Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
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Nanomaterials 2020, 10(7), 1313; https://doi.org/10.3390/nano10071313
Received: 12 June 2020
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Revised: 27 June 2020
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Accepted: 29 June 2020
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Published: 4 July 2020
(This article belongs to the Section Synthesis, Interfaces and Nanostructures)
Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional microgratings with controllable periods (1, 2, and 3 μm) and heights, from dozens to hundreds of nanometers, and high surface smoothness are realized on GaAs by the method. The surface roughness of the periodic microstructures is significantly reduced from 120 nm to 40 nm with a subsequent inductively coupled plasma (ICP) etching. By using laser interference with angle-multiplexed exposures, two-dimensional square- and hexagonal-patterned microstructures are realized on the surface of GaAs. Compared with samples without etching, the diffraction efficiency can be significantly enhanced for samples with dry etching, due to the improvement of surface quality.
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Keywords:
microstructure; GaAs; laser interference; dry etching
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MDPI and ACS Style
Yang, S.-N.; Liu, X.-Q.; Zheng, J.-X.; Lu, Y.-M.; Gao, B.-R. Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching. Nanomaterials 2020, 10, 1313. https://doi.org/10.3390/nano10071313
AMA Style
Yang S-N, Liu X-Q, Zheng J-X, Lu Y-M, Gao B-R. Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching. Nanomaterials. 2020; 10(7):1313. https://doi.org/10.3390/nano10071313
Chicago/Turabian StyleYang, Shuang-Ning, Xue-Qing Liu, Jia-Xin Zheng, Yi-Ming Lu, and Bing-Rong Gao. 2020. "Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching" Nanomaterials 10, no. 7: 1313. https://doi.org/10.3390/nano10071313
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