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Open AccessArticle

A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting

by Fan Yu 1,2,*, Quan Wen 1,2,3,*, Hongjie Lei 1,2, Liangkun Huang 1,2 and Zhiyu Wen 1,2,*
1
Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
2
Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China
3
Department MDI, Fraunhofer Institute for Electronic Nano Systems (ENAS), 09131 Chemnitz, Germany
*
Authors to whom correspondence should be addressed.
Electronics 2019, 8(7), 770; https://doi.org/10.3390/electronics8070770
Received: 29 May 2019 / Revised: 4 July 2019 / Accepted: 8 July 2019 / Published: 10 July 2019
(This article belongs to the Special Issue Progress in MEMS/NEMS Devices)
This paper presents a compound control system for precise control of the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting. It mainly consists of a frequency controller and an angle controller. A dual closed-loop structure consisting of a current loop and an angle loop was designed in the angle controller. In addition, the incremental proportional–integral–derivative (PID) control algorithm was designed in the current loop, and the fuzzy-PID control algorithm was employed in the angle loop. From the experimental results, the frequency controller can effectively track the real-time resonant frequency of the scanning micrograting with a tracking accuracy of 0.1 Hz. The overshoot of the scanning micrograting is eliminated. Compared to an open-loop control system, the control system presented in this work reduces the steady-state error of the scanning micrograting from 1.122% to 0.243%. The control accuracy of the compound control system is 0.02°. The anti-interference recovery time of the scanning micrograting was reduced from 550 ms to 181 ms, and the long-term stability was increased from 2.94% to 0.12%. In the compound control system presented in this paper, the crucial parameters of the FR4-based electromagnetic scanning micrograting, including motion accuracy, anti-interference ability, and long-term stability, were effectively improved. View Full-Text
Keywords: scanning micrograting; closed-loop control; fuzzy-PID; flame-retardant 4 (FR4) scanning micrograting; closed-loop control; fuzzy-PID; flame-retardant 4 (FR4)
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MDPI and ACS Style

Yu, F.; Wen, Q.; Lei, H.; Huang, L.; Wen, Z. A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting. Electronics 2019, 8, 770.

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