Search Results (27)

Fourier transform-based frequency sweeping interferometry (FT-FSI) is an interferometric technique that enables absolute distance measurement by detecting the beat frequencies from the interference of reflected signals. This method allows robust, simultaneous distance measurements to multiple targets and is largely immune to variations in the reflected optical signal intensity. As a result, FT-FSI maintains accuracy even when measuring reflectors with low reflectance. FT-FSI has recently been integrated into the full remote alignment system (FRAS) developed for the High-Luminosity Large Hadron Collider (HL-LHC) project at CERN. Designed to operate in harsh environments with electromagnetic interference, ionizing radiation and cryogenic temperatures, FRAS employs FT-FSI for the precise monitoring of the alignment of accelerator components. The system includes specialized interferometers and a range of sensors, including inclinometers, distance sensors, and leveling sensors. This paper presents a comprehensive review of the challenges associated with remote measurement and monitoring systems in harsh environments such as those of particle accelerators. It details the development and validation of the FT-FSI-based measurement system, emphasizing its critical role in enabling micrometric alignment accuracy. The developments and results presented in this work can be readily translated to other demanding metrology applications in harsh environments. Full article

Silicon (Si) and silicon carbide (SiC) are second- and third-generation semiconductor materials with excellent properties that are particularly suitable for applications in scenarios such as high temperature, high voltage, and high frequency. Si/SiC wafers face warpage and bending problems during production, which can seriously affect subsequent processing. Fast, accurate, and comprehensive detection of thickness, thickness variation, and flatness (including bow and warpage) of SiC and Si wafers is an industry-recognized challenge. Frequency scanning interferometry (FSI) can synchronize the upper and lower surfaces and thickness information of transparent parallel thin wafers, but it is still affected by multiple interfacial harmonic reflections, reflectivity asymmetry, and phase modulation uncertainty when measuring SiC thin wafers, which leads to thickness calculation errors and face reconstruction deviations. To this end, this paper proposes a high-precision facet reconstruction method for SiC/Si structures, which combines harmonic spectral domain decomposition, refractive index gradient constraints, and partitioning optimization strategy, and introduces interferometric signal “oversampling” and weighted fusion of multiple sets of data to effectively suppress higher-order harmonic interferences, and to enhance the accuracy of phase resolution. The multi-layer iterative optimization model further enhances the measurement accuracy and robustness of the system. The flatness measurement system constructed based on this method can realize the simultaneous acquisition of three-dimensional top and bottom surfaces on 6-inch Si/SiC wafers, and accurately reconstruct the key parameters, such as flatness, warpage, and thickness variation (TTV). A comparison with the Corning Tropel FlatMaster commercial system shows that this method has high consistency and good applicability. Full article

High aspect ratio (HAR) sample-induced aberrations seriously affect the topography measurement for the bottom of the microstructure by coherence scanning interferometry (CSI). Previous research proposed an aberration compensating method using deformable mirrors at the conjugate position of the pupil. However, it failed to compensate for the shift-variant aberrations introduced by the HAR hybrid trench array composed of multiple trenches with different parameters. Here, we propose a computational aberration correction method for measuring the topography of the HAR structure by the particle swarm optimization (PSO) algorithm without constructing a database and prior knowledge, and a phase filter in the spatial frequency domain is constructed to restore interference signals distorted by shift-variant aberrations. Since the aberrations of each sampling point are basically unchanged in the field of view corresponding to a single trench, each trench under test can be considered as a separate isoplanatic region. Therefore, a multi-channel aberration correction scheme utilizing the virtual phase filter based on isoplanatic region segmentation is established for hybrid trench array samples. The PSO algorithm is adopted to derive the optimal Zernike polynomial coefficients representing the filter, in which the interference fringe contrast is taken as the optimization criterion. Additionally, aberrations introduce phase distortion within the 3D transfer function (3D-TF), and the 3D-TF bandwidth remains unchanged. Accordingly, we set the non-zero part of the 3D-TF as a window function to preprocess the interferogram by filtering out the signals outside the window. Finally, experiments are performed in a single trench sample and two hybrid trench array samples with depths ranging from 100 to 300 μm and widths from 10 to 30 μm to verify the effectiveness and accuracy of the proposed method. Full article

Fiber-optic Fabry–Pérot (F–P) sensors offer significant potential for non-invasive hemodynamic monitoring, but existing sensing systems face limitations in multi-channel measurement capabilities and dynamic demodulation accuracy. This study introduces a sparse-frequency-scanning white-light interferometry (SFS-WLI) system with an adaptive mode-locked cross-correlation (MLCC) algorithm to address these challenges. The system leverages telecom-grade semiconductor lasers (191.2–196.15 THz sweep range, 50 GHz step) and a Fibonacci-optimized MLCC algorithm to achieve real-time cavity length demodulation at 5 kHz. Compared to normal MLCC algorithm, the Fibonacci-optimized algorithm reduces the number of computational iterations by 57 times while maintaining sub-nanometer resolution under dynamic perturbations. Experimental validation demonstrated a carotid–radial pulse wave velocity of 5.12 m/s in a healthy male volunteer. This work provides a scalable and cost-effective solution for cardiovascular monitoring with potential applications in point-of-care testing (POCT) and telemedicine. Full article

Fiber-optic tip sensors offer significant potential in biomedical applications due to their high sensitivity, compact size, and resistance to electromagnetic interference. This study focuses on advancing phase demodulation techniques for ultra-short Fabry–Pérot cavities within limited spectral bandwidths to enhance their application in biomedicine and diagnostics. We propose a novel sparse-sampled white-light interferometry system for respiratory monitoring, utilizing a monolithic integrated semiconductor tunable laser for quasi-continuous frequency scanning across 191.2–196.15 THz at a sampling rate of 5 kHz. A four-step phase-shifting algorithm (PSA) ensures precise phase demodulation, enabling high sensitivity for short-cavity fiber-optic sensors under constrained spectral bandwidth conditions. Humidity sensors fabricated via a self-growing polymerization process further enhance the system’s functionality. The experimental results demonstrate the system’s capability to accurately capture diverse breathing patterns—including normal, rapid, and deep states—with fast response and recovery times. These findings establish the system’s potential for real-time respiratory monitoring in clinical and point-of-care settings. Full article

This study involved the investigation of the mechanical and tribological behaviors of DIN 1.2344 and WP7V tool steels, quenched in a salt bath after austenitization at 1050 °C, followed by triple tempering for 2 h. The selection of tempering temperatures produced two hardness levels under four metallurgical conditions, with the hardest level found only for WP7V steel (54 and 57 HRC). The mechanical properties were evaluated using Rockwell C, Vickers, and nanoindentation methods, along with unnotched impact tests, according to the SEP 1314 guidelines. Wear tests were conducted in a tribometer configured for a reciprocating setup, with a frequency of 5 Hz, a load of 25 N, and a time of 60 min, at room temperature and at 200 °C. As counterbodies, alumina balls of 5 mm in diameter were used. Wear tracks were evaluated through scanning electron microscopy, EDS, interferometry, and Raman spectroscopy. Friction and wear behaviors were affected by the variation in temperature for softer steels (DIN 1.2344 and WP7V of 48.5 HRC): the higher the temperature, the better the tribological performance. The harder steels were not sensitive to temperature testing. These effects depend on maintaining iron oxide (hematite) at the point of contact. The wear rates determined for the hardest material (57 HRC), considering its impact resistance, make it unsuitable for severe conditions such as hot stamping. Full article

In this paper, a system for absolute distance measurement is proposed based on laser frequency scanning interferometry (FSI). The system utilizes a digitally tunable laser as the light source and employs synchronized pulses to drive an analog-to-digital converter (ADC) for interference signal acquisition. The frequency domain demodulation for absolute distance measurement is achieved through a three-spectrum line interpolation method based on the Hanning window. The system takes advantage of the spatial filtering characteristics of a single-mode optical fiber and the diffuse reflection properties of light to achieve a high integration of the prism system that forms the interference optical path. The resulting integrated fiber-optic probe is capable of measuring the distance to a non-cooperative target even when oriented at a certain angle with the target. We designed and fabricated a portable prototype. Experimental validation demonstrated that the maximum measurement distance of the system is 73.51 mm with a standard deviation of less than 0.19 μm for optimal measurement results. Even when there is an offset angle, the system maintains good measurement repeatability. Full article

The frequency stability of free-running lasers is susceptible to the influence of environmental factors, which cannot meet the long-term frequency stabilization requirements for atom interferometry precision measurements. To obtain a frequency-stabilized 780 nm laser beam, an automatic frequency stabilization system for an external cavity diode laser (ECDL) based on rubidium (Rb) atomic saturated absorption spectrum was designed using a commercial data acquisition (DAQ) card. The signals acquired by the A/D terminal are processed and analyzed by LabVIEW, which can automatically identify all the locking points and output the piezoelectric ceramic transducer (PZT) scan and digital feedback through the D/A terminal. The experimental results show that the system can lock to six different frequencies separately and realize automatic relocking within 3.5 s after unlocking. The system has a stability of 1.68 × 10⁻¹⁰@1 s and 4.77 × 10⁻¹²@1000 s, which meets the laboratory’s requirements for atomic interference experiments. Full article

New automated laser radar measurement systems at the Saab Inc. West Lafayette, USA, facility will make airframe assembly of the aft body for the new eT7-A aircraft a quicker, more cost-efficient process. Digital twin concepts realized through simulation and off-line programming show advantageous results when studying future state scenarios or investigating how a current large-volume dimensional metrology system acts and behaves. The aim of this exploration has been to examine how to facilitate the design and programming of automated laser radar concepts by means of novel simulation-based software. High-speed computing algorithms efficiently solve tasks and sequence problems related to many statistical combinatorial possibilities in calculations. However, this approach requires accurate and reliable models and digital twins that are continuously updated with real world data and information. In this paper, the main contributions are to create procedures to define the dimensional metrology workflow at Saab and to model and simulate the laser radar process, enhancing and tailoring existing offline programming software by specific new functionalities. A case study conducted at Saab Aeronautics premises in Linköping acted as a clinical laboratory to generate our research findings. The exploratory work indicates that a reliable simulation-based development method can be used advantageously in the early-stage design layout of automated dimensional metrology systems to verify and guarantee the line-of-sight of, e.g., a laser light path and its allowed inclinations to a specific geometrical feature to be measured, extracted, and evaluated. Full article

Laser interferometers that operate over a dynamic range exceeding one wavelength are used as compact displacement sensors for gravitational wave detectors and inertial sensors and in a variety of other high-precision applications. A number of approaches are available to extract the phase from such interferometers by implementing so-called phasemeters, algorithms to provide a linearised phase estimate. While many noise sources have to be considered for any given scheme, they are fundamentally limited by additive noise in the readout, such as electronic readout, digitisation, and shot-noise, which manifest as an effective, white phase noise in the phasemeter output. We calculated and compared the Cramer–Rao lower bound for phasemeters of some state-of-the-art two-beam interferometer schemes and derived their noise limitations for sub-fringe operation and for multi-fringe readout schemes. From this, we derived achievable noise performance levels for one of these interferometer techniques, deep-frequency modulation interferometry. We then applied our analysis to optical resonators and show that frequency scanning techniques can in theory benefit from such resonant enhancement, indicating that the sensitivities can be improved in future sensors. Full article

The study presents results from applying the Real Aperture Radar interferometry technique and Digital Image Correlation through a mobile phone camera to identify static and dynamic deformations of a gantry during surveying operations on the Michelangelo’s David at the Galleria dell’Accademia di Firenze Museum in Florence. The statue has considerable size and reaches an elevation of more than seven meters on its pedestal. An ad-hoc gantry was designed and deployed, given the cramped operating area around the statue. The scanner had a stability control system that forbid surveying in instrument movements. However, considering the unicity of the survey and its rare occurrence, the previous survey had been carried out in the year 2000; verifying stability and recording deformations is a crucial task, and necessary for validation. As the gantry does not have an on-board stability sensor, and considering the hi-survey accuracy requested, a redundant, contactless, remote monitoring system of the gantry and the statue stability was chosen to guarantee the maximum freedom of movement around the David to avoid any interference during scanning operations. Thanks to the TInRAR technique, the gantry and the statue were monitored with an accuracy of 0.01 mm. At the same time, a Digital Image Correlation analysis was performed on the gantry, which can be considered a Multi-Degree-Of-Freedom (MDOF) system, to accurately calculate the vibration frequency and amplitude. A comparison between TInRAR and DIC results reported substantial accordance in detecting gantry’s oscillating frequencies; a predominant oscillation frequency of 1.33 Hz was identified on the gantry structure by TinSAR and DIC analysis. Full article

A new technique is proposed for measuring film structure based on the combination of time- and frequency-domain fitting and white-light scanning interferometry. The approach requires only single scanning and employs a fitting method to obtain the film thickness and the upper surface height in the frequency and time domains, respectively. The cross-correlation function is applied to obtain the initial value of the upper surface height, thereby making the fitting process more accurate. Standard films (SiO₂) with different thicknesses were measured to verify the accuracy and reliability of the proposed method, and the three-dimensional topographies of the upper and lower surfaces of the films were reconstructed. Full article

Three-dimensional transfer functions (3D TFs) are generally assumed to fully describe the transfer behavior of optical topography measuring instruments such as coherence scanning interferometers in the spatial frequency domain. Therefore, 3D TFs are supposed to be independent of the surface under investigation resulting in a clear separation of surface properties and transfer characteristics. In this paper, we show that the 3D TF of an interference microscope differs depending on whether the object is specularly reflecting or consists of point scatterers. In addition to the 3D TF of a point scatterer, we will derive an analytical expression for the 3D TF corresponding to specular surfaces and demonstrate this as being most relevant in practical applications of coherence scanning interferometry (CSI). We additionally study the effects of temporal coherence and disclose that in conventional CSI temporal coherence effects dominate. However, narrowband light sources are advantageous if high spatial frequency components of weak phase objects are to be resolved, whereas, for low-frequency phase objects of higher amplitude, the temporal coherence is less affecting. Finally, we present an approach that explains the different transfer characteristics of coherence peak and phase detection in CSI signal analysis. Full article

Erosion is a major problem on agricultural lands in Europe. Erosion measurement tools have traditionally been focused on delocalized quantification but without mapping the real places inside the basin where the erosion took effect. In this article, we use new space missions, such as Sentinel-1, and the opportunity they offer to obtain SAR (Synthetic Aperture Radar) images with high frequency, resolution, range, and, above all, availability to enable the application of techniques, like differential interferometry, in new fields. We propose to measure ground deformation caused by water and tillage erosion in small agricultural basins using TopSAR (Terrain Observation with Progressive Scans SAR, Synthetic Aperture Radar) images acquired by the Sentinel-1 mission, after previously verifying the accuracy of these measurements through comparison with measurements from a LIDAR (Light Detection and Ranging) system. The results of this work confirm the potential of monitoring erosion in agricultural basins with differential interferometry over Sentinel-1 TopSAR images. Its capabilities have been successfully tested in different conditions related to agricultural tasks without precipitation or storm events. This technique makes it possible to study both water and tillage erosion and sedimentation processes and even to test the efficiency of anti-erosion measures in the field or to verify the results of different management practices over time. Full article

Light Detection and Ranging (LiDAR) is a 3D imaging technique, widely used in many applications such as augmented reality, automotive, machine vision, spacecraft navigation and landing. Achieving long-ranges and high-speed, most of all in outdoor applications with strong solar background illumination, are challenging requirements. In the introduction we review different 3D-ranging techniques (stereo-vision, projection with structured light, pulsed-LiDAR, amplitude-modulated continuous-wave LiDAR, frequency-modulated continuous-wave interferometry), illumination schemes (single point and blade scanning, flash-LiDAR) and time-resolved detectors for LiDAR (EM-CCD, I-CCD, APD, SPAD, SiPM). Then, we provide an extensive review of silicon- single photon avalanche diode (SPAD)-based LiDAR detectors (both commercial products and research prototypes) analyzing how each architecture faces the main challenges of LiDAR (i.e., long ranges, centimeter resolution, large field-of-view and high angular resolution, high operation speed, background immunity, eye-safety and multi-camera operation). Recent progresses in 3D stacking technologies provided an important step forward in SPAD array development, allowing to reach smaller pitch, higher pixel count and more complex processing electronics. In the conclusions, we provide some guidelines for the design of next generation SPAD-LiDAR detectors. Full article