Search Results (88)

This work presents an innovative hydrothermal approach for fabricating flexible piezoelectric PZT thin films on 20 μm titanium foil substrates using TiO₂ and SrTiO₃ (STO) interlayers. Three heterostructures (Ti/PZT, Ti/TiO₂/PZT, and Ti/TiO₂/STO/PZT) were synthesized to enable low-temperature growth and improve ferroelectric performance for advanced flexible MEMS. Characterizations including XRD, PFM, and P–E loop analysis evaluated crystallinity, piezoelectric coefficient d₃₃, and polarization behavior. The results demonstrate that the multilayered Ti/TiO₂/STO/PZT structure significantly enhances performance. XRD confirmed the STO buffer layer effectively reduces lattice mismatch with PZT to ~0.76%, promoting stable morphotropic phase boundary (MPB) composition formation. This optimized film exhibited superior piezoelectric and ferroelectric properties, with a high d₃₃ of 113.42 pm/V, representing an ~8.65% increase over unbuffered Ti/PZT samples, and displayed more uniform domain behavior in PFM imaging. Impedance spectroscopy showed the lowest minimum impedance of 8.96 Ω at 10.19 MHz, indicating strong electromechanical coupling. Furthermore, I–V measurements demonstrated significantly suppressed leakage currents in the STO-buffered samples, with current levels ranging from 10⁻¹² A to 10⁻⁹ A over ±3 V. This structure also showed excellent fatigue endurance through one million electrical cycles, confirming its mechanical and electrical stability. These findings highlight the potential of this hydrothermally engineered flexible heterostructure for high-performance actuators and sensors in advanced MEMS applications. Full article

Although shear horizontal waves have advantages over longitudinal waves, including a higher resolution, less wave mode conversion, and much better reflection coefficients at void and crack interfaces in nondestructive detection, they require good contact surface flatness and efficient coupling agents. In this paper, we analyze and design the basic components of the dry-coupled ultrasonic shear wave probe through theoretical analyses and numerical simulations. The admittance characteristics, resonant frequency, and electromechanical coupling coefficients of the double-laminated vibrator under different size parameters in both 2D and 3D models are simulated, and the probe structures are optimized based on the simulation results and operational requirements. The simulation results of the wave field excited by the double-laminated vibrator show the effectiveness of the optimized probe models. Additionally, the dry coupling method of the probe is simulated to study the acoustic energy distribution under various dry-coupled structures. Finally, we compare the measured admittance with the simulated values, and they are in good agreement. Full article

With the development of piezoelectric-on-insulator (POI) substrates, X-cut LiNbO₃ thin-film resonators with interdigital transducers are widely investigated due to their adjustable resonant frequency (f_s) and effective electromechanical coupling coefficient ($K_{eff}^2$). This paper presents an in-depth study of simulations and measurements of laterally excited bulk acoustic wave resonators based on an X-cut LiNbO₃/SiO₂/Si substrate and a LiNbO₃ thin film to analyze the effects of electrode angle rotation ($\theta$) on the modes, f_s, and $K_{eff}^2$. The rotated $\theta$ leads to different electric field directions, causing mode changes, where the resonators without cavities are longitudinal leaky SAWs (LLSAWs, $\theta$ = 0$°$) and zero-order shear horizontal SAWs (SH₀-SAWs, $\theta$ = 90$°$) and the resonators with cavities are zero-order-symmetry (S₀) lateral vibrating resonators (LVRs, $\theta$ = 0$°$) and SH₀ plate wave resonators (PAW, $\theta$ = 90$°$). The resonators are fabricated based on a 400 nm X-cut LiNbO₃ thin-film substrate, and the measured results are consistent with those from the simulation. The fabricated LLSAW and SH₀-SAW without cavities show a $K_{eff}^2$ of 1.62% and 26.6% and a Bode-Q_max of 1309 and 228, respectively. Meanwhile, an S₀ LVR and an SH₀-PAW with cavities present a $K_{eff}^2$ of 4.82% and 27.66% and a Bode-Q_max of 3289 and 289, respectively. In addition, the TCF with a different rotated $\theta$ is also measured and analyzed. This paper systematically analyzes resonators on X-cut LiNbO₃ thin-film substrates and provides potential strategies for multi-band and multi-bandwidth filters. Full article

Non-uniform composite structures for transducers exhibit considerable potential in enhancing impedance matching and efficiency. Here, a functionally graded material composite spherical piezoelectric transducer (FGM-cSPT) is proposed, and a three-port electromechanical equivalent circuit model is established. The correctness of the theoretical model is verified using the finite element method and experiment. Based on the theoretical model, the effects of the non-uniform coefficient and the geometric dimension of FGM-cSPT on the electromechanical vibration characteristics (resonance frequency, anti-resonance frequency, and effective electromechanical coupling coefficient) of the transducer are analyzed. The results show that the non-uniform coefficient and geometric dimension can effectively regulate the vibration characteristics of the FGM-cSPT, which can be used to guide engineering design. Our methodology will offer possibilities for designing FGM-cSPTs and may promote applications in various fields, such as marine exploitation, structural health detection, and energy collection. Full article

This study introduces a novel 1-1-3-type piezoelectric array structure and investigates variations in the piezoelectric phase’s volume fraction. Its performance and consistency are compared with that of a conventional 1-3-type piezoelectric array of identical volume fraction. Finite element analysis was applied to study the effects of the positions of the elements in 1-1-3-type and 1-3-type piezoelectric arrays on the electrical conductivity curves, as well as the differences in vibration modes. To validate the theoretical models, experimental fabrication and testing were performed, and we developed a high-precision testing fixture designed to minimize experimental errors. The results demonstrate that the resonance frequency fluctuations in the 1-1-3-type piezoelectric array are maintained within 1%, and conductance fluctuations within 13.4%, significantly enhancing consistency compared to the 1-3-type array. Furthermore, the electromechanical coupling coefficient of the 1-1-3 array was also found to be superior to that of the 1-3-type, indicating improved performance parameters. Full article

This paper presents a numerical homogenization method for estimating the effective converse flexoelectric coefficients. A 2D model made of two-phase composite is developed at the microscale in consideration of a representative volume element that includes a continuous flexoelectric fiber embedded in a pure elastic matrix. In the implementation, the constitutive equations are derived from the electromechanical enthalpy accounting for higher-order coupling terms. Electric boundary conditions associated with an inhomogeneous electric field are imposed, allowing the approximation of the generated mechanical strains and stresses. Accordingly, the numerical simulations yield the overall equivalent converse flexoelectricity tensor for the longitudinal, transversal, and shear couplings. The results showed that the composite undergoes an obvious straining, which creates actuation due to the converse effect. The components of the homogenized longitudinal and transverse coefficients were found to be dependent on the volume fraction and elastic properties of the constituents. Full article

Permanent Magnet Linear Oscillating Motors (PMLOMs) are popular in micro-positioning systems, biomedical devices, and refrigeration compressors due to their simple structure, high efficiency, rapid response, and quiet operation. This paper proposes a method for the analysis and optimization of electromechanical systems that employs a moving magnet linear oscillating motor. A simplified magnetic circuit method model was built to derive an electromagnetic thrust formula, and the initial design parameters of the motor and the thrust at the equilibrium position were calculated. Subsequently, a finite element model was developed, and a multi-objective optimization method was applied to refine the key dimensions of the motor to enhance its thrust characteristics. Furthermore, an analysis of the resonant characteristics of the electromechanical coupled system was conducted to identify the optimal operating frequency for the optimization scheme. Finally, the experimental validation of the optimized design was performed on a prototype, with the measured data showing a general correlation with the trends observed in the simulation analysis results. The effectiveness of this system analysis method was validated through experimental data. The results demonstrate that the thrust at the initial position is linearly correlated with both the outer arc radius of the permanent magnet and its mechanical pole arc coefficient. Additionally, the axial length of the outer stator, the axial spacing between the two outer stators, and the axial length of the magnets serve as key influencing parameters for the thrust characteristics within the effective stroke range. Furthermore, when the motor operates at its mechanical resonance frequency, it can attain the maximum efficiency. Full article

For those piezoelectric materials that operate under high-power conditions, the piezoelectric and dielectric properties obtained under small signal conditions cannot be directly applied to high-power transducers. There are three mainstream high-power characterization methods: the constant voltage method, the constant current method, and the transient method. In this study, we developed and verified a combined impedance method that integrated the advantages of the constant voltage and current methods, along with an improved transient method, for high-power testing of PZT-5H piezoelectric ceramics. The results from both methods indicated that with increasing power, the electromechanical coupling coefficient $k_{31}$ , the piezoelectric constant $d_{31}$, and the elastic compliance $s_{11}^{\mathrm{E}}$ of the PZT-5H showed increasing trends, while the mechanical quality factor $Q_{\mathrm{m}}$ first decayed rapidly and then stabilized at a fixed level. Additionally, under the combined impedance method, the temperature of the vibrators rose significantly due to self-heating, whereas the transient method generated almost no heat, and the vibrators remained at room temperature. By comparing the results from the two methods, we decoupled the effects of temperature and power on the high-power piezoelectric performance. The results showed that the self-heating temperature amplified the effects of power on $k_{31}$, $d_{31}$, and $s_{11}^{\mathrm{E}}$, while its influence on $Q_{\mathrm{m}}$ remained negligible. Full article

An important technical task is to develop methods for recording the phase transitions of water to ice. At present, many sensors based on various types of acoustic waves are suggested for solving this challenge. This paper focuses on the theoretical and experimental study of the effect of water-to-ice phase transition on the properties of Lamb and quasi shear horizontal (QSH) acoustic waves of a higher order propagating in different directions in piezoelectric plates with strong anisotropy. Y-cut LiNbO₃, 128Y-cut LiNbO₃, and 36Y-cut LiTaO₃ plates with a thickness of 500 μm and 350 μm were used as piezoelectric substrates. It was shown that the amplitude of the waves under study can decrease, increase, or remain relatively stable due to the water-to-ice phase transition, depending on the propagation direction and mode order. The greatest decrease in amplitude (42.1 dB) due to glaciation occurred for Lamb waves with a frequency of 40.53 MHz and propagating in the YX+30° LiNbO₃ plate. The smallest change in the amplitude (0.9 dB) due to glaciation was observed for QSH waves at 56.5 MHz propagating in the YX+60° LiNbO₃ plate. Additionally, it was also found that, in the YX+30° LiNbO₃ plate, the water-to-ice transition results in the complete absorption of all acoustic waves within the specified frequency range (10–60 MHz), with the exception of one. The phase velocities, electromechanical coupling coefficients, elastic polarizations, and attenuation of the waves under study were calculated. The structures “air–piezoelectric plate–air”, “air–piezoelectric plate–liquid”, and “air–piezoelectric plate–ice” were considered. The results obtained can be used to develop methods for detecting ice formation and measuring its parameters. Full article

High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO₃ thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low loss characteristics. The main mode of laterally excited bulk acoustic wave resonators (XBAR) have an ultra-high sound velocity, which enables high-frequency applications. However, the interference of spurious modes is one of the main reasons hindering the widespread application of XBAR. In this paper, a Z-cut LiNbO₃ thin film-based XBAR with arc-shaped electrodes is presented. We investigate the electric field distribution of the XBAR, while the irregular boundary of the arc-shaped electrodes affects the electric field between the existing interdigital transducers (IDTs). The mode shapes and impedance response of the XBAR with arc-shaped electrodes and the XBARs with traditional IDTs are compared in this work. The fabricated XBAR on a 350 nm Z-cut LiNbO₃ thin film with arc-shaped electrodes operating at over 5 GHz achieves a high effective electromechanical coupling coefficient of 29.8% and the spurious modes are well suppressed. This work promotes an XBAR with an optimized electrode design to further achieve the desired performance. Full article

Piezoelectric composite materials, combining the advantages of both piezoelectric materials and polymers, have been extensively used in ultrasonic transducers. However, the pitch size of radial array ultrasonic transducers normally exceeds one wavelength, which limits their performance. In order to minimize grating lobes of current radial transducers and then increase their imaging resolution, a 2.5 MHz 1-3 composite radial array transducer with 64 elements and 600 μm pitch was designed and fabricated by combining flexible circuit board and using a bending-and-superposition method. All the array elements were connected and actuated via the customized circuit board which is thin and soft. The kerf size is set to be 1/3 wavelength. PZT-5H/epoxy 1-3 composite was used as an active material because it exhibits an ultrahigh electromechanical coupling coefficient (k_t = 0.74), a very low mechanical quality factor (Q_m = 11), and relatively low acoustic impedance (Z_c = 13.43 MRayls). The developed radial array transducer exhibited a center frequency of 2.72 MHz, an average −6 dB bandwidth of 36%, an insertion loss of 31.86 dB, and a crosstalk of −26.56 dB between the adjacent elements near the center frequency. These results indicate that the bending-and-superposition method is an effective way to fabricate radial array transducers by binding flexible circuit boards. Furthermore, the utilization of tailored flexible circuitry boards presents an effective approach for realizing reductions in crosstalk level (CTL). Full article

Recently, the application of two–dimensional (2D) piezoelectric materials has been seriously hindered because most of them possess only in–plane piezoelectricity but lack out–of–plane piezoelectricity. In this work, using first–principles calculation, by atomic substitution of penta–graphene (PG) with tiny out–of–plane piezoelectricity, we design and predict stable 2D X–PG (X = Si or Ge) semiconductors with excellent in–plane and out–of–plane piezoelectricity and extremely high in–plane hole mobility. Among them, Ge–PG exhibits better performance in all aspects with an in–plane strain piezoelectric coefficient d₁₁ = 8.43 pm/V, an out–of–plane strain piezoelectric coefficient d₃₃ = −3.63 pm/V, and in–plane hole mobility μ_h = 57.33 × 10³ cm² V⁻¹ s⁻¹. By doping Si and Ge atoms, the negative Poisson’s ratio of PG approaches zero and reaches a positive value, which is due to the gradual weakening of the structure’s mechanical strength. The bandgaps of Si–PG (0.78 eV) and Ge–PG (0.89 eV) are much smaller than that of PG (2.20 eV), by 2.82 and 2.47 times, respectively. This indicates that the substitution of X atoms can regulate the bandgap of PG. Importantly, the physical mechanism of the out–of–plane piezoelectricity of these monolayers is revealed. The super–dipole–moment effect proposed in the previous work is proved to exist in PG and X–PG, i.e., it is proved that their out–of–plane piezoelectric stress coefficient e₃₃ increases with the super–dipole–moment. The e₃₃–induced polarization direction is also consistent with the super–dipole–moment direction. X–PG is predicted to have prominent potential for nanodevices applied as electromechanical coupling systems: wearable, ultra–thin devices; high–speed electronic transmission devices; and so on. Full article

The 1-3 piezoelectric composite is the key component of the acoustic transducer, which is widely used in detection, due to the high energy conversion efficiency, cheap raw material, and low aging. To reveal the influence of epoxy mixture, used to connect the piezoelectric column, on the composite performance, a 1-3 piezoelectric composite model was built. The effects of mixture properties on the impedance curves, vibration mode, and deformation displacement of the composite were determined. Six 1-3 piezoelectric composites with different filling mixture properties, by changing the glass microspheres’ mass ratio in the epoxy, were prepared and measured to validate the model. The results showed that with the increase in the proportion of the glass microsphere in the epoxy mixture, the vibration coupling of the piezoelectric composites was gradually eliminated. The acoustic impedance was reduced by 12%. The electromechanical coupling coefficient and effective electromechanical coupling coefficient were increased by 5.4% and 8.3%, respectively. The density and Young’s modulus decrease in filling mixture can significantly improve piezoelectric composite performance. Full article

Microelectromechanical system (MEMS) cantilever resonators suffer from high motional impedance (R_m). This paper investigates the use of mechanically coupled multi-cantilever piezoelectric MEMS resonators in the resolution of this issue. A double-sided actuating design, which utilizes a resonator with a 2.5 μm thick AlN film as the passive layer, is employed to reduce R_m. The results of experimental and finite element analysis (FEA) show agreement regarding single- to sextuple-cantilever resonators. Compared with a standalone cantilever resonator, the multi-cantilever resonator significantly reduces R_m; meanwhile, the high quality factor (Q) and effective electromechanical coupling coefficient (Kt_eff²) are maintained. The 30 μm wide quadruple-cantilever resonator achieves a resonance frequency (f_s) of 55.8 kHz, a Q value of 10,300, and a series impedance (R_s) as low as 28.6 kΩ at a pressure of 0.02 Pa; meanwhile, the smaller size of this resonator compared to the existing multi-cantilever resonators is preserved. This represents a significant advancement in MEMS resonators for miniaturized ultra-low-power oscillator applications. Full article

A three-degree-of-freedom (3-DOF) piezoelectric ultrasonic transducer is a critical component in elliptical and longitudinal ultrasonic vibration-assisted cutting processes, with its geometric structure directly influencing its performance. This paper proposes a structural optimization method based on a convolutional neural network (CNN) and non-dominated sorting genetic algorithm II (NSGA2). This method establishes a transducer lumped model to obtain the electromechanical coupling coefficients (X-$k_e$ and Z-$k_e$) and thermal power (X-P) indicators, evaluating the bending and longitudinal vibration performance of the transducer. By creating a finite element model of the transducer with mechanical losses, a dataset of different transducer performance parameters, including the tail mass, piezoelectric stack, and dimensions of the horn, is obtained. Training a CNN model with this dataset yields objective functions for the relationship between different transducer geometric structures and performance parameters. The NSGA2 algorithm solves the X-$k_e$ and Z-$k_e$ objective functions, obtaining the Pareto set of the transducer geometric dimensions and determining the optimal transducer geometry in conjunction with X-P. This method achieves simultaneous improvements in X-$k_e$ and Z-$k_e$ of the transducer by 22.33% and 25.89% post-optimization and reduces X-P to 18.97 W. Furthermore, the finite element simulation experiments of the transducer validate the effectiveness of this method. Full article