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Keywords = electron beam deposition

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16 pages, 1196 KiB  
Article
Integrated Additive Manufacturing of TGV Interconnects and High-Frequency Circuits via Bipolar-Controlled EHD Jetting
by Dongqiao Bai, Jin Huang, Hongxiao Gong, Jianjun Wang, Yunna Pu, Jiaying Zhang, Peng Sun, Zihan Zhu, Pan Li, Huagui Wang, Pengbing Zhao and Chaoyu Liang
Micromachines 2025, 16(8), 907; https://doi.org/10.3390/mi16080907 (registering DOI) - 2 Aug 2025
Abstract
Electrohydrodynamic (EHD) printing offers mask-free, high-resolution deposition across a broad range of ink viscosities, yet combining void-free filling of high-aspect-ratio through-glass vias (TGVs) with ultrafine drop-on-demand (DOD) line printing on the same platform requires balancing conflicting requirements: for example, high field strengths to [...] Read more.
Electrohydrodynamic (EHD) printing offers mask-free, high-resolution deposition across a broad range of ink viscosities, yet combining void-free filling of high-aspect-ratio through-glass vias (TGVs) with ultrafine drop-on-demand (DOD) line printing on the same platform requires balancing conflicting requirements: for example, high field strengths to drive ink into deep and narrow vias; sufficiently high ink viscosity to prevent gravity-induced leakage; and stable meniscus dynamics to avoid satellite droplets and charge accumulation on the glass surface. By coupling electrostatic field analysis with transient level-set simulations, we establish a dimensionless regime map that delineates stable cone-jetting regime; these predictions are validated by high-speed imaging and surface profilometry. Operating within this window, the platform achieves complete, void-free filling of 200 µm × 1.52 mm TGVs and continuous 10 µm-wide traces in a single print pass. Demonstrating its capabilities, we fabricate transparent Ku-band substrate-integrated waveguide antennas on borosilicate glass: the printed vias and arc feed elements exhibit a reflection coefficient minimum of –18 dB at 14.2 GHz, a –10 dB bandwidth of 12.8–16.2 GHz, and an 8 dBi peak gain with 37° beam tilt, closely matching full-wave predictions. This physics-driven, all-in-one EHD approach provides a scalable route to high-performance, glass-integrated RF devices and transparent electronics. Full article
16 pages, 7618 KiB  
Article
Collagen Remodeling of Strattice™ Firm in a Nonhuman Primate Model of Abdominal Wall Repair
by Kelly Bolden, Jared Lombardi, Nimesh Kabaria, Eric Stec and Maryellen Gardocki-Sandor
Bioengineering 2025, 12(8), 796; https://doi.org/10.3390/bioengineering12080796 - 24 Jul 2025
Viewed by 309
Abstract
This study characterized collagen remodeling in an electron-beam-sterilized porcine acellular dermal matrix (E-PADM) by evaluating host response kinetics during wound healing. E-PADM (n = 6 lots/time point) was implanted in an abdominal wall bridging defect in nonhuman primates (N = 24). [...] Read more.
This study characterized collagen remodeling in an electron-beam-sterilized porcine acellular dermal matrix (E-PADM) by evaluating host response kinetics during wound healing. E-PADM (n = 6 lots/time point) was implanted in an abdominal wall bridging defect in nonhuman primates (N = 24). Histological, immunohistochemical, and biochemical assessments were conducted. Pro-inflammatory tissue cytokines peaked 1 month post-implantation and subsided to baseline by 6 months. E-PADM-specific serum immunoglobulin G antibodies increased by 213-fold from baseline at 1 month, then decreased to <10-fold by 6–9 months. The mean percentage tissue area staining positively for matrix metalloproteinase-1 plateaued at 3 months (40.3 ± 16.9%), then subsided by 6 months (16.3 ± 11.1%); tissue inhibitor matrix metalloproteinase-1 content plateaued at 1 month (39.0 ± 14.3%), then subsided by 9 months (13.0 ± 8.8%). Mean E-PADM thickness (1.7 ± 0.2 mm pre-implant) increased at 3 months (2.9 ± 1.5 mm), then decreased by 9 months (1.9 ± 1.1; equivalent to pre-implant). Histology demonstrated mild inflammation between 1–3 months, then a peak in host tissue deposition, with ≈75%–100% E-PADM collagen turnover, and fibroblast infiltration and neovascularization between 3–6 months. Picrosirius red staining revealed that mature E-PADM collagen was replaced by host-associated neo-collagen by 6 months. E-PADM implantation induced wound healing, which drove dermal E-PADM collagen remodeling to native, functional fascia-like tissue at the implant site. Full article
(This article belongs to the Special Issue Advances and Innovations in Wound Repair and Regeneration)
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15 pages, 7165 KiB  
Article
Structural and Performance Studies of Lanthanum–Nitrogen Co-Doped Titanium Dioxide Thin Films Under UV Aging
by Pengcheng Cao, Li Zhang and Yanbo Yuan
Micromachines 2025, 16(8), 842; https://doi.org/10.3390/mi16080842 - 23 Jul 2025
Viewed by 329
Abstract
In this study, lanthanum–nitrogen co-doped titanium dioxide (La-N-TiO2) thin films were fabricated using Ion Beam Assisted Deposition (IBAD) and subjected to accelerated ultraviolet (UV) aging experiments to systematically investigate the impact of co-doping on the films’ resistance to UV aging. X-ray [...] Read more.
In this study, lanthanum–nitrogen co-doped titanium dioxide (La-N-TiO2) thin films were fabricated using Ion Beam Assisted Deposition (IBAD) and subjected to accelerated ultraviolet (UV) aging experiments to systematically investigate the impact of co-doping on the films’ resistance to UV aging. X-ray diffraction (XRD) analysis revealed that La-N co-doping inhibits the phase transition from anatase to rutile, significantly enhancing the phase stability of the films. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) characterizations indicated that co-doping increased the density and surface uniformity of the films, thereby delaying the expansion of cracks and increase in roughness induced by UV exposure. Energy-dispersive X-ray spectroscopy (EDS) results confirmed the successful incorporation of La and N into the TiO2 lattice, enhancing the chemical stability of the films. Contact angle tests demonstrated that La-N co-doping markedly improved the hydrophobicity of the films, inhibiting the rapid decay of hydrophilicity during UV aging. After three years of UV aging, the co-doped films maintained high structural integrity and photocatalytic performance, exhibiting excellent resistance to UV aging. These findings offer new insights into the long-term stability of photovoltaic self-cleaning materials. Full article
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14 pages, 3338 KiB  
Article
Monolithically Integrated GaAs Nanoislands on CMOS-Compatible Si Nanotips Using GS-MBE
by Adriana Rodrigues, Anagha Kamath, Hannah-Sophie Illner, Navid Kafi, Oliver Skibitzki, Martin Schmidbauer and Fariba Hatami
Nanomaterials 2025, 15(14), 1083; https://doi.org/10.3390/nano15141083 - 12 Jul 2025
Viewed by 276
Abstract
The monolithic integration of III-V semiconductors with silicon (Si) is a critical step toward advancing optoelectronic and photonic devices. In this work, we present GaAs nanoheteroepitaxy (NHE) on Si nanotips using gas-source molecular beam epitaxy (GS-MBE). We discuss the selective growth of fully [...] Read more.
The monolithic integration of III-V semiconductors with silicon (Si) is a critical step toward advancing optoelectronic and photonic devices. In this work, we present GaAs nanoheteroepitaxy (NHE) on Si nanotips using gas-source molecular beam epitaxy (GS-MBE). We discuss the selective growth of fully relaxed GaAs nanoislands on complementary metal oxide semiconductor (CMOS)-compatible Si(001) nanotip wafers. Nanotip wafers were fabricated using a state-of-the-art 0.13 μm SiGe Bipolar CMOS pilot line on 200 mm wafers. Our investigation focuses on understanding the influence of the growth conditions on the morphology, crystalline structure, and defect formation of the GaAs islands. The morphological, structural, and optical properties of the GaAs islands were characterized using scanning electron microscopy, high-resolution X-ray diffraction, and photoluminescence spectroscopy. For samples with less deposition, the GaAs islands exhibit a monomodal size distribution, with an average effective diameter ranging between 100 and 280 nm. These islands display four distinct facet orientations corresponding to the {001} planes. As the deposition increases, larger islands with multiple crystallographic facets emerge, accompanied by a transition from a monomodal to a bimodal growth mode. Single twinning is observed in all samples. However, with increasing deposition, not only a bimodal size distribution occurs, but also the volume fraction of the twinned material increases significantly. These findings shed light on the growth dynamics of nanoheteroepitaxial GaAs and contribute to ongoing efforts toward CMOS-compatible Si-based nanophotonic technologies. Full article
(This article belongs to the Section Nanofabrication and Nanomanufacturing)
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18 pages, 6590 KiB  
Article
Synthesis of ZnS Nano-Powders and Fabrication of ZnS Thin Films via Electron-Beam Evaporation: Structural and Optical Characterization
by Ahmed Al-Mobydeen, Ehab AlShamaileh, Bashar Lahlouh, Mariam Al-Qderat, Ahmed N. AL-Masri, Wadah Mahmoud, Imad Hamadneh, Muayad Esaifan and Iessa Sabbe Moosa
Coatings 2025, 15(7), 796; https://doi.org/10.3390/coatings15070796 - 7 Jul 2025
Viewed by 444
Abstract
Nanoscale zinc sulfide (ZnS) powders have attracted considerable interest due to their unique properties and diverse applications in various fields, including wastewater treatment, optics, electronics, photocatalysis, and solar systems. In this study, nano-powder ZnS was chemically synthetized starting from Zn powder, diluted HCl, [...] Read more.
Nanoscale zinc sulfide (ZnS) powders have attracted considerable interest due to their unique properties and diverse applications in various fields, including wastewater treatment, optics, electronics, photocatalysis, and solar systems. In this study, nano-powder ZnS was chemically synthetized starting from Zn powder, diluted HCl, and laboratory-prepared Na2S. The obtained ZnS was studied using an SEM coupled with EDS, XRD analysis, UV–Visible spectroscopy, and FTIR techniques. The XRD results showed that the synthesized nanoscale ZnS powder was approximately 2.26 nm. Meanwhile, the EDS and XRD patterns confirmed the high purity of the obtained ZnS powder. In addition, the ZnS powder was compacted and sintered in an argon atmosphere at 400 °C for 8 h to prepare the required pellets for thin-film deposition via E-beam evaporation. The microscopic structure of the sintered pellets was investigated using the SEM/EDS. Furthermore, the optical properties of the deposited thin films were studied using UV–Visible spectroscopy in the wavelength range of 190–1100 nm and the FTIR technique. The bandgap energies of the deposited thin films with thicknesses of 111 nm and 40 nm were determined to be around 4.72 eV and 5.82 eV, respectively. This article offers a facile production route of high-purity ZnS powder, which can be compacted and sintered as a suitable source for thin-film deposition. Full article
(This article belongs to the Special Issue Trends in Coatings and Surface Technology, 2nd Edition)
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31 pages, 3471 KiB  
Review
Advances in the Additive Manufacturing of Superalloys
by Antonio del Bosque, Pablo Fernández-Arias and Diego Vergara
J. Manuf. Mater. Process. 2025, 9(7), 215; https://doi.org/10.3390/jmmp9070215 - 25 Jun 2025
Viewed by 962
Abstract
This study presents a bibliometric analysis of the evolution and research trends in the additive manufacturing (AM) of superalloys over the last decade (2015–2025). The review follows a structured methodology based on the PRISMA 2020 protocol, utilizing data from the Scopus and Web [...] Read more.
This study presents a bibliometric analysis of the evolution and research trends in the additive manufacturing (AM) of superalloys over the last decade (2015–2025). The review follows a structured methodology based on the PRISMA 2020 protocol, utilizing data from the Scopus and Web of Science (WoS) databases. Particular attention is devoted to the intricate process–structure–property relationships and the specific behavioral trends associated with different superalloy families, namely Ni-based, Co-based, and Fe–Ni-based systems. The findings reveal a substantial growth in scientific output, with the United States and China leading contributions and an increasing trend in international collaboration. Key research areas include process optimization, microstructural evolution and control, mechanical property assessment, and defect minimization. The study highlights the pivotal role of technologies such as laser powder bed fusion, electron beam melting, and directed energy deposition in the fabrication of high-performance components. Additionally, emerging trends point to the integration of machine learning and artificial intelligence for real-time quality monitoring and manufacturing parameter optimization. Despite these advancements, challenges such as anisotropic properties, porosity issues, and process sustainability remain critical for both industrial applications and future academic research in superalloys. Full article
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24 pages, 5461 KiB  
Article
Classification and Prediction of Unknown Thermal Barrier Coating Thickness Based on Hybrid Machine Learning and Terahertz Nondestructive Characterization
by Zhou Xu, Jianfei Xu, Yiwen Wu, Changdong Yin, Suqin Chen, Qiang Liu, Xin Ge, Luanfei Wan and Dongdong Ye
Coatings 2025, 15(6), 725; https://doi.org/10.3390/coatings15060725 - 17 Jun 2025
Viewed by 463
Abstract
Thickness inspection of thermal barrier coatings is crucial to safeguard the reliability of high-temperature components of aero-engines, but traditional destructive inspection methods are difficult to meet the demand for rapid assessment in the field. In this study, a new non-destructive testing method integrating [...] Read more.
Thickness inspection of thermal barrier coatings is crucial to safeguard the reliability of high-temperature components of aero-engines, but traditional destructive inspection methods are difficult to meet the demand for rapid assessment in the field. In this study, a new non-destructive testing method integrating terahertz time-domain spectroscopy and machine learning algorithms is proposed to systematically study the thickness inspection of 8YSZ coatings prepared by two processes, namely atmospheric plasma spraying (APS) and electron beam physical vapor deposition (EB-PVD). By optimizing the preparation process parameters, 620 sets of specimens with thicknesses of 100–400 μm are prepared, and three types of characteristic parameters, namely, time delay Δt, frequency shift Δf, and energy decay η, are extracted by combining wavelet threshold denoising and time-frequency joint analysis. A CNN-RF cascade model is constructed to realize coating process classification, and an attention-LSTM and SVR weighted fusion model is developed for thickness regression prediction. The results show that the multimodal feature fusion reduces the root-mean-square error of thickness prediction to 8.9 μm, which further improves the accuracy over the single feature model. The classification accuracy reaches 96.8%, of which the feature importance of time delay Δt accounts for 62%. The hierarchical modeling strategy reduces the detection mean absolute error from 6.2 μm to 4.1 μm. the method provides a high-precision solution for intelligent quality assessment of thermal barrier coatings, which is of great significance in promoting the progress of intelligent manufacturing technology for high-end equipment. Full article
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56 pages, 2573 KiB  
Review
A Review of Optimization of Additively Manufactured 316/316L Stainless Steel Process Parameters, Post-Processing Strategies, and Defect Mitigation
by Usman Aziz, Marion McAfee, Ioannis Manolakis, Nick Timmons and David Tormey
Materials 2025, 18(12), 2870; https://doi.org/10.3390/ma18122870 - 17 Jun 2025
Cited by 1 | Viewed by 654
Abstract
The rapid progress in additive manufacturing (AM) has unlocked significant possibilities for producing 316/316L stainless steel components, particularly in industries requiring high precision, enhanced mechanical properties, and intricate geometries. However, the widespread adoption of AM—specifically Directed energy deposition (DED), selective laser melting (SLM), [...] Read more.
The rapid progress in additive manufacturing (AM) has unlocked significant possibilities for producing 316/316L stainless steel components, particularly in industries requiring high precision, enhanced mechanical properties, and intricate geometries. However, the widespread adoption of AM—specifically Directed energy deposition (DED), selective laser melting (SLM), and electron beam melting (EBM) remains challenged by inherent process-related defects such as residual stresses, porosity, anisotropy, and surface roughness. This review critically examines these AM techniques, focusing on optimizing key manufacturing parameters, mitigating defects, and implementing effective post-processing treatments. This review highlights how process parameters including laser power, energy density, scanning strategy, layer thickness, build orientation, and preheating conditions directly affect microstructural evolution, mechanical properties, and defect formation in AM-fabricated 316/316L stainless steel. Comparative analysis reveals that SLM excels in achieving refined microstructures and high precision, although it is prone to residual stress accumulation and porosity. DED, on the other hand, offers flexibility for large-scale manufacturing but struggles with surface finish and mechanical property consistency. EBM effectively reduces thermal-induced residual stresses due to its sustained high preheating temperatures (typically maintained between 700 °C and 850 °C throughout the build process) and vacuum environment, but it faces limitations related to resolution, cost-effectiveness, and material applicability. Additionally, this review aligns AM techniques with specific defect reduction strategies, emphasizing the importance of post-processing methods such as heat treatment and hot isostatic pressing (HIP). These approaches enhance structural integrity by refining microstructure, reducing residual stresses, and minimizing porosity. By providing a comprehensive framework that connects AM techniques optimization strategies, this review serves as a valuable resource for academic and industry professionals. It underscores the necessity of process standardization and real-time monitoring to improve the reliability and consistency of AM-produced 316/316L stainless steel components. A targeted approach to these challenges will be crucial in advancing AM technologies to meet the stringent performance requirements of various high-value industrial applications. Full article
(This article belongs to the Section Manufacturing Processes and Systems)
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12 pages, 4386 KiB  
Article
TiO2 Nanorod Array for Betavoltaic Cells: Performance Validation and Enhancement with Electron Beam and 63Ni Irradiations
by Sijie Li, Tongxin Jiang, Yu Cao, Wendi Zhao, Haisheng San, Xue Li, Lifeng Zhang and Xin Li
Nanomaterials 2025, 15(12), 923; https://doi.org/10.3390/nano15120923 - 14 Jun 2025
Viewed by 417
Abstract
The growing demand for reliable micropower sources in extreme environments has accelerated the development of betavoltaic cells (BV cells) with high energy conversion efficiency and superior radiation resistance. This study demonstrates an advanced BV cell architecture utilizing three-dimensional TiO2 nanorod arrays (TNRAs) [...] Read more.
The growing demand for reliable micropower sources in extreme environments has accelerated the development of betavoltaic cells (BV cells) with high energy conversion efficiency and superior radiation resistance. This study demonstrates an advanced BV cell architecture utilizing three-dimensional TiO2 nanorod arrays (TNRAs) integrated with a NiOx hole transport layer (HTL). Monte Carlo simulations were employed to optimize the cell design and determine the fabrication parameters for growing TNRAs on FTO substrates via hydrothermal synthesis. The performance evaluation employed both electron beam (2.36 × 109 e/cm2·s) and 63Ni (3.4 mCi/cm2) irradiation methods. The simulation results revealed optimal energy deposition characteristics, with ~96% of β-particle energy effectively absorbed within the 2 μm thick FTO/TNRA/NiOx/Au structure. The NiOx-incorporated device achieved an energy conversion efficiency of 4.84%, with a short-circuit current of 119.9 nA, an open-circuit voltage of 324.2 mV, and a maximum power output of 24.0 nW, representing a 3.76-fold enhancement over HTL-free devices. Radioactive source testing confirmed stable power generation and linear efficiency scaling, validating electron beam irradiation as an effective accelerated testing methodology for BV cell research. Full article
(This article belongs to the Section Energy and Catalysis)
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27 pages, 4658 KiB  
Article
Effect of Printing Parameters on the Dynamic Characteristics of Additively Manufactured ABS Beams: An Experimental Modal Analysis and Response Surface Methodology
by Hilal Doğanay Kati, Feiyang He, Muhammad Khan, Hakan Gökdağ and Yousef Lafi A. Alshammari
Polymers 2025, 17(12), 1615; https://doi.org/10.3390/polym17121615 - 10 Jun 2025
Viewed by 557
Abstract
This study investigates the dynamic characteristics of three-dimensional (3D) printed acrylonitrile butadiene styrene (ABS) cantilever beams using Experimental Modal Analysis (EMA). The effects of Fused Deposition Modelling (FDM) process parameters—specifically infill pattern, infill density, nozzle size, and raster angle—on the natural frequency, mode [...] Read more.
This study investigates the dynamic characteristics of three-dimensional (3D) printed acrylonitrile butadiene styrene (ABS) cantilever beams using Experimental Modal Analysis (EMA). The effects of Fused Deposition Modelling (FDM) process parameters—specifically infill pattern, infill density, nozzle size, and raster angle—on the natural frequency, mode shapes, and damping ratio were examined. Although numerous studies have addressed the static mechanical behaviour of FDM parts, there remains a significant gap in understanding how internal structural features and porosity influence their vibrational response. To address this, a total of seventy-two specimens were fabricated with varying parameter combinations, and their dynamic responses were evaluated through frequency response functions (FRFs) obtained via the impact hammer test. Damping characteristics were extracted using the peak-picking (half power) method. Additionally, the influence of internal porosity on damping behaviour was assessed by comparing the actual and theoretical masses of the specimens. The findings indicate that both natural frequencies and damping ratios are strongly influenced by the internal structure of the printed components. In particular, gyroid and cubic infill patterns increased structural stiffness and resulted in higher resonant frequencies, while low infill densities and triangle patterns contributed to enhanced damping capacity. Response Surface Methodology (RSM) was employed to develop mathematical models describing the parameter effects, providing predictive tools for applications sensitive to vibration. The high R2 values obtained in the RSM models based on the input variables show that these variables explain the effects of these variables on both natural frequency and damping ratio with high accuracy. The models developed (with R2 values up to 0.98) enable the prediction of modal behaviour, providing a valuable design tool for engineers optimizing vibration-sensitive components in fields such as aerospace, automotive, and electronics. Full article
(This article belongs to the Special Issue Damage Mechanics of 3D Printed Polymer Structures and Components)
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11 pages, 5946 KiB  
Article
Epitaxial Growth of BaBiO3 Thin Films on SrTiO3(001) and MgO(001) Substrates Using Molecular Beam Epitaxy: Controlling the Competition Between Crystal Orientations
by Islam Ahmed, Stefan De Gendt and Clement Merckling
Crystals 2025, 15(6), 534; https://doi.org/10.3390/cryst15060534 - 2 Jun 2025
Viewed by 697
Abstract
BaBiO3 has recently gained significant research attention as a parent material for an interesting family of alloyed compositions with multiple technological applications. In order to grow a variety of structures, a versatile deposition tool such as molecular beam epitaxy must be employed. [...] Read more.
BaBiO3 has recently gained significant research attention as a parent material for an interesting family of alloyed compositions with multiple technological applications. In order to grow a variety of structures, a versatile deposition tool such as molecular beam epitaxy must be employed. In this work, the molecular beam epitaxy growth of BaBiO3 on SrTiO3(001) and MgO(001) substrates is studied. When grown by molecular beam epitaxy on SrTiO3(001) or MgO(001) substrates, BaBiO3 is known to have two competing orientations, namely (001) and (011). Characterization of the thin film is carried out by X-ray diffraction, X-ray reflectivity, atomic force microscopy, Rutherford backscattering, and transmission electron microscopy. Pathways to block the growth of BaBiO3(011) and to grow only the technologically relevant BaBiO3(001) are described for both substrates. An understanding of the enabling mechanism of the co-growth is established from an epitaxial point of view. This can be beneficially utilized for the growth of different compositions in the BaBiO3 material family in a more controlled manner. Full article
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13 pages, 4277 KiB  
Article
Advancing Nanoscale Copper Deposition Through Ultrafast-Laser-Activated Surface Chemistry
by Modestas Sadauskas, Romualdas Trusovas, Evaldas Kvietkauskas, Viktorija Vrubliauskaitė, Ina Stankevičienė, Aldona Jagminienė, Tomas Murauskas, Dainius Balkauskas, Alexandr Belosludtsev and Karolis Ratautas
Nanomaterials 2025, 15(11), 830; https://doi.org/10.3390/nano15110830 - 30 May 2025
Viewed by 480
Abstract
Direct-writing submicron copper circuits on glass with laser precision—without lithography, vacuum deposition, or etching—represents a transformative step in next-generation microfabrication. We present a high-resolution, maskless method for metallizing glass using ultrashort pulse Bessel beam laser processing, followed by silver ion activation and electroless [...] Read more.
Direct-writing submicron copper circuits on glass with laser precision—without lithography, vacuum deposition, or etching—represents a transformative step in next-generation microfabrication. We present a high-resolution, maskless method for metallizing glass using ultrashort pulse Bessel beam laser processing, followed by silver ion activation and electroless copper plating. The laser-modified glass surface hosts nanoscale chemical defects that promote the in situ reduction of Ag+ to metallic Ag0 upon exposure to AgNO3 solution. These silver seeds act as robust catalytic and adhesion sites for subsequent copper growth. Using this approach, we demonstrate circuit traces as narrow as 0.7 µm, featuring excellent uniformity and adhesion. Compared to conventional redistribution-layer (RDL) and under-bump-metallization (UBM) techniques, this process eliminates multiple lithographic and vacuum-based steps, significantly reducing process complexity and production time. The method is scalable and adaptable for applications in transparent electronics, fan-out packaging, and high-density interconnects. Full article
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14 pages, 6214 KiB  
Article
Low-Refractive-Index SiO2 Nanocolumnar Thin Films Fabricated by Oblique Angle Deposition
by Bojie Jia, Gang Chen, Sheng Zhou, Xiaofeng Ma, Qiuyu Zhang, Yujia Geng, Teng Xu and Dingquan Liu
Materials 2025, 18(10), 2225; https://doi.org/10.3390/ma18102225 - 12 May 2025
Viewed by 475
Abstract
The refractive index is one of the most important optical parameters of optical thin films. Optical films with a low refractive index can effectively reduce the residual reflection on the film surface, which is one of the most important parameters pursued by scholars. [...] Read more.
The refractive index is one of the most important optical parameters of optical thin films. Optical films with a low refractive index can effectively reduce the residual reflection on the film surface, which is one of the most important parameters pursued by scholars. In this research, SiO2 thin films with a low refractive index and nanocolumnar structures were prepared by oblique angle deposition (OAD). The SiO2 thin films deposited at different inclination angles were prepared using the electron beam evaporative deposition method. The single-layer film samples were measured by ellipsometry, infrared spectrometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The experimental results demonstrated that at an inclination angle of 85°, the average refractive index of the film decreased to 1.30 in the 350–1300 nm wavelength range. Additionally, the film deposited on one side of a crystalline Al2O3 substrate achieved a transmittance of 92.1% in the 350–1500 nm wavelength range and the residual reflectance was reduced by 0.7%. Full article
(This article belongs to the Section Optical and Photonic Materials)
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12 pages, 6811 KiB  
Article
The Fabrication and Characterization of Surface-Acoustic-Wave and Resistive Types of Ozone Sensors Based on Zinc Oxide: A Comparative Study
by Sheng-Hua Yan and Chia-Yen Lee
Sensors 2025, 25(9), 2723; https://doi.org/10.3390/s25092723 - 25 Apr 2025
Viewed by 2486
Abstract
Micro-Electro-Mechanical System (MEMS) technology is employed to fabricate surface acoustic wave (SAW)-type and resistive-type ozone sensors on quartz glass (SiO2) substrates. The fabrication process commences by using a photolithography technique to define interdigitated electrodes (IDEs) on the substrates. Electron-beam evaporation (EBE) [...] Read more.
Micro-Electro-Mechanical System (MEMS) technology is employed to fabricate surface acoustic wave (SAW)-type and resistive-type ozone sensors on quartz glass (SiO2) substrates. The fabrication process commences by using a photolithography technique to define interdigitated electrodes (IDEs) on the substrates. Electron-beam evaporation (EBE) followed by radio frequency (RF) magnetron sputtering is then used to deposit platinum (Pt) and chromium (Cr) electrode layers as well as a zinc oxide (ZnO) sensing layer, respectively. Finally, annealing is performed to improve the crystallinity and sensing performance of the ZnO films. The experimental results reveal that the ZnO thin films provide an excellent ozone-concentration sensing capability in both sensors. The SAW-type sensor demonstrates a peak sensitivity at a frequency of 200 kHz, with a rapid response time of just 35 s. Thus, it is suitable for applications requiring a quick response and high sensitivity, such as real-time monitoring and high-precision environmental detection. The resistive-type sensor shows optimal sensitivity at a relatively low operating temperature of 180 °C, but has a longer response time of approximately 103 s. Therefore, it is better suited for low-cost and large-scale applications such as industrial-gas-concentration monitoring. Full article
(This article belongs to the Special Issue Advanced Sensors for Gas Monitoring)
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16 pages, 2854 KiB  
Article
Optimal Selection and Experimental Verification of Wide-Bandgap Semiconductor for Betavoltaic Battery
by Jiachen Zhang, Kunlun Lv, Yuan Yin, Yuqian Gao, Ye Tian, Yuncheng Han and Jun Tang
Nanomaterials 2025, 15(9), 635; https://doi.org/10.3390/nano15090635 - 22 Apr 2025
Cited by 1 | Viewed by 2519
Abstract
Wide-bandgap semiconductor betavoltaic batteries have a promising prospect in Micro-Electro-Mechanical Systems for high power density and long working life, but their material selection is still controversial. Specifically, the silicon carbide (SiC) betavoltaic battery was reported to have higher efficiency, although its bandgap is [...] Read more.
Wide-bandgap semiconductor betavoltaic batteries have a promising prospect in Micro-Electro-Mechanical Systems for high power density and long working life, but their material selection is still controversial. Specifically, the silicon carbide (SiC) betavoltaic battery was reported to have higher efficiency, although its bandgap is lower than that of gallium nitride (GaN) or diamond, which is inconsistent with general assumptions. In this work, the effects of different semiconductor characteristics on the battery energy conversion process are systematically analyzed to explain this phenomenon, including beta particle energy deposition, electron–hole pair (EHP) creation energy and EHPs collection efficiency. Device efficiencies of the betavoltaic battery using SiC, GaN, diamond, gallium oxide (Ga2O3), aluminum nitride (AlN) and boron nitride (BN) are compared to determine the optimum semiconductor. Results show that SiC for the betavoltaic battery has higher efficiency than GaN, Ga2O3 and AlN because of higher EHPs collection efficiency, less energy loss and fewer material defects, which is the optimal selection currently. SiC betavoltaic batteries were prepared, with the device efficiency having reached 14.88% under an electron beam, and the device efficiency recorded as 7.31% under an isotope source, which are consistent with the predicted results. This work provides a theoretical and experimental foundation for the material selection of betavoltaic batteries. Full article
(This article belongs to the Section Theory and Simulation of Nanostructures)
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