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21 pages, 7417 KB  
Article
Enhancement of Antibacterial and Cytocompatibility Characteristics of Hydrophobic and Hydrophilic Titanium Surfaces Fabricated by Femtosecond Laser Processing
by Hun-Kook Choi, Young-Jun Jung, Ik-Bu Sohn, Harim Song, Hyeongdo Jeong, Seungpyo Kim, Daeseon Moon and Md. Shamim Ahsan
Appl. Sci. 2026, 16(2), 766; https://doi.org/10.3390/app16020766 - 12 Jan 2026
Viewed by 576
Abstract
We demonstrate the enhancement of antibacterial and cytocompatibility characteristics of femtosecond laser-treated pure titanium and Ti-6Al-4V titanium alloy samples suitable for orthopedic implant applications. We controlled the wettability of the titanium samples by tailoring the surface geometry using a femtosecond laser. To increase [...] Read more.
We demonstrate the enhancement of antibacterial and cytocompatibility characteristics of femtosecond laser-treated pure titanium and Ti-6Al-4V titanium alloy samples suitable for orthopedic implant applications. We controlled the wettability of the titanium samples by tailoring the surface geometry using a femtosecond laser. To increase the hydrophobicity, laser-assisted micro-grids patterning was performed on the titanium samples, where we achieved a highest contact angle of 144.6° for a 1 µL de-ionized water droplet. In contrast, the hydrophobic Ti-6Al-4V titanium alloy surfaces were converted to hydrophilic surfaces by fabricating periodic micro-gratings on the samples’ surface, where a lowest contact angle of 19.84° was achieved. Furthermore, we assessed the biocompatibility of the micro-patterned titanium samples by investigating the antibacterial activity against Staphylococcus Aureus bacteria. Moreover, the cytocompatibility of the micro-patterned titanium samples was examined using NCTC Clone 929 (L-929) mouse fibroblasts. The laser-treated titanium samples exhibited enhanced antibacterial performance while maintaining excellent cell compatibility. The experimental results confirmed excellent correlation with the wettability of the laser-patterned samples and their antibacterial characteristics and cytocompatibility. Overall, the findings highlight femtosecond laser surface structuring as a highly effective strategy to simultaneously improve antibacterial behavior and the biocompatibility of implant materials, offering a promising way for the advanced functionalization of orthopedic implants. Full article
(This article belongs to the Section Optics and Lasers)
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28 pages, 749 KB  
Article
Rethinking Accessibility: How Universal Design Is Shaping Rural Areas in Lithuania
by Živilė Gedminaitė-Raudonė and Monika Belhaj
Sustainability 2025, 17(18), 8311; https://doi.org/10.3390/su17188311 - 16 Sep 2025
Cited by 3 | Viewed by 2448
Abstract
Population aging and the rising prevalence of disability are reshaping demographic dynamics worldwide, underscoring the need for inclusive environments that accommodate diverse functional abilities. While legal mandates for accessibility exist, structural and institutional barriers often hinder implementation. Universal Design (UD) provides a transformative [...] Read more.
Population aging and the rising prevalence of disability are reshaping demographic dynamics worldwide, underscoring the need for inclusive environments that accommodate diverse functional abilities. While legal mandates for accessibility exist, structural and institutional barriers often hinder implementation. Universal Design (UD) provides a transformative framework that shifts the focus from individualized accommodations to systemic inclusion; however, its application in Lithuania, particularly in rural settings, remains underexplored. This study addresses this gap by investigating the integration of UD principles in the Ignalina region, a rural Lithuanian locality experiencing pronounced demographic decline and aging. Using the design thinking model, this research examined how public institutions navigate UD implementation across the phases of empathization, definition, ideation, prototyping, and testing. The findings reveal both promising developments and persistent challenges. Community-engaged initiatives, such as micro-grants, volunteer services, and digital accessibility platforms, have begun to enhance service inclusivity. However, issues such as outdated infrastructure, unclear legislative guidelines, and funding limitations continue to constrain progress. This study concludes that UD can serve not only as a mechanism for promoting accessibility but also as a strategic tool for rural socio-economic resilience, contributing to the discourse on inclusive spatial planning and policy development in aging and diversifying societies. Full article
(This article belongs to the Section Sustainable Urban and Rural Development)
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17 pages, 9262 KB  
Article
Infrared Absorption of Laser Patterned Sapphire Al2O3 for Radiative Cooling
by Nan Zheng, Daniel Smith, Soon Hock Ng, Hsin-Hui Huang, Dominyka Stonytė, Dominique Appadoo, Jitraporn Vongsvivut, Tomas Katkus, Nguyen Hoai An Le, Haoran Mu, Yoshiaki Nishijima, Lina Grineviciute and Saulius Juodkazis
Micromachines 2025, 16(4), 476; https://doi.org/10.3390/mi16040476 - 16 Apr 2025
Cited by 4 | Viewed by 3641
Abstract
The reflectance (R) of linear and circular micro-gratings on c-plane sapphire Al2O3 ablated by a femtosecond (fs) laser were spectrally characterised for thermal emission (1R) in the mid-to-far infrared (IR) spectral range. An [...] Read more.
The reflectance (R) of linear and circular micro-gratings on c-plane sapphire Al2O3 ablated by a femtosecond (fs) laser were spectrally characterised for thermal emission (1R) in the mid-to-far infrared (IR) spectral range. An IR camera was used to determine the blackbody radiation temperature from laser-patterned regions, which showed (3–6)% larger emissivity dependent on the grating pattern. The azimuthal emission curve closely followed the Lambertian angular profile cosθa at the 7.5–13 μm emission band. The back-side ablation method on transparent substrates was employed to prevent debris formation during energy deposition as it applies a forward pressure of >0.3 GPa to the debris and molten skin layer. The back-side ablation maximises energy deposition at the exit interface where the transition occurs from the high-to-low refractive index. Phononic absorption in the Reststrahlen region 20–30 μm can be tailored with the fs laser inscription of sensor structures/gratings. Full article
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10 pages, 3588 KB  
Communication
Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings
by Mengdi Zhang, Hao Yang, Qianqi Niu, Xuye Zhang, Jiaan Yang, Jiangbei Lai, Changjiang Fan, Mengwei Li and Chenguang Xin
Sensors 2024, 24(3), 908; https://doi.org/10.3390/s24030908 - 30 Jan 2024
Cited by 8 | Viewed by 2639
Abstract
In this paper, an ultracompact combined sensor for displacement and angle-synchronous measurement is proposed based on the self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the [...] Read more.
In this paper, an ultracompact combined sensor for displacement and angle-synchronous measurement is proposed based on the self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the optical transmission, respectively, within one single structure in the meantime. The optically transmitted properties of the two-grating structure are investigated in both theory and simulation. Simulated results indicate that optical transmission changes in a sinusoidal relationship to the input linear displacement. Meanwhile, the amplitude of the curve decreases with an input pitch angle, indicating the ability for synchronous measurement within one single compact structure. The synchronous measurement of the linear displacement and the angle is also demonstrated experimentally. The results show a resolution down to 4 nm for linear displacement measurement and a maximum sensitivity of 0.26 mV/arcsec within a range of ±1° for angle measurement. Benefiting from a simple common-path structure without using optical components, including reflectors and polarizers, the sensor shows ultra-high compactness for multiple-degrees-of-freedom measuring, indicating the great potential for this sensor in fields such as integrated mechanical positioning and semiconductor fabrication. Full article
(This article belongs to the Special Issue Imaging and Sensing in Optics and Photonics)
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8 pages, 2920 KB  
Communication
Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings
by Wenqing Chen, Li Jin, Zhibin Wang, Haifeng Peng and Mengwei Li
Micromachines 2023, 14(7), 1301; https://doi.org/10.3390/mi14071301 - 25 Jun 2023
Cited by 7 | Viewed by 2434
Abstract
An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We [...] Read more.
An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We investigated and optimized the design of the mechanical structure; the resonant frequency of the accelerometer is 1878.9 Hz and the mechanical sensitivity is 0.14 μm/g. And the optical grating parameters have also optimized with a period of 4 μm and a grating interval of 10 μm. The experimental results demonstrated that the in-plane MOEMS accelerometer with an optimal design achieved an acceleration sensitivity of 0.74 V/g (with better than 0.4% nonlinearity), a bias stability of 75 μg and an acceleration resolution of 2.0 mg, suggesting its potential applications in smartphones, automotive electronics, and structural health detection. Full article
(This article belongs to the Special Issue Accelerometer and Magnetometer: From Fundamentals to Applications)
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23 pages, 6604 KB  
Article
The Combined Effects of Topography and Stiffness on Neuronal Differentiation and Maturation Using a Hydrogel Platform
by Sabrina Mattiassi, Abigail A. Conner, Fan Feng, Eyleen L. K. Goh and Evelyn K. F. Yim
Cells 2023, 12(6), 934; https://doi.org/10.3390/cells12060934 - 18 Mar 2023
Cited by 16 | Viewed by 4471
Abstract
Biophysical parameters such as substrate topography and stiffness have been shown independently to elicit profound effects on neuronal differentiation and maturation from neural progenitor cells (NPCs) yet have not been investigated in combination. Here, the effects of various micrograting and stiffness combinations on [...] Read more.
Biophysical parameters such as substrate topography and stiffness have been shown independently to elicit profound effects on neuronal differentiation and maturation from neural progenitor cells (NPCs) yet have not been investigated in combination. Here, the effects of various micrograting and stiffness combinations on neuronal differentiation and maturation were investigated using a polyacrylamide and N-acryloyl-6-aminocaproic acid copolymer (PAA-ACA) hydrogel with tunable stiffness. Whole laminin was conjugated onto the PAA-ACA surface indirectly or directly to facilitate long-term mouse and human NPC-derived neuron attachment. Three micrograting dimensions (2–10 µm) were patterned onto gels with varying stiffness (6.1–110.5 kPa) to evaluate the effects of topography, stiffness, and their interaction. The results demonstrate that the extracellular matrix (ECM)-modified PAA-ACA gels support mouse and human neuronal cell attachment throughout the differentiation and maturation stages (14 and 28 days, respectively). The interaction between topography and stiffness is shown to significantly increase the proportion of β-tubulin III (TUJ1) positive neurons and microtubule associated protein-2 (MAP2) positive neurite branching and length. Thus, the effects of topography and stiffness cannot be imparted. These results provide a novel platform for neural mechanobiology studies and emphasize the utility of optimizing numerous biophysical cues for improved neuronal yield in vitro. Full article
(This article belongs to the Special Issue Neural Differentiation and Development)
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10 pages, 3886 KB  
Communication
An Ultracompact Angular Displacement Sensor Based on the Talbot Effect of Optical Microgratings
by Zhiyong Yang, Xiaochen Ma, Daguo Yu, Bin Cao, Qianqi Niu, Mengwei Li and Chenguang Xin
Sensors 2023, 23(3), 1091; https://doi.org/10.3390/s23031091 - 17 Jan 2023
Cited by 9 | Viewed by 3504
Abstract
Here, we report an ultracompact angular displacement sensor based on the Talbot effect of optical microgratings. Periodic Talbot interference patterns were obtained behind an upper optical grating. By putting another grating within the Talbot region, the total transmission of the two-grating structure was [...] Read more.
Here, we report an ultracompact angular displacement sensor based on the Talbot effect of optical microgratings. Periodic Talbot interference patterns were obtained behind an upper optical grating. By putting another grating within the Talbot region, the total transmission of the two-grating structure was found to be approximatively in a linear relationship with the relative pitch angle between the two gratings, which was explained by a transversal shift of the Talbot interference patterns. The influence of the grating parameters (e.g., the grating period, the number of grating lines and the gap between the two gratings) was also studied in both a simulation and an experiment, showing a tunable sensitivity and range by simply changing the grating parameters. A sensitivity of 0.19 mV/arcsec was experimentally obtained, leading to a relative sensitivity of 0.27%/arcsec within a linear range of ±396 arcsec with the 2 μm-period optical gratings. Benefitting from tunable properties and an ultracompact structure, we believe that the proposed sensor shows great potential in applications such as aviation, navigation, robotics and manufacturing engineering. Full article
(This article belongs to the Topic Advances in Optical Sensors)
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13 pages, 3175 KB  
Article
A Microfluidic Platform Revealing Interactions between Leukocytes and Cancer Cells on Topographic Micropatterns
by Xin Cui, Lelin Liu, Jiyu Li, Yi Liu, Ya Liu, Dinglong Hu, Ruolin Zhang, Siping Huang, Zhongning Jiang, Yuchao Wang, Yun Qu, Stella W. Pang and Raymond H. W. Lam
Biosensors 2022, 12(11), 963; https://doi.org/10.3390/bios12110963 - 2 Nov 2022
Cited by 10 | Viewed by 3804
Abstract
Immunoassay for detailed analysis of immune−cancer intercellular interactions can achieve more promising diagnosis and treatment strategies for cancers including nasopharyngeal cancer (NPC). In this study, we report a microfluidic live−cell immunoassay integrated with a microtopographic environment to meet the rising demand for monitoring [...] Read more.
Immunoassay for detailed analysis of immune−cancer intercellular interactions can achieve more promising diagnosis and treatment strategies for cancers including nasopharyngeal cancer (NPC). In this study, we report a microfluidic live−cell immunoassay integrated with a microtopographic environment to meet the rising demand for monitoring intercellular interactions in different tumor microenvironments. The developed assay allows: (1) coculture of immune cells and cancer cells on tunable (flat or micrograting) substrates, (2) simultaneous detection of different cytokines in a wide working range of 5–5000 pg/mL, and (3) investigation of migration behaviors of mono- and co-cultured cells on flat/grating platforms for revealing the topography-induced intercellular and cytokine responses. Cytokine monitoring was achieved on-chip by implementing a sensitive and selective microbead-based sandwich assay with an antibody on microbeads, target cytokines, and the matching fluorescent-conjugated detection antibody in an array of active peristaltic mixer-assisted cytokine detection microchambers. Moreover, this immunoassay requires a low sample volume down to 0.5 μL and short assay time (30 min) for on-chip cytokine quantifications. We validated the biocompatibility of the co-culture strategy between immune cells and NPC cells and compared the different immunological states of undifferentiated THP-1 monocytic cells or PMA-differentiated THP-1 macrophages co-culturing with NP460 and NPC43 on topographical and planar substrates, respectively. Hence, the integrated microfluidic platform provides an efficient, broad-range and precise on-chip cytokine detection approach, eliminates the manual sampling procedures and allows on-chip continuous cytokine monitoring without perturbing intercellular microenvironments on different topographical ECM substrates, which has the potential of providing clinical significance in early immune diagnosis, personalized immunotherapy, and precision medicine. Full article
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14 pages, 6728 KB  
Article
Design and Modification of a High-Resolution Optical Interferometer Accelerometer
by Yuan Yao, Debin Pan, Jianbo Wang, Tingting Dong, Jie Guo, Chensheng Wang, Anbing Geng, Weidong Fang and Qianbo Lu
Sensors 2021, 21(6), 2070; https://doi.org/10.3390/s21062070 - 16 Mar 2021
Cited by 26 | Viewed by 6074
Abstract
The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation [...] Read more.
The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2. Full article
(This article belongs to the Special Issue Advances in Inertial Sensors)
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25 pages, 7240 KB  
Article
Bioinstructive Micro-Nanotextured Zirconia Ceramic Interfaces for Guiding and Stimulating an Osteogenic Response In Vitro
by Livia Elena Sima, Anca Bonciu, Madalina Baciu, Iulia Anghel, Luminita Nicoleta Dumitrescu, Laurentiu Rusen and Valentina Dinca
Nanomaterials 2020, 10(12), 2465; https://doi.org/10.3390/nano10122465 - 9 Dec 2020
Cited by 13 | Viewed by 4778
Abstract
Osseous implantology’s material requirements include a lack of potential for inducing allergic disorders and providing both functional and esthetic features for the patient’s benefit. Despite being bioinert, Zirconia ceramics have become a candidate of interest to be used as an alternative to titanium [...] Read more.
Osseous implantology’s material requirements include a lack of potential for inducing allergic disorders and providing both functional and esthetic features for the patient’s benefit. Despite being bioinert, Zirconia ceramics have become a candidate of interest to be used as an alternative to titanium dental and cochlear bone-anchored hearing aid (BAHA) implants, implying the need for endowing the surface with biologically instructive properties by changing basic parameters such as surface texture. Within this context, we propose anisotropic and isotropic patterns (linear microgroove arrays, and superimposed crossline microgroove arrays, respectively) textured in zirconia substrates, as bioinstructive interfaces to guide the cytoskeletal organization of human mesenchymal stem cells (hMSCs). The designed textured micro-nano interfaces with either steep ridges and microgratings or curved edges, and nanoroughened walls obtained by direct femtosecond laser texturing are used to evaluate the hMSC response parameters and osteogenic differentiation to each topography. Our results show parallel micro line anisotropic surfaces are able to guide cell growth only for the steep surfaces, while the curved ones reduce the initial response and show the lowest osteogenic response. An improved osteogenic phenotype of hMSCs is obtained when grown onto isotropic grid/pillar-like patterns, showing an improved cell coverage and Ca/P ratio, with direct implications for BAHA prosthetic development, or other future applications in regenerating bone defects. Full article
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10 pages, 2495 KB  
Article
Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching
by Shuang-Ning Yang, Xue-Qing Liu, Jia-Xin Zheng, Yi-Ming Lu and Bing-Rong Gao
Nanomaterials 2020, 10(7), 1313; https://doi.org/10.3390/nano10071313 - 4 Jul 2020
Cited by 18 | Viewed by 4127
Abstract
Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional microgratings with controllable periods (1, 2, and 3 [...] Read more.
Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional microgratings with controllable periods (1, 2, and 3 μm) and heights, from dozens to hundreds of nanometers, and high surface smoothness are realized on GaAs by the method. The surface roughness of the periodic microstructures is significantly reduced from 120 nm to 40 nm with a subsequent inductively coupled plasma (ICP) etching. By using laser interference with angle-multiplexed exposures, two-dimensional square- and hexagonal-patterned microstructures are realized on the surface of GaAs. Compared with samples without etching, the diffraction efficiency can be significantly enhanced for samples with dry etching, due to the improvement of surface quality. Full article
(This article belongs to the Section Synthesis, Interfaces and Nanostructures)
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12 pages, 2461 KB  
Article
Miniature Broadband NIR Spectrometer Based on FR4 Electromagnetic Scanning Micro-Grating
by Liangkun Huang, Quan Wen, Jian Huang, Fan Yu, Hongjie Lei and Zhiyu Wen
Micromachines 2020, 11(4), 393; https://doi.org/10.3390/mi11040393 - 10 Apr 2020
Cited by 9 | Viewed by 4348
Abstract
This paper presents a miniaturized, broadband near-infrared (NIR) spectrometer with a flame-retardant 4 (FR4)-based scanning micrograte. A 90° off-axis parabolic mirror and a crossed Czerny–Turner structure were used for creating an astigmatism-free optical system design. The optical system of the spectrometer consists of [...] Read more.
This paper presents a miniaturized, broadband near-infrared (NIR) spectrometer with a flame-retardant 4 (FR4)-based scanning micrograte. A 90° off-axis parabolic mirror and a crossed Czerny–Turner structure were used for creating an astigmatism-free optical system design. The optical system of the spectrometer consists of a 90° off-axis parabolic mirror, an FR4-based scanning micrograte, and a two-color indium gallium arsenide (InGaAs) diode with a crossed Czerny–Turner structure optical design. We used a wide exit slit and an off-axis parabolic mirror with a short focal length to improve the signal-to-noise ratio (SNR) of the full spectrum. We enabled a miniaturized design for the spectrometer by utilizing a novel FR4 micrograte for spectral dispersion and spatial scanning. The spectrometer can detect the full near-infrared spectrum while only using a two-color InGaAs diode, and thus, the grating scanning angle of this spectrometer is small when compared to a dual-detector-based spectrometer. In addition, the angle signal can be obtained through an angle sensor, which is integrated into the scanning micrograte. The real-time angle signal is used to form a closed-loop control over the scanning micrograte and calibrate the spectral signal. Finally, a series of tests was performed. The experimental results showed that the spectrometer has a working wavelength range of 800–2500 nm. The resolution is 10 nm at a wavelength range of 800–1650 nm and 15 nm at a wavelength range of 1650–2500 nm. Similarly, the stability of these two wavelength ranges is better than ±1 nm and ±2 nm, respectively. The spectrometer’s volume is 80 × 75 × 65 mm3 and its weight is 0.5 kg. The maximum spectral fluctuation does not exceed 1.5% and the signal-to-noise ratio is 284 after only one instance of averaging. Full article
(This article belongs to the Special Issue MOEMS: Micro-Optical MEMS)
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18 pages, 6731 KB  
Article
A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting
by Fan Yu, Quan Wen, Hongjie Lei, Liangkun Huang and Zhiyu Wen
Electronics 2019, 8(7), 770; https://doi.org/10.3390/electronics8070770 - 10 Jul 2019
Cited by 5 | Viewed by 3645
Abstract
This paper presents a compound control system for precise control of the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting. It mainly consists of a frequency controller and an angle controller. A dual closed-loop structure consisting of a current loop and an angle loop was [...] Read more.
This paper presents a compound control system for precise control of the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting. It mainly consists of a frequency controller and an angle controller. A dual closed-loop structure consisting of a current loop and an angle loop was designed in the angle controller. In addition, the incremental proportional–integral–derivative (PID) control algorithm was designed in the current loop, and the fuzzy-PID control algorithm was employed in the angle loop. From the experimental results, the frequency controller can effectively track the real-time resonant frequency of the scanning micrograting with a tracking accuracy of 0.1 Hz. The overshoot of the scanning micrograting is eliminated. Compared to an open-loop control system, the control system presented in this work reduces the steady-state error of the scanning micrograting from 1.122% to 0.243%. The control accuracy of the compound control system is 0.02°. The anti-interference recovery time of the scanning micrograting was reduced from 550 ms to 181 ms, and the long-term stability was increased from 2.94% to 0.12%. In the compound control system presented in this paper, the crucial parameters of the FR4-based electromagnetic scanning micrograting, including motion accuracy, anti-interference ability, and long-term stability, were effectively improved. Full article
(This article belongs to the Special Issue Progress in MEMS/NEMS Devices)
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9 pages, 2973 KB  
Article
An Optical MEMS Acoustic Sensor Based on Grating Interferometer
by Mengying Zhang, Gaomi Wu, Dipeng Ren, Ran Gao, Zhi-Mei Qi and Xingdong Liang
Sensors 2019, 19(7), 1503; https://doi.org/10.3390/s19071503 - 28 Mar 2019
Cited by 29 | Viewed by 6714
Abstract
Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed [...] Read more.
Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C. Full article
(This article belongs to the Section Physical Sensors)
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4 pages, 177 KB  
Editorial
Phase-Contrast and Dark-Field Imaging
by Simon Zabler
J. Imaging 2018, 4(10), 113; https://doi.org/10.3390/jimaging4100113 - 2 Oct 2018
Cited by 2 | Viewed by 4799
Abstract
Very early, in 1896, Wilhelm Conrad Röntgen, the founding father of X-rays, attempted to measure diffraction and refraction by this new kind of radiation, in vain. Only 70 years later, these effects were measured by Ulrich Bonse and Michael Hart who used them [...] Read more.
Very early, in 1896, Wilhelm Conrad Röntgen, the founding father of X-rays, attempted to measure diffraction and refraction by this new kind of radiation, in vain. Only 70 years later, these effects were measured by Ulrich Bonse and Michael Hart who used them to make full-field images of biological specimen, coining the term phase-contrast imaging. Yet, another 30 years passed until the Talbot effect was rediscovered for X-radiation, giving rise to a micrograting based interferometer, replacing the Bonse–Hart interferometer, which relied on a set of four Laue-crystals for beam splitting and interference. By merging the Lau-interferometer with this Talbot-interferometer, another ten years later, measuring X-ray refraction and X-ray scattering full-field and in cm-sized objects (as Röntgen had attempted 110 years earlier) became feasible in every X-ray laboratory around the world. Today, now that another twelve years have passed and we are approaching the 125th jubilee of Röntgen’s discovery, neither Laue-crystals nor microgratings are a necessity for sensing refraction and scattering by X-rays. Cardboard, steel wool, and sandpaper are sufficient for extracting these contrasts from transmission images, using the latest image reconstruction algorithms. This advancement and the ever rising number of applications for phase-contrast and dark-field imaging prove to what degree our understanding of imaging physics as well as signal processing have advanced since the advent of X-ray physics, in particular during the past two decades. The discovery of the electron, as well as the development of electron imaging technology, has accompanied X-ray physics closely along its path, both modalities exploring the applications of new dark-field contrast mechanisms these days. Materials science, life science, archeology, non-destructive testing, and medicine are the key faculties which have already integrated these new imaging devices, using their contrast mechanisms in full. This special issue “Phase-Contrast and Dark-field Imaging” gives us a broad yet very to-the-point glimpse of research and development which are currently taking place in this very active field. We find reviews, applications reports, and methodological papers of very high quality from various groups, most of which operate X-ray scanners which comprise these new imaging modalities. Full article
(This article belongs to the Special Issue Phase-Contrast and Dark-Field Imaging)
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