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Open AccessArticle

A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting

by Fan Yu 1,2,*, Quan Wen 1,2,3,*, Hongjie Lei 1,2, Liangkun Huang 1,2 and Zhiyu Wen 1,2,*
Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China
Department MDI, Fraunhofer Institute for Electronic Nano Systems (ENAS), 09131 Chemnitz, Germany
Authors to whom correspondence should be addressed.
Electronics 2019, 8(7), 770;
Received: 29 May 2019 / Revised: 4 July 2019 / Accepted: 8 July 2019 / Published: 10 July 2019
(This article belongs to the Special Issue Progress in MEMS/NEMS Devices)
This paper presents a compound control system for precise control of the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting. It mainly consists of a frequency controller and an angle controller. A dual closed-loop structure consisting of a current loop and an angle loop was designed in the angle controller. In addition, the incremental proportional–integral–derivative (PID) control algorithm was designed in the current loop, and the fuzzy-PID control algorithm was employed in the angle loop. From the experimental results, the frequency controller can effectively track the real-time resonant frequency of the scanning micrograting with a tracking accuracy of 0.1 Hz. The overshoot of the scanning micrograting is eliminated. Compared to an open-loop control system, the control system presented in this work reduces the steady-state error of the scanning micrograting from 1.122% to 0.243%. The control accuracy of the compound control system is 0.02°. The anti-interference recovery time of the scanning micrograting was reduced from 550 ms to 181 ms, and the long-term stability was increased from 2.94% to 0.12%. In the compound control system presented in this paper, the crucial parameters of the FR4-based electromagnetic scanning micrograting, including motion accuracy, anti-interference ability, and long-term stability, were effectively improved. View Full-Text
Keywords: scanning micrograting; closed-loop control; fuzzy-PID; flame-retardant 4 (FR4) scanning micrograting; closed-loop control; fuzzy-PID; flame-retardant 4 (FR4)
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MDPI and ACS Style

Yu, F.; Wen, Q.; Lei, H.; Huang, L.; Wen, Z. A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting. Electronics 2019, 8, 770.

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