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Keywords = distributed Bragg reflector

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26 pages, 3914 KiB  
Review
Research Progress of Single-Mode Quantum Cascade Lasers
by Jiewei Zheng, Dongxin Xu, Qi Wu, Chi Zhang, Yishui Lin, Mingkun Yuan and Yi Qu
Coatings 2025, 15(8), 950; https://doi.org/10.3390/coatings15080950 - 13 Aug 2025
Viewed by 204
Abstract
Quantum cascade lasers (QCLs) are important laser sources in the mid-infrared band. Among them, single-mode quantum cascade lasers show significant advantages in key performance such as output wavelength stability and narrow linewidth. These lasers have broad application prospects in fields such as gas [...] Read more.
Quantum cascade lasers (QCLs) are important laser sources in the mid-infrared band. Among them, single-mode quantum cascade lasers show significant advantages in key performance such as output wavelength stability and narrow linewidth. These lasers have broad application prospects in fields such as gas detection, component analysis, and medical diagnosis. Single-mode quantum cascade lasers are mainly achieved through distributed feedback (DFB) gratings and distributed Bragg reflector (DBR) gratings. This paper presents the basic principles of quantum cascade lasers and summarizes the research progress of distributed feedback quantum cascade lasers and distributed Bragg reflector quantum cascade lasers in recent years, respectively. Finally, an in-depth discussion and outlook on the development direction and research trends of single-mode quantum cascade lasers are presented. Full article
(This article belongs to the Special Issue Advancements in Lasers: Applications and Future Trends)
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12 pages, 2778 KiB  
Article
High Reflectivity, Compact, and Widely Tunable Distributed Bragg Reflector Based on Silicon-Rich SiNx-SiOy at 80 °C PECVD
by Irene Rodríguez Lamoso and Sascha Preu
Appl. Sci. 2025, 15(6), 3330; https://doi.org/10.3390/app15063330 - 18 Mar 2025
Viewed by 2542
Abstract
This study investigates the mechanical and optical characteristics of silicon nitride thin films deposited with PECVD at 80 °C for tunable silicon-rich SiNx-SiOy-based MEMS optical cavities. Varying the deposition parameters using SiH4 and N2 as precursor gases [...] Read more.
This study investigates the mechanical and optical characteristics of silicon nitride thin films deposited with PECVD at 80 °C for tunable silicon-rich SiNx-SiOy-based MEMS optical cavities. Varying the deposition parameters using SiH4 and N2 as precursor gases for silicon-rich SiNx thin films allows us to tune the refractive index to a value as high as 2.40 ± 0.013 at an extinction coefficient of only 0.008, an extremely low surface roughness of only 0.26 nm, and a compressive stress of about 150 MPa. We deposited 6.5-layer pairs of silicon-rich SiNx/SiOy-distributed Bragg reflector (DBR) micro-electro-mechanical system (MEMS) mirror that covers the whole 1300 and 1550 nm range. Cavity architectures of 6.5 top and 6 bottom layer-pairs were fabricated in the clean room providing a variety of cavity lengths between 0.615 µm and 2.85 µm. These lengths were then simulated in order to estimate the Young’s Modulus of silicon-rich SiNx, obtaining values from 56 to 92 GPa. One of the designs was characterised electro-thermally providing a tuning range of at least 86.7 nm centred at 1585 nm. The tunable filters are well suitable for implementation as tuning element in lasers for optical coherence tomography. Full article
(This article belongs to the Special Issue Interdisciplinary Approaches and Applications of Optics & Photonics)
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28 pages, 13067 KiB  
Review
Tamm Plasmons: Properties, Applications, and Tuning with Help of Liquid Crystals
by Victor Yu. Reshetnyak, Igor P. Pinkevych, Michael E. McConney, Timothy J. Bunning and Dean R. Evans
Crystals 2025, 15(2), 138; https://doi.org/10.3390/cryst15020138 - 27 Jan 2025
Cited by 2 | Viewed by 1516
Abstract
This article provides a brief overview of the research on localized optical states called Tamm plasmons (TPs) and their potential applications, which have been extensively studied in recent decades. These states arise under the influence of incident light at the interface between a [...] Read more.
This article provides a brief overview of the research on localized optical states called Tamm plasmons (TPs) and their potential applications, which have been extensively studied in recent decades. These states arise under the influence of incident light at the interface between a metal film and a medium with the properties of a Bragg mirror, or between two media with the properties of a Bragg mirror. The localization of the states in the interfacial region is a consequence of the negative dielectric constant of the metal and the presence of a photonic band gap of the Bragg reflector. Optically, TPs appear as resonant reflection dips or peaks in the transmission and absorption spectra in the region corresponding to the photonic band gap. The relative simplicity of creating a Tamm structure and the significant sensitivity of TPs to its parameters make them attractive for applications. The formation of broadband and tunable TP modes in hybrid structures containing, in particular, rugate filters and porous distributed Bragg reflectors are considered. Considerable attention is paid to TP designs that include liquid crystals, which allow for the remote tuning of the TP spectrum without the mechanical restructuring of the system. The application of TPs in sensors, thermal emitters, absorbers, laser generation, and the experimental capabilities of TP-liquid crystal devices are also discussed. Full article
(This article belongs to the Special Issue Liquid Crystal Research and Novel Applications in the 21st Century)
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15 pages, 32312 KiB  
Article
Thermal Stability and Optical Behavior of Porous Silicon and Porous Quartz Photonic Crystals for High-Temperature Applications
by Ivan Alonso Lujan-Cabrera, Ely Karina Anaya Rivera, Jose Amilcar Rizzo Sierra, Jonny Paul Zavala De Paz, Cesar Isaza and Cristian Felipe Ramirez-Gutierrez
Photonics 2025, 12(2), 94; https://doi.org/10.3390/photonics12020094 - 21 Jan 2025
Cited by 2 | Viewed by 1917
Abstract
This work investigates the changes in the optical response of photonic crystals based on porous silicon (PSi) as a function of temperature. Using the transfer matrix method in combination with thermo-optical properties, we numerically calculate the optical response of two types of photonic [...] Read more.
This work investigates the changes in the optical response of photonic crystals based on porous silicon (PSi) as a function of temperature. Using the transfer matrix method in combination with thermo-optical properties, we numerically calculate the optical response of two types of photonic crystals: Distributed Bragg Reflectors (DBRs) and Fabry–Perot microcavities (FPMs). The results reveal that the photonic bandgap shifts with increasing temperature and pressure, with the defect mode in the microcavity notably shifting to longer wavelengths as the temperature rises. Additionally, we explore the transformation of PSi into porous quartz (PQz) via thermal oxidation, which preserves the porosity and multilayer structure, while altering the chemical composition. This results in geometrically identical photonic systems with distinct chemical properties, offering enhanced stability. Our simulations show that PSi structures exhibit a redshift in the photonic bandgap due to thermal expansion, while PQz structures remain optically stable even at elevated temperatures. This work highlights the potential of PQz as a robust material for high-temperature photonic applications, with tunable optical properties and stable performance under extreme conditions. The findings emphasize the feasibility of using porous-silicon-based photonic crystals for advanced optical devices in harsh environments. Full article
(This article belongs to the Special Issue New Insights into Optical Materials)
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13 pages, 4857 KiB  
Article
High Performance GaSb-Based DBR Laser with On-Chip Integrated Power Amplifier via Gain-Match Design
by Juntian Cao, Chengao Yang, Yihang Chen, Hongguang Yu, Jianmei Shi, Haoran Wen, Zhengqi Geng, Zhiyuan Wang, Hao Tan, Yu Zhang, Donghai Wu, Yingqiang Xu, Haiqiao Ni and Zhichuan Niu
Appl. Sci. 2025, 15(1), 41; https://doi.org/10.3390/app15010041 - 24 Dec 2024
Viewed by 1101
Abstract
We reported on a single-longitudinal-mode operated distributed Bragg reflector laser diode emitting at 1950 nm with an on-chip integrated power amplifier. Second-order Chromium–Bragg gratings are carefully designed and fabricated at the end of the ridge waveguide. Achieving a stable single-mode operation with a [...] Read more.
We reported on a single-longitudinal-mode operated distributed Bragg reflector laser diode emitting at 1950 nm with an on-chip integrated power amplifier. Second-order Chromium–Bragg gratings are carefully designed and fabricated at the end of the ridge waveguide. Achieving a stable single-mode operation with a large injecting current range of 800 mA from 15 °C to 40 °C. The maximum side-mode suppression ratio (SMSR) is up to 42 dB. To increase the output power, an on-chip integrated master oscillator power amplifier (MOPA) is also introduced. MOPA-DBR lasers with different matching configurations between the gain peak and Bragg wavelength are fabricated, resulting in various amplification consequences. The best device is realized with 40 nm red-shifted between Bragg wavelength and photoluminescence (PL) peak. A power amplification of 5.6 times is achieved with the maximum output power of 45 mW. Thus, we put up the feasibility and key design parameters of on-chip integrated power amplification DBR lasers towards mid-infrared. Full article
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13 pages, 5289 KiB  
Article
Structure Design of UVA VCSEL for High Wall Plug Efficiency and Low Threshold Current
by Bing An, Yukun Wang, Yachao Wang, Zhijie Zou, Yang Mei, Hao Long, Zhiwei Zheng and Baoping Zhang
Photonics 2024, 11(11), 1012; https://doi.org/10.3390/photonics11111012 - 27 Oct 2024
Cited by 1 | Viewed by 1984
Abstract
Vertical-cavity surface emitting lasers in UVA band (UVA VCSELs) operating at a central wavelength of 395 nm are designed by employing PICS3D(2021) software. The simulation results indicate that the thickness of the InGaN quantum well and GaN barrier layers affect the emission efficiency [...] Read more.
Vertical-cavity surface emitting lasers in UVA band (UVA VCSELs) operating at a central wavelength of 395 nm are designed by employing PICS3D(2021) software. The simulation results indicate that the thickness of the InGaN quantum well and GaN barrier layers affect the emission efficiency of UVA VCSELs greatly, suggesting an optimal thicknesses of 2.2 nm for the well layer and 2.7 nm for the barrier layer. Additionally, an overall consideration of threshold current, series resistance, photoelectric conversion efficiency, and optical output power results in the optimized thickness of the ITO current spreading layer, ~20 nm. Furthermore, by employing a five-pair Al0.15Ga0.85N/GaN multi-quantum barrier electron blocking layer (EBL) instead of a single Al0.2Ga0.8N EBL, the device shows a ~51% enhancement in the optical output power and a ~48% reduction in the threshold current. The number of distributed Bragg reflector (DBR) pairs also plays crucial roles in the device’s photoelectric performance. The device designed in this study demonstrates a minimum lasing threshold of 1.16 mA and achieves a maximum wall plug efficiency of approximately 5%, outperforming other similar studies. Full article
(This article belongs to the Special Issue Next-Generation Vertical-Cavity Surface-Emitting Lasers)
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13 pages, 12527 KiB  
Article
A 3D-Printed Bi-Material Bragg-Based Reflectarray Antenna
by Walid Chekkar, Jerome Lanteri, Tom Malvaux, Julien Sourice, Leonardo Lizzi, Claire Migliaccio and Fabien Ferrero
Sensors 2024, 24(20), 6512; https://doi.org/10.3390/s24206512 - 10 Oct 2024
Cited by 1 | Viewed by 1848
Abstract
This paper presents a 3D-printed fully dielectric bi-material reflectarray with bandgap characteristics for multi-band applications. To achieve bandgap characteristics, a “1D Bragg reflector” unit cell is used. The latter is a layered structure characterized by a spatial distribution of refractive index that varies [...] Read more.
This paper presents a 3D-printed fully dielectric bi-material reflectarray with bandgap characteristics for multi-band applications. To achieve bandgap characteristics, a “1D Bragg reflector” unit cell is used. The latter is a layered structure characterized by a spatial distribution of refractive index that varies periodically along one dimension. By appropriately selecting the dimensions, the bandgap can be shifted to cover the desired frequency bands. To validate this bandgap characteristic, a (121.5 mm × 121.5 mm) with an f/D ratio of 0.5 reflectarray was fabricated. The measured gain at 27 GHz is 27.22 dBi, equivalent to an aperture efficiency of 35.05%, demonstrating good agreement between simulated and measured performances within the frequency range of 26–30 GHz. Additionally, the transparency of the reflectarray was verified by measuring the transmission coefficient, which exhibited a high level of transparency of 0.32 dB at 39 GHz. These features make the proposed reflectarray a good candidate for multi-band frequency applications. Full article
(This article belongs to the Special Issue Sensing Technologies in Additive Manufacturing)
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10 pages, 3460 KiB  
Article
Ultrahigh-Reflectivity Circularly Polarized Mirrors Based on the High-Contrast Subwavelength Chiral Metasurface
by Bo Cheng, Botao Jiang, Yuxiao Zou and Guofeng Song
Photonics 2024, 11(10), 923; https://doi.org/10.3390/photonics11100923 - 30 Sep 2024
Cited by 3 | Viewed by 1494
Abstract
The circularly polarized laser sources are core components for many optical applications such as biomedicine, quantum technology, and AR/VR. However, conventional techniques make it difficult to further diminish the size of circularly polarized lasers. Thus, the high-contrast subwavelength chiral metasurface (HCCM) with a [...] Read more.
The circularly polarized laser sources are core components for many optical applications such as biomedicine, quantum technology, and AR/VR. However, conventional techniques make it difficult to further diminish the size of circularly polarized lasers. Thus, the high-contrast subwavelength chiral metasurface (HCCM) with a 980 nm operating wavelength is numerically investigated. The HCCM is composed of chiral metasurfaces modulating the circular dichroism of reflectance and 6 pairs of Distributed Bragg Reflectors (DBR) with 55% reflectivity. The reason that the HCCM has an ultra-high reflectivity (99.9%) at the operating wavelength of 980 nm is the combination of the optical refractive index difference between the GaAs metasurface and the AlOx substrate and weak destructive interference in the AlOx support layer. In addition, the circular dichroism of the chiral metasurfaces (2.1%) is mainly caused by the displacement of two square air holes in opposite directions, thus transforming the unit cell of the metasurface from C2 symmetry to chiral symmetry. The reflector has the advantages of a simple structure and miniaturization, which is expected to greatly reduce the fabrication difficulty and cost of the circular polarization VCSELs. Full article
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12 pages, 803 KiB  
Article
VCSELs with Stable Linear Polarization Emission Induced by Dielectric Columnar Thin Film Mirrors
by Krassimir Panajotov
Photonics 2024, 11(7), 672; https://doi.org/10.3390/photonics11070672 - 18 Jul 2024
Viewed by 1882
Abstract
We propose and analyze numerically new approaches to force the laser emission from VCSELs in a well-defined linear polarization independent of the existing phase and amplitude anisotropies by using dielectric columnar thin-film (CTF) layers in the distributed Bragg reflector (DBR). In one approach, [...] Read more.
We propose and analyze numerically new approaches to force the laser emission from VCSELs in a well-defined linear polarization independent of the existing phase and amplitude anisotropies by using dielectric columnar thin-film (CTF) layers in the distributed Bragg reflector (DBR). In one approach, we have demonstrated CTF-VCSELs with top DBR consisting of two alternating CTF layers grown in orthogonally oriented planes and with high and low refractive index for one linear polarization while having the same value of the refractive index value for the orthogonal linear polarization. Such CTF-VCSELs have large dichroism of the mirror losses for two orthogonal linear polarizations. We have also shown DBR designs with parallel columnar orientations of the two CTF dielectric materials. In a second approach, we implement only one CTF layer in the dielectric DBR chosen in such a way that only one linearly polarized longitudinal mode is resonant in the CTF-VCSEL while light with the orthogonally oriented linear polarization is out of resonance and thus cannot lase. Simple estimation of the polarization mode suppression ratio for the different exemplary designs of CTF-VCSELs based on TiO2 and TaO2 dielectric CTFs results in values as high as 80 dB, which compares favorably to the existing alternative approaches. Full article
(This article belongs to the Section Lasers, Light Sources and Sensors)
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10 pages, 3172 KiB  
Article
High-Performance Ultraviolet Photodetectors Based on Nanoporous GaN with a Ga2O3 Single-Crystal Layer
by Junjie Wen, Yuankang Wang, Biao Zhang, Rongrong Chen, Hongyan Zhu, Xinyu Han and Hongdi Xiao
Nanomaterials 2024, 14(13), 1165; https://doi.org/10.3390/nano14131165 - 8 Jul 2024
Cited by 4 | Viewed by 1775
Abstract
The utilization of a nanoporous (NP) GaN fabricated by electrochemical etching has been demonstrated to be effective in the fabrication of a high-performance ultraviolet (UV) photodetector (PD). However, the NP-GaN PD typically exhibits a low light-dark current ratio and slow light response speed. [...] Read more.
The utilization of a nanoporous (NP) GaN fabricated by electrochemical etching has been demonstrated to be effective in the fabrication of a high-performance ultraviolet (UV) photodetector (PD). However, the NP-GaN PD typically exhibits a low light-dark current ratio and slow light response speed. In this study, we present three types of UV PDs based on an unetched GaN, NP-GaN distributed Bragg reflector (DBR), and NP-GaN-DBR with a Ga2O3 single-crystal film (Ga2O3/NP-GaN-DBR). The unetched GaN PD does not exhibit a significant photoresponse. Compared to the NP-GaN-DBR PD device, the Ga2O3/NP-GaN-DBR PD demonstrates a larger light-dark current ratio (6.14 × 103) and higher specific detectivity (8.9 × 1010 Jones) under 365 nm at 5 V bias due to its lower dark current (3.0 × 10−10 A). This reduction in the dark current can be attributed to the insertion of the insulating Ga2O3 between the metal and the NP-GaN-DBR, which provides a thicker barrier thickness and higher barrier height. Additionally, the Ga2O3/NP-GaN-DBR PD device exhibits shorter rise/decay times (0.33/0.23 s) than the NP-GaN-DBR PD, indicating that the growth of a Ga2O3 layer on the DBR effectively reduces the trap density within the NP-GaN DBR structure. Although the device with a Ga2O3 layer presents low photoresponsivity (0.1 A/W), it should be feasible to use Ga2O3 as a dielectric layer based on the above-mentioned reasons. Full article
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23 pages, 5026 KiB  
Article
Study on Bottom Distributed Bragg Reflector Radius and Electric Aperture Radius on Performance Characteristics of GaN-Based Vertical-Cavity Surface-Emitting Laser
by Dominika Dąbrówka and Robert P. Sarzała
Materials 2024, 17(13), 3107; https://doi.org/10.3390/ma17133107 - 25 Jun 2024
Cited by 1 | Viewed by 1545
Abstract
This article presents the results of a numerical analysis of a nitride-based vertical-cavity surface-emitting laser (VCSEL). The analyzed laser features an upper mirror composed of a monolithic high-contrast grating (MHCG) and a dielectric bottom mirror made of SiO2 and Ta2O [...] Read more.
This article presents the results of a numerical analysis of a nitride-based vertical-cavity surface-emitting laser (VCSEL). The analyzed laser features an upper mirror composed of a monolithic high-contrast grating (MHCG) and a dielectric bottom mirror made of SiO2 and Ta2O5 materials. The emitter was designed for light emission at a wavelength of 403 nm. We analyze the influence of the size of the dielectric bottom mirrors on the operation of the laser, including its power–current–voltage (LIV) characteristics. We also study the effect of changing the electrical aperture radius (active area dimensions). We demonstrate that the appropriate selection of these two parameters enables the temperature inside the laser to be reduced, lowering the laser threshold current and increasing its optical power output significantly. Full article
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10 pages, 6251 KiB  
Article
Wavelength Tuning in Resonant Cavity Interband Cascade Light Emitting Diodes (RCICLEDs) via Post Growth Cavity Length Adjustment
by Nicolas Schäfer, Robert Weih, Julian Scheuermann, Florian Rothmayr, Johannes Koeth and Sven Höfling
Sensors 2024, 24(12), 3843; https://doi.org/10.3390/s24123843 - 14 Jun 2024
Cited by 1 | Viewed by 1332
Abstract
We demonstrate substrate-emitting resonant cavity interband cascade light emitting diodes (RCICLEDs) based on a single distributed Bragg reflector (DBR). These devices operate in continuous wave mode at room temperature. Compared to standard ICLEDs without a cavity, we achieved an 89% reduction in the [...] Read more.
We demonstrate substrate-emitting resonant cavity interband cascade light emitting diodes (RCICLEDs) based on a single distributed Bragg reflector (DBR). These devices operate in continuous wave mode at room temperature. Compared to standard ICLEDs without a cavity, we achieved an 89% reduction in the emission spectrum width, as indicated by the Full Width Half Maximum (FWHM) of 70 nm. Furthermore, we observed far-field narrowing and improved thermal stability. A single DBR configuration allows the cavity length to be adjusted by adding refractive index-matched material to the top of the epitaxial structure after epitaxial growth. This modification effectively shifts the cavity response towards longer wavelengths. We fabricated emitters comprising two cavities of different lengths, resulting in the emission of two distinct spectral lines that can be independently controlled. This dual-color capability enables one of the emission lines to serve as a built-in reference channel, making these LEDs highly suitable for cost-effective gas-sensing applications. Full article
(This article belongs to the Section Optical Sensors)
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20 pages, 9119 KiB  
Article
SiNx/SiO2-Based Fabry–Perot Interferometer on Sapphire for Near-UV Optical Gas Sensing of Formaldehyde in Air
by Reinoud Wolffenbuttel, Declan Winship, David Bilby, Jaco Visser, Yutao Qin and Yogesh Gianchandani
Sensors 2024, 24(11), 3597; https://doi.org/10.3390/s24113597 - 3 Jun 2024
Cited by 1 | Viewed by 3823
Abstract
Fabry–Perot interferometers (FPIs), comprising foundry-compatible dielectric thin films on sapphire wafer substrates, were investigated for possible use in chemical sensing. Specifically, structures comprising two vertically stacked distributed Bragg reflectors (DBRs), with the lower DBR between a sapphire substrate and a silicon-oxide (SiO2 [...] Read more.
Fabry–Perot interferometers (FPIs), comprising foundry-compatible dielectric thin films on sapphire wafer substrates, were investigated for possible use in chemical sensing. Specifically, structures comprising two vertically stacked distributed Bragg reflectors (DBRs), with the lower DBR between a sapphire substrate and a silicon-oxide (SiO2) resonator layer and the other DBR on top of this resonator layer, were investigated for operation in the near-ultraviolet (near-UV) range. The DBRs are composed of a stack of nitride-rich silicon-nitride (SiNx) layers for the higher index and SiO2 layers for the lower index. An exemplary application would be formaldehyde detection at sub-ppm concentrations in air, using UV absorption spectroscopy in the 300–360 nm band, while providing spectral selectivity against the main interfering gases, notably NO2 and O3. Although SiNx thin films are conventionally used only for visible and near-infrared optical wavelengths (above 450 nm) because of high absorbance at lower wavelengths, this work shows that nitride-rich SiNx is suitable for near-UV wavelengths. The interplay between spectral absorbance, transmittance and reflectance in a FPI is presented in a comparative study between one FPI design using stoichiometric material (Si3N4) and two designs based on N-rich compositions, SiN1.39 and SiN1.49. Spectral measurements confirm that if the design accounts for phase penetration depth, sufficient performance can be achieved with the SiN1.49-based FPI design for gas absorption spectroscopy in near-UV, with peak transmission at 330 nm of 64%, a free spectral range (FSR) of 20 nm and a full-width half-magnitude spectral resolution (FWHM) of 2 nm. Full article
(This article belongs to the Special Issue Optical Sensors for Gas Monitoring)
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3 pages, 3142 KiB  
Abstract
The Improvement of Tamm Interface State Detection by Using a Porous Layer between a Metal Nanostructured Grating and a DBR
by Oumaima Haidar, Baptiste Mathmann, Yannick Dusch, Mohamed El Barghouti, Gaëtan Lévêque, Abdellatif Akjouj, Abdellah Mir and Abdelkrim Talbi
Proceedings 2024, 97(1), 136; https://doi.org/10.3390/proceedings2024097136 - 2 Apr 2024
Cited by 1 | Viewed by 1046
Abstract
In this work, we propose a sensor based on Tamm plasmonic resonance; the structure is composed of gold nanoribbons deposited on a Distributed Bragg Reflector (DBR) (SiO2/Si3N4)6. We have enhanced the sensitivity of our sensor [...] Read more.
In this work, we propose a sensor based on Tamm plasmonic resonance; the structure is composed of gold nanoribbons deposited on a Distributed Bragg Reflector (DBR) (SiO2/Si3N4)6. We have enhanced the sensitivity of our sensor from 40 nm/RIU to 200 nm/RIU for a refractive index change of 1% by replacing the last layer of Si3N4 in contact with gold with porous Si3N4 with a porosity of p = 40%. Full article
(This article belongs to the Proceedings of XXXV EUROSENSORS Conference)
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15 pages, 10680 KiB  
Article
Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications
by Christian Behl, Regine Behlert, Jan Seiler, Christian Helke, Alexey Shaporin and Karla Hiller
Micro 2024, 4(1), 142-156; https://doi.org/10.3390/micro4010010 - 29 Feb 2024
Cited by 2 | Viewed by 1344
Abstract
Thin metal layers such as silver (Ag) are being utilized for various optical and plasmonic applications as well as for electrical purposes, e.g., as transparent electrodes in display devices or solar cells. This paper focuses on optical MEMS applications such as the Fabry–Pérot [...] Read more.
Thin metal layers such as silver (Ag) are being utilized for various optical and plasmonic applications as well as for electrical purposes, e.g., as transparent electrodes in display devices or solar cells. This paper focuses on optical MEMS applications such as the Fabry–Pérot interferometer (FPI). Within such filters, reflector materials such as distributed Bragg reflectors (DBRs) or subwavelength gratings (SWGs) have been widely used so far, whereas metallic thin films (MTFs) were limited in application due to their comparatively higher absorption. In this paper, thin sputtered Ag layers with thicknesses of 20, 40 and 60 nm on glass substrates have been investigated, and it is shown that the absorption is very low in the visible spectral range (VIS) and increases only in near-infrared (NIR) with increasing wavelength. Thus, we consider Ag-thin layers to be an interesting reflector material at least for the VIS range, which can be easily fabricated and integrated. However, Ag is not inert and stable when exposed to the atmosphere. Hence, it needs a passivation material. For this purpose, AlN has been chosen in this contribution, which can be deposited by sputtering as well. In this contribution, we have chosen thin AlN layers for this purpose, which can also be deposited by sputtering. Thus, various AlN/Ag/AlN-reflector stacks were created and patterned by lift-off technology preferably. The fabricated reflectors were characterized with respect to adhesion, stress, cohesion, homogeneity, and most importantly, their optical properties. It was found that the thickness of the AlN can be used to adjust the reflectance–transmittance ratio in the VIS range, and influences the adsorption in the NIR range as well. Based on the measured values of the reflectors with 40 nm Ag, an exemplary transmission filter characteristics has been predicted for a wavelength range from 400 to 800 nm. Both the maximum transmittance and the full width at half maximum (FWHM) can be tuned by variation of the AlN thickness from 20 to 60 nm. Full article
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