  
Review
Applicability of Composite Magnetic Membranes in Separation Processes of Gaseous and Liquid Mixtures—A Review
by Łukasz Jakubski, Gabriela Dudek and Roman Turczyn
Membranes 2023, 13(4), 384; https://doi.org/10.3390/membranes13040384 - 28 Mar 2023
Cited by 9 | Viewed by 2913
Abstract
Recent years have shown a growing interest in the application of membranes exhibiting magnetic properties in various separation processes. The aim of this review is to provide an in-depth overview of magnetic membranes that can be successfully applied for gas separation, pervaporation, ultrafiltration, [...] Read more.
Recent years have shown a growing interest in the application of membranes exhibiting magnetic properties in various separation processes. The aim of this review is to provide an in-depth overview of magnetic membranes that can be successfully applied for gas separation, pervaporation, ultrafiltration, nanofiltration, adsorption, electrodialysis, and reverse osmosis. Based on the comparison of the efficiency of these separation processes using magnetic and non-magnetic membranes, it has been shown that magnetic particles used as fillers in polymer composite membranes can significantly improve the efficiency of separation of both gaseous and liquid mixtures. This observed separation enhancement is due to the variation of magnetic susceptibility of different molecules and distinct interactions with dispersed magnetic fillers. For gas separation, the most effective magnetic membrane consists of polyimide filled with MQFP-B particles, for which the separation factor (αrat O2/N2) increased by 211% when compared to the non-magnetic membrane. The same MQFP powder used as a filler in alginate membranes significantly improves water/ethanol separation via pervaporation, reaching a separation factor of 12,271.0. For other separation methods, poly(ethersulfone) nanofiltration membranes filled with ZnFe2O4@SiO2 demonstrated a more than four times increase in water flux when compared to the non-magnetic membranes for water desalination. The information gathered in this article can be used to further improve the separation efficiency of individual processes and to expand the application of magnetic membranes to other branches of industry. Furthermore, this review also highlights the need for further development and theoretical explanation of the role of magnetic forces in separation processes, as well as the potential for extending the concept of magnetic channels to other separation methods, such as pervaporation and ultrafiltration. This article provides valuable insights into the application of magnetic membranes and lays the groundwork for future research and development in this area. Full article
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8 pages, 2292 KiB  
Article
Activation Enhancement and Grain Size Improvement for Poly-Si Channel Vertical Transistor by Laser Thermal Annealing in 3D NAND Flash
by Tao Yang, Zhiliang Xia, Dongyu Fan, Dongxue Zhao, Wei Xie, Yuancheng Yang, Lei Liu, Wenxi Zhou and Zongliang Huo
Micromachines 2023, 14(1), 230; https://doi.org/10.3390/mi14010230 - 16 Jan 2023
Cited by 1 | Viewed by 4253
Abstract
The bit density is generally increased by stacking more layers in 3D NAND Flash. Lowering dopant activation of select transistors results from complex integrated processes. To improve channel dopant activation, the test structure of vertical channel transistors was used to investigate the influence [...] Read more.
The bit density is generally increased by stacking more layers in 3D NAND Flash. Lowering dopant activation of select transistors results from complex integrated processes. To improve channel dopant activation, the test structure of vertical channel transistors was used to investigate the influence of laser thermal annealing on dopant activation. The activation of channel doping by different thermal annealing methods was compared. The laser thermal annealing enhanced the channel activation rate by at least 23% more than limited temperature rapid thermal annealing. We then comprehensively explore the laser thermal annealing energy density on the influence of Poly-Si grain size and device performance. A clear correlation between grain size mean and grain size sigma, large grain size mean and sigma with large laser thermal annealing energy density. Large laser thermal annealing energy density leads to tightening threshold voltage and subthreshold swing distribution since Poly-Si grain size regrows for better grain size distribution with local grains optimization. As an enabler for next-generation technologies, laser thermal annealing will be highly applied in 3D NAND Flash for better device performance with stacking more layers, and opening new opportunities of novel 3D architectures in the semiconductor industry. Full article
(This article belongs to the Special Issue Advances in Emerging Nonvolatile Memory, Volume II)
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12 pages, 6293 KiB  
Article
Design of a Capacitorless DRAM Based on Storage Layer Separated Using Separation Oxide and Polycrystalline Silicon
by Geon Uk Kim, Young Jun Yoon, Jae Hwa Seo, Sang Ho Lee, Jin Park, Ga Eon Kang, Jun Hyeok Heo, Jaewon Jang, Jin-Hyuk Bae, Sin-Hyung Lee and In Man Kang
Electronics 2022, 11(20), 3365; https://doi.org/10.3390/electronics11203365 - 18 Oct 2022
Cited by 4 | Viewed by 4410
Abstract
In this study, a capacitorless one-transistor dynamic random-access memory (1T-DRAM) based on a polycrystalline silicon (Poly-Si) metal-oxide-semiconductor field-effect transistor (MOSFET) with a storage layer separated using a separation oxide was designed and analyzed using technology computer-aided design (TCAD). The channel and storage layers [...] Read more.
In this study, a capacitorless one-transistor dynamic random-access memory (1T-DRAM) based on a polycrystalline silicon (Poly-Si) metal-oxide-semiconductor field-effect transistor (MOSFET) with a storage layer separated using a separation oxide was designed and analyzed using technology computer-aided design (TCAD). The channel and storage layers were separated using a separation oxide to improve the inferior retention time of the conventional 1T-DRAM, and we adopted the underlap structure to reduce Shockley-Read-Hall recombination. In addition, poly-Si, which has several advantages, including low manufacturing cost and availability of high-density three-dimensional (3D) memory arrays, is used to easily fabricate silicon-on-insulator (SOI)-like structures. Accordingly, we extracted memory performance by analyzing the effect of grain boundary (GB). The proposed 1T-DRAM achieved a sensing margin of 14.10 μA/μm and a retention time of 251 ms at T = 358 K, even in the existence of a GB. Full article
(This article belongs to the Special Issue Advanced CMOS Devices and Applications)
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13 pages, 3694 KiB  
Article
Binary-Synaptic Plasticity in Ambipolar Ni-Silicide Schottky Barrier Poly-Si Thin Film Transistors Using Chitosan Electric Double Layer
by Ki-Woong Park and Won-Ju Cho
Nanomaterials 2022, 12(17), 3063; https://doi.org/10.3390/nano12173063 - 3 Sep 2022
Cited by 3 | Viewed by 2773
Abstract
We propose an ambipolar chitosan synaptic transistor that effectively responds to binary neuroplasticity. We fabricated the synaptic transistors by applying a chitosan electric double layer (EDL) to the gate insulator of the excimer laser annealed polycrystalline silicon (poly-Si) thin-film transistor (TFT) with Ni-silicide [...] Read more.
We propose an ambipolar chitosan synaptic transistor that effectively responds to binary neuroplasticity. We fabricated the synaptic transistors by applying a chitosan electric double layer (EDL) to the gate insulator of the excimer laser annealed polycrystalline silicon (poly-Si) thin-film transistor (TFT) with Ni-silicide (NiSi) Schottky-barrier source/drain (S/D) junction. The undoped poly-Si channel and the NiSi S/D contact allowed conduction by electrons and holes, resulting in artificial synaptic behavior in both p-type and n-type regions. A slow polarization reaction by the mobile ions such as anions (CH3COO and OH) and cations (H+) in the chitosan EDL induced hysteresis window in the transfer characteristics of the ambipolar TFTs. We demonstrated the excitatory post-synaptic current modulations and stable conductance modulation through repetitive potentiation and depression pulse. We expect the proposed ambipolar chitosan synaptic transistor that responds effectively to both positive and negative stimulation signals to provide more complex information process versatility for bio-inspired neuromorphic computing systems. Full article
(This article belongs to the Special Issue Intelligent Nanomaterials and Nanosystems)
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8 pages, 2641 KiB  
Article
Compact Integration of Hydrogen–Resistant a–InGaZnO and Poly–Si Thin–Film Transistors
by Yunping Wang, Yuheng Zhou, Zhihe Xia, Wei Zhou, Meng Zhang, Fion Sze Yan Yeung, Man Wong, Hoi Sing Kwok, Shengdong Zhang and Lei Lu
Micromachines 2022, 13(6), 839; https://doi.org/10.3390/mi13060839 - 27 May 2022
Cited by 10 | Viewed by 4663
Abstract
The low–temperature poly–Si oxide (LTPO) backplane is realized by monolithically integrating low–temperature poly–Si (LTPS) and amorphous oxide semiconductor (AOS) thin–film transistors (TFTs) in the same display backplane. The LTPO–enabled dynamic refreshing rate can significantly reduce the display’s power consumption. However, the essential hydrogenation [...] Read more.
The low–temperature poly–Si oxide (LTPO) backplane is realized by monolithically integrating low–temperature poly–Si (LTPS) and amorphous oxide semiconductor (AOS) thin–film transistors (TFTs) in the same display backplane. The LTPO–enabled dynamic refreshing rate can significantly reduce the display’s power consumption. However, the essential hydrogenation of LTPS would seriously deteriorate AOS TFTs by increasing the population of channel defects and carriers. Hydrogen (H) diffusion barriers were comparatively investigated to reduce the H content in amorphous indium–gallium–zinc oxide (a–IGZO). Moreover, the intrinsic H–resistance of a–IGZO was impressively enhanced by plasma treatments, such as fluorine and nitrous oxide. Enabled by the suppressed H conflict, a novel AOS/LTPS integration structure was tested by directly stacking the H–resistant a–IGZO on poly–Si TFT, dubbed metal–oxide–on–Si (MOOS). The noticeably shrunken layout footprint could support much higher resolution and pixel density for next–generation displays, especially AR and VR displays. Compared to the conventional LTPO circuits, the more compact MOOS circuits exhibited similar characteristics. Full article
(This article belongs to the Special Issue Recent Advances in Thin Film Transistors)
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11 pages, 7175 KiB  
Article
A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch
by Hongbo Li, Chenchen Zhang, Gaobo Xu, Xuefeng Ding, Yue Ni, Guidong Chen, Dapeng Chen, Na Zhou and Haiyang Mao
Micromachines 2022, 13(2), 258; https://doi.org/10.3390/mi13020258 - 4 Feb 2022
Cited by 3 | Viewed by 2949
Abstract
In this article, we present the design, fabrication, and characterization of a thermopile infrared sensor array (TISA) pixel. This TISA pixel is composed of a dual-layer p+/n- poly-Si thermopile with a closed membrane and an n-channel metal oxide semiconductor (NMOS) switch. To address [...] Read more.
In this article, we present the design, fabrication, and characterization of a thermopile infrared sensor array (TISA) pixel. This TISA pixel is composed of a dual-layer p+/n- poly-Si thermopile with a closed membrane and an n-channel metal oxide semiconductor (NMOS) switch. To address the challenges in fabrication through the 3D integration method, the anode of the thermopile is connected to the drain of the NMOS, both of which are fabricated on the same bulk wafer using a CMOS compatible monolithic integration process. During a single process sequence, deposition, etching, lithography, and ion implantation steps are appropriately combined to fabricate the thermopile and the NMOS simultaneously. At the same time as ensuring high thermoelectric characteristics of the dual-layer p+/n- poly-Si thermopile, the basic switching functions of NMOS are achieved. Compared with a separate thermopile, the experimental results show that the thermopile integrated with the NMOS maintains a quick response, high sensitivity and high reliability. In addition, the NMOS employed as a switch can effectively and quickly control the readout of the thermopile sensing signal through the voltage, both on and off, at the gate of NMOS. Thus, such a TISA pixel fabricated by the monolithic CMOS-compatible integration approach is low-cost and high-performance, and can be applied in arrays for high-volume production. Full article
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12 pages, 4525 KiB  
Article
Memory Characteristics of Thin Film Transistor with Catalytic Metal Layer Induced Crystallized Indium-Gallium-Zinc-Oxide (IGZO) Channel
by Hoonhee Han, Seokmin Jang, Duho Kim, Taeheun Kim, Hyeoncheol Cho, Heedam Shin and Changhwan Choi
Electronics 2022, 11(1), 53; https://doi.org/10.3390/electronics11010053 - 24 Dec 2021
Cited by 15 | Viewed by 8731
Abstract
The memory characteristics of a flash memory device using c-axis aligned crystal indium gallium zinc oxide (CAAC-IGZO) thin film as a channel material were demonstrated. The CAAC-IGZO thin films can replace the current poly-silicon channel, which has reduced mobility because of grain-induced degradation. [...] Read more.
The memory characteristics of a flash memory device using c-axis aligned crystal indium gallium zinc oxide (CAAC-IGZO) thin film as a channel material were demonstrated. The CAAC-IGZO thin films can replace the current poly-silicon channel, which has reduced mobility because of grain-induced degradation. The CAAC-IGZO thin films were achieved using a tantalum catalyst layer with annealing. A thin film transistor (TFT) with SiO2/Si3N4/Al2O3 and CAAC-IGZO thin films, where Al2O3 was used for the tunneling layer, was evaluated for a flash memory application and compared with a device using an amorphous IGZO (a-IGZO) channel. A source and drain using indium-tin oxide and aluminum were also evaluated for TFT flash memory devices with crystallized and amorphous channel materials. Compared with the a-IGZO device, higher on-current (Ion), improved field effect carrier mobility (μFE), a lower body trap (Nss), a wider memory window (ΔVth), and better retention and endurance characteristics were attained using the CAAC-IGZO device. Full article
(This article belongs to the Section Semiconductor Devices)
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