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Keywords = displacement measuring interferometer

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13 pages, 14620 KB  
Article
Multi-Wavelength Interferometric Absolute Distance Measurement and Dynamic Demodulation Error Compensation
by Jiawang Fang, Chenlong Ou, Fengwei Liu and Yongqian Wu
Sensors 2026, 26(9), 2677; https://doi.org/10.3390/s26092677 (registering DOI) - 25 Apr 2026
Abstract
This paper presents an absolute distance measurement system based on three-wavelength synchronous phase-shifting interferometry. A synthetic wavelength chain is established using three semiconductor lasers in an all-fiber Fizeau interferometer. By integrating a piezoelectric transducer (PZT)-driven sinusoidal phase modulation with multi-channel synchronous sampling for [...] Read more.
This paper presents an absolute distance measurement system based on three-wavelength synchronous phase-shifting interferometry. A synthetic wavelength chain is established using three semiconductor lasers in an all-fiber Fizeau interferometer. By integrating a piezoelectric transducer (PZT)-driven sinusoidal phase modulation with multi-channel synchronous sampling for phase demodulation, and further combining it with a fractional multiplication method, the proposed system achieves high-precision absolute distance measurement over an extended range. Experimental results demonstrate an unambiguous measurement range of 240 μm, a static measurement precision better than 0.6 nm, and a dynamic displacement measurement accuracy superior to 2 nm in comparison with the reference device. The main error sources of the system, including synthetic wavelength uncertainty, phase measurement uncertainty, and air refractive index uncertainty, are systematically modeled and analyzed. In addition, the influence of dynamic factors, such as PZT nonlinearity, is discussed and compensated. The proposed method provides a robust and high-precision solution for absolute ranging and shows strong potential for applications in industrial precision inspection and optical sensing. Full article
(This article belongs to the Section Optical Sensors)
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10 pages, 1221 KB  
Article
A Low-Cost Laser Interferometric Elastography System for Skin Elasticity Measurement
by Asha Parmar, Shantanu Chauhan, Sora Alghziwatalkhawaldh and Kanwarpal Singh
Bioengineering 2026, 13(4), 441; https://doi.org/10.3390/bioengineering13040441 - 10 Apr 2026
Viewed by 505
Abstract
This paper introduces a laser interferometric elastography (LIE) system that uses a narrow linewidth laser and a single photodetector to measure mechanical displacements induced by surface acoustic waves (SAWs) generated by an electrically driven piezoelectric transducer. The method relies on phase delay analysis [...] Read more.
This paper introduces a laser interferometric elastography (LIE) system that uses a narrow linewidth laser and a single photodetector to measure mechanical displacements induced by surface acoustic waves (SAWs) generated by an electrically driven piezoelectric transducer. The method relies on phase delay analysis of the resulting interference signal to determine displacement within the medium, thereby eliminating the need for complex interferometers and broadband light sources. By substantially reducing optical hardware requirements, the system provides a compact and cost-effective platform for elasticity mapping in biological samples. Quantitative assessment of mechanical properties is achieved through controlled mechanical excitation and phase-resolved signal collection, demonstrating the practicality of simplified LIE for real-world applications. Full article
(This article belongs to the Special Issue Optical Imaging for Biomedical Applications, 2nd Edition)
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13 pages, 2621 KB  
Article
Enhanced Optical Triangulation Method for Piezoelectric Stack
by Sinan Köksu and Sedat Nazlıbilek
Instruments 2026, 10(1), 13; https://doi.org/10.3390/instruments10010013 - 26 Feb 2026
Viewed by 415
Abstract
The precise control of piezoelectric actuators is limited by inherent hysteresis, creep, and nonlinear behavior, which necessitate high-resolution displacement sensing for effective closed-loop operation. Although optical interferometers can achieve nanometer and sub-nanometer resolution, their practical implementation is often constrained by complex optical alignment, [...] Read more.
The precise control of piezoelectric actuators is limited by inherent hysteresis, creep, and nonlinear behavior, which necessitate high-resolution displacement sensing for effective closed-loop operation. Although optical interferometers can achieve nanometer and sub-nanometer resolution, their practical implementation is often constrained by complex optical alignment, sensitivity to environmental disturbances, and limited robustness in high-speed measurements. Optical triangulation sensors offer a more robust and straightforward alternative; however, their resolution is typically insufficient for nanometer-scale displacement measurements. In this study, a novel optical triangulation sensor based on a two-stage geometric optical amplification scheme is proposed for measuring the expansion of piezoelectric stacks. The method relies purely on geometric optical amplification and does not require interferometric techniques or complex signal processing. Using off-the-shelf optical components and an industrial imaging sensor, the proposed system achieves a displacement resolution of 109.6 nm, a repeatability of 74.62 nm, and an accuracy of 98.81% with a maximum error of 207.14 nm under hysteresis measurements. The achieved resolution is primarily limited by the spatial resolution of the camera sensor, indicating that further improvements are possible through optimization of the optical configuration or the use of higher-resolution imaging devices. Owing to its simplicity and robustness, the proposed sensor is well suited for real-time closed-loop control of piezoelectric actuators. Full article
(This article belongs to the Section Sensing Technologies and Precision Measurement)
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15 pages, 4067 KB  
Article
Evaluation of Periodic Nonlinear Error in a Directly Traceable Grating Interferometer
by Wenjia Xu, Zichao Lin, Song Song, Chunling He, Yaao Yang, Guangxu Xiao and Xiao Deng
Photonics 2025, 12(12), 1209; https://doi.org/10.3390/photonics12121209 - 8 Dec 2025
Viewed by 432
Abstract
Periodic nonlinear error (PNE) is a key factor limiting the accuracy of displacement measurement instruments. For grating interferometers, which are widely used in high-precision displacement measurement, reliable characterization of PNE is essential. Conventional evaluation methods that rely on higher-precision instruments become unsuitable for [...] Read more.
Periodic nonlinear error (PNE) is a key factor limiting the accuracy of displacement measurement instruments. For grating interferometers, which are widely used in high-precision displacement measurement, reliable characterization of PNE is essential. Conventional evaluation methods that rely on higher-precision instruments become unsuitable for ultra-high-accuracy systems. Although the self-evaluation method based on Lissajous figures are commonly used, their results inherently depend on the grating parameters and the interferometric signals themselves, leading to a lack of traceability and reduced credibility of the results. In this work, we propose a traceable self-evaluation method for assessing the PNE of a directly traceable grating interferometer (DTGI). The DTGI employs a chromium (Cr) atom lithography grating, whose pitch is directly traceable to the atomic transition frequency of Cr (7S37P4), as its displacement reference, thereby overcoming the traceability deficiencies of conventional self-evaluation methods. Numerical simulations confirm the validity of the proposed method, and experiments performed on a laboratory-built DTGI demonstrate 10-picometer-level PNE after Heydemann correction within micrometer range displacements. These results confirm the method’s suitability for metrological applications requiring stringent linearity performance in nanometric displacement measurement. Full article
(This article belongs to the Section Lasers, Light Sources and Sensors)
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18 pages, 3903 KB  
Article
Tolerance Analysis of Test Mass Alignment Errors for Space-Based Gravitational Wave Detection
by Jun Ke, Ruihong Gao, Jinghan Liu, Mengyang Zhao, Ziren Luo, Jia Shen and Peng Dong
Sensors 2025, 25(23), 7393; https://doi.org/10.3390/s25237393 - 4 Dec 2025
Viewed by 646
Abstract
Space-based gravitational wave detection imposes extremely high requirements on displacement measurement accuracy, with its core measurement components being laser interferometers and inertial sensors. The laser interferometers detect gravitational wave signals by measuring the distance between two test masses (TMs) housed within the inertial [...] Read more.
Space-based gravitational wave detection imposes extremely high requirements on displacement measurement accuracy, with its core measurement components being laser interferometers and inertial sensors. The laser interferometers detect gravitational wave signals by measuring the distance between two test masses (TMs) housed within the inertial sensors. Spatial alignment errors of the TMs relative to the laser interferometers can severely degrade the interferometric performance, primarily by significantly amplifying tilt-to-length (TTL) coupling noise and reducing interferometric efficiency. This paper presents a systematic analysis of the coupling mechanisms between TM alignment errors and TTL coupling noise. We first establish a comprehensive TTL noise model that accounts for alignment errors, then verify and analyze it through optical simulations. This research ultimately clarifies the coupling mechanisms of TM alignment errors in the context of space-borne gravitational wave missions and determines the allowable alignment tolerance specifications required to meet the gravitational wave detection sensitivity requirements. This work provides critical theoretical foundations and design guidance for the ground alignment procedures and on-orbit performance prediction of future space-based gravitational wave detection missions. Full article
(This article belongs to the Section Optical Sensors)
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35 pages, 18912 KB  
Review
Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor
by Can Cui and Xinghui Li
Sensors 2025, 25(21), 6791; https://doi.org/10.3390/s25216791 - 6 Nov 2025
Cited by 2 | Viewed by 4104
Abstract
Displacement metrology with nanometer-level precision over macroscopic ranges is a key foundation for modern science and engineering. This review provides a comparative overview of Precision Nanometrology, covering measurement ranges from micrometers to meters and accuracies between 0.1 nm and 100 nm. Three main [...] Read more.
Displacement metrology with nanometer-level precision over macroscopic ranges is a key foundation for modern science and engineering. This review provides a comparative overview of Precision Nanometrology, covering measurement ranges from micrometers to meters and accuracies between 0.1 nm and 100 nm. Three main technologies are discussed: the Laser Interferometer (LI), the Grating Interferometer (GI), and the Time Grating Sensor (TGS). The LI is widely regarded as the traceable benchmark for highest resolution; the GI has been developed into a compact and stable solution based on diffraction gratings; and the TGS has emerged as a new approach that converts spatial displacement into the time domain, offering strong resilience to environmental fluctuations. For each technique, the principles, recent progress, and representative systems from the past two decades are reviewed. Particular attention is given to the trade-offs between resolution, robustness, and scalability, which are decisive for practical deployment. The review concludes with a comparative analysis of performance indicators and a perspective on future directions, highlighting hybrid architectures and application-driven requirements in precision manufacturing and advanced instrumentation. Full article
(This article belongs to the Section Physical Sensors)
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17 pages, 12090 KB  
Article
Virtual Vernier Effect-Enabled Parallel Dual-Cavity Sensor for Temperature and Humidity Synchronization
by Yuting Li, Xiaoguang Mu, Yuqiang Yang, Han Xia, Yuying Zhang, Chengyu Mo, Zhihao Huang, Yitong Li and Fujiang Li
Nanomaterials 2025, 15(18), 1427; https://doi.org/10.3390/nano15181427 - 16 Sep 2025
Viewed by 700
Abstract
This paper presents a high-sensitivity temperature and humidity synchronous measurement sensor based on virtual Vernier demodulation, designed to overcome the limitations of traditional sensors in high-sensitivity and synchronous measurements. By combining a dual-cavity parallel structure with the Virtual Vernier effect (VVE), two interferometers [...] Read more.
This paper presents a high-sensitivity temperature and humidity synchronous measurement sensor based on virtual Vernier demodulation, designed to overcome the limitations of traditional sensors in high-sensitivity and synchronous measurements. By combining a dual-cavity parallel structure with the Virtual Vernier effect (VVE), two interferometers were designed, with one using a temperature-sensitive material (polydimethylsiloxane, PDMS) and the other using a humidity-sensitive material (polyvinyl alcohol, PVA) for temperature and humidity measurement, respectively. Based on actual interference spectra, a modulation function was used to generate the virtual reference interferometer spectrum, which was then superimposed with the sensing interferometer’s spectrum to form a virtual Vernier envelope. By monitoring the displacement of the envelope, precise measurements of temperature and humidity changes were achieved. Experimental results showed a temperature sensitivity of 5.61 nm/°C and 7.62 nm/°C, a humidity sensitivity of 0 nm/%RH and −3.07 nm/%RH, and average errors of 0.64% and 1.10% for temperature and humidity, respectively, demonstrating the feasibility of the method. The introduction of the virtual interferometer effectively reduces environmental interference with the measurement results and avoids the material loss and errors associated with traditional reference interferometers. More importantly, the VVE enables dynamic adjustment of the envelope magnification, thereby enhancing the sensor’s flexibility and overcoming the structural limitations of traditional interferometers. This sensor provides efficient and reliable technological support for future environmental monitoring and climate change research. Full article
(This article belongs to the Special Issue Nanomaterials for Micro/Nano Sensing and Detecting Applications)
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17 pages, 8282 KB  
Article
Research on ADPLL for High-Precision Phase Measurement
by Weilai Yao, Chenying Sun, Xindong Liang and Jianjun Jia
Symmetry 2025, 17(9), 1487; https://doi.org/10.3390/sym17091487 - 8 Sep 2025
Cited by 1 | Viewed by 1178
Abstract
The inter-satellite laser interferometer, which functions as a high-performance displacement sensor, will be used in forthcoming space-based gravitational wave detection missions. The readout of these interferometers is typically performed by phasemeters based on all-digital phase-locked loops (ADPLLs) implemented in FPGAs. This paper proposes [...] Read more.
The inter-satellite laser interferometer, which functions as a high-performance displacement sensor, will be used in forthcoming space-based gravitational wave detection missions. The readout of these interferometers is typically performed by phasemeters based on all-digital phase-locked loops (ADPLLs) implemented in FPGAs. This paper proposes a feasible loop parameter design workflow and a comprehensive noise model, providing guidelines for designing and optimizing an ADPLL to meet specified bandwidth and precision requirements. The validity of our analysis is demonstrated through numerical performance measurements based on the modified digital splitting test. Full article
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15 pages, 7516 KB  
Article
Correction of Error Interference Fringes Based on Automatic Spectral Analysis
by Siqian Yang, Xinqiang Wang, Tingli Song, Wei Xiong, Song Ye and Fangyuan Wang
Optics 2025, 6(2), 26; https://doi.org/10.3390/opt6020026 - 6 Jun 2025
Cited by 1 | Viewed by 2063
Abstract
When interferograms in space heterodyne spectrometers exhibit tilted or distorted fringes, significant errors may occur in the demodulated spectral information. To address this issue, we propose a method for interferogram correction based on automatic spectral analysis. Simulations on erroneous interferograms of monochromatic and [...] Read more.
When interferograms in space heterodyne spectrometers exhibit tilted or distorted fringes, significant errors may occur in the demodulated spectral information. To address this issue, we propose a method for interferogram correction based on automatic spectral analysis. Simulations on erroneous interferograms of monochromatic and polychromatic light demonstrate that this method effectively corrects fringe tilts and significantly improves spectral demodulation accuracy. The standard deviations between the corrected spectra and ideal spectra for monochromatic and polychromatic light are 0.016 and 0.019, respectively, compared to 0.104 and 0.127 for uncorrected spectra. Additionally, the method successfully corrects experimental interferograms of potassium and neon lamps, accurately demodulating characteristic peaks of potassium and neon emission lines. It also enables accurate displacement measurement in a Michelson interferometer experiment. This method, through automatic analysis and one-sided spectral correction, efficiently and accurately corrects erroneous interferograms and enhances spectral demodulation accuracy, showing broad application potential. Full article
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13 pages, 5686 KB  
Article
The Influence of Insert Mounting Errors on the Surface Roughness of 1.0503 Steel in Face Milling
by Lukasz Nowakowski, Jaroslaw Rolek, Slawomir Blasiak and Michal Skrzyniarz
Materials 2024, 17(24), 6144; https://doi.org/10.3390/ma17246144 - 16 Dec 2024
Cited by 4 | Viewed by 1276
Abstract
This article looked at how insert mounting errors affect the cutting tool performance in the face milling of 1.0503 steel. This study was conducted for 490-050Q22-08M inserts mounted in a Sandvik Coromant 490-050Q22-08M CoroMill cutter attached to an AVIA VMC 800 vertical milling [...] Read more.
This article looked at how insert mounting errors affect the cutting tool performance in the face milling of 1.0503 steel. This study was conducted for 490-050Q22-08M inserts mounted in a Sandvik Coromant 490-050Q22-08M CoroMill cutter attached to an AVIA VMC 800 vertical milling center. A 3D geometrical model of the cutter was developed to determine the engagement of the particular inserts in the material removal process at different feeds per tooth. The test results showed that, at feeds ranging from 0.02 mm/tooth to 0.06 mm/tooth, only three out of five inserts took part in the face milling process, while at feeds higher than 0.12 mm/tooth, all the inserts mounted in the cutter body were engaged. The relative displacements in the tool-workpiece system were measured along the axis of rotation of the tool using a Renishaw XL-80 laser interferometer. The vibration signals recorded during cutting confirmed that there was a clear relationship between the number of inserts engaged in the process and the root mean square, the arithmetic mean, and the DC component. Multiple 2D scans of the face milled surface to measure parameters Ra and Rt helped determine the feed range where the cutting process was stable. The conducted studies allowed for the identification of optimal operating ranges for a tool with parameterized errors in the mounting of inserts within the tool body. The influence of these mounting errors, in correlation with the feed per tooth, on the surface roughness of 1.0503 steel was presented and compared with five other materials. Full article
(This article belongs to the Section Manufacturing Processes and Systems)
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44 pages, 14459 KB  
Review
A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers
by Linbin Luo, Shuonan Shan and Xinghui Li
Sensors 2024, 24(20), 6617; https://doi.org/10.3390/s24206617 - 14 Oct 2024
Cited by 35 | Viewed by 10240
Abstract
The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating [...] Read more.
The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd’s mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd’s mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating–microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments. Full article
(This article belongs to the Special Issue Feature Papers in Optical Sensors 2024)
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18 pages, 7980 KB  
Article
High-Sensitivity Displacement Sensor Using Few-Mode Optical Fibers and the Optical Vernier Effect
by Luis E. Guillen-Ruiz, Gilberto Anzueto-Sánchez, Alejandro Martínez-Rios, Myriam C. Jiménez-Mares and Javier A. Martin-Vela
Appl. Sci. 2024, 14(20), 9300; https://doi.org/10.3390/app14209300 - 12 Oct 2024
Cited by 9 | Viewed by 4082
Abstract
This paper presents a displacement sensor designed to achieve the Optical Vernier Effect (OVE) through a simple yet robust configuration, enhancing sensitivity and precision in small displacement measurements. The sensor structure comprises a few-mode fiber (FMF) placed between two single-mode fibers (SMF) in [...] Read more.
This paper presents a displacement sensor designed to achieve the Optical Vernier Effect (OVE) through a simple yet robust configuration, enhancing sensitivity and precision in small displacement measurements. The sensor structure comprises a few-mode fiber (FMF) placed between two single-mode fibers (SMF) in an SMF-FMF-SMF (SFS) configuration. A series of distinct configurations of concatenated Mach–Zehnder fiber interferometers (MZFI) were examined, with the lengths of the reference FMF (FMFRef) and sensing FMF (FMFSen) adjusted to track the spectral envelope shifts. The results demonstrate that the direction of the spectral shift is governed by the ratio between the FMFRef and FMFSen lengths. The sensor achieved a sensitivity of up to 39.07 nm/mm and a magnification factor (M factor) of up to 50.09, demonstrating exceptional precision and adaptability across a range of applications. The proposed configuration also enhances the overall sensor performance, highlighting its potential for broader use in fields requiring precise displacement monitoring. Full article
(This article belongs to the Special Issue Recent Trends in Fiber Optic Sensor: Technology and Applications)
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14 pages, 8963 KB  
Article
Twenty-Meter Laser Strainmeter “Popova Isl.”
by Mikhail Bolsunovskii, Grigory Dolgikh, Stanislav Dolgikh, Vladimir Chupin, Viacheslav Shvets and Sergey Yakovenko
Sensors 2024, 24(17), 5788; https://doi.org/10.3390/s24175788 - 5 Sep 2024
Cited by 1 | Viewed by 1431
Abstract
This paper describes the design and principle of operation of a 20 m laser strainmeter of unequal-arm type created on the basis of a Michelson interferometer and frequency-stabilized helium–neon laser. The interferometry methods used allow the measurement of the displacement of an Earth’s [...] Read more.
This paper describes the design and principle of operation of a 20 m laser strainmeter of unequal-arm type created on the basis of a Michelson interferometer and frequency-stabilized helium–neon laser. The interferometry methods used allow the measurement of the displacement of an Earth’s crust section on the base of the laser strainmeter with an accuracy of 30 pm in the frequency range from 0 (conventionally) to 1000 Hz. This laser strainmeter, when connected to an accurate time system providing an accuracy of 1 μs, should structurally become a part of the laser interferometric seismoacoustic observatory, consisting of spatially separated laser strainmeters installed in various regions of Russia. Full article
(This article belongs to the Section Optical Sensors)
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17 pages, 15292 KB  
Article
Research on Inter-Satellite Laser Ranging Scale Factor Estimation Methods for Next-Generation Gravity Satellites
by Jian Wang, Defeng Gu, Heng Yin, Xuerong Yang, Chunbo Wei and Zicong An
Remote Sens. 2024, 16(14), 2523; https://doi.org/10.3390/rs16142523 - 10 Jul 2024
Cited by 2 | Viewed by 2094
Abstract
The scale factor serves as a ruler for converting raw phase measurements into physical displacements and significantly impacts the preprocessing of data from the Laser Ranging Interferometer (LRI) in laser ranging systems. In the current GRACE Follow-On (GRACE-FO) mission for low–low tracking gravity [...] Read more.
The scale factor serves as a ruler for converting raw phase measurements into physical displacements and significantly impacts the preprocessing of data from the Laser Ranging Interferometer (LRI) in laser ranging systems. In the current GRACE Follow-On (GRACE-FO) mission for low–low tracking gravity satellites, most of the existing LRI scale factor estimation algorithms heavily rely on cross-calibration between instantaneous/biased ranges from the Ka-Band Ranging Interferometer (KBR) and the LRI. However, due to the nonlinearity of the objective function (which includes terms involving the product of scale and time shifts), the scale factor estimation may absorb errors from timing noise. Moreover, future gravity missions or gravity detection tasks may no longer incorporate KBR ranging instruments. To address these challenges, this paper proposes an energy-based method for scale factor estimation using inter-satellite baseline solutions. Comparative analysis indicates that the proposed method effectively disentangles two parameters in the objective function and can be applied in scenarios where KBR data are unavailable, demonstrating promising prospects for practical application. The experimental results show that when the KBR validation residuals are lower than 0.8 mm, the SYSU LRI1B V01 products exhibit residuals below the payload design accuracy thresholds in the frequency band of 2 mHz to 0.1 Hz. Additionally, the stability of the scale factors obtained from the baseline can reach 10−7. Although this is still below the required precision of better than 10−8 for the laser frequency stability in next-generation gravity satellites, advancements in orbit determination technology and the enhanced stability of GPS receivers offer potential for future precision improvements. Currently, this method appears suitable for roughly extracting the scale factor as a stochastic mean over several months or serving as a backup validation strategy for future missions, but it is not well suited to measure day-to-day variations. Full article
(This article belongs to the Special Issue Next-Generation Gravity Mission)
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11 pages, 1876 KB  
Article
A Fast Evaluation Method for Spatial Point Measurement Accuracy in a Large-Scale Measurement System
by Yusong Liu, Wenbo Guo, Yuanyuan Pang and Bo Zheng
Electronics 2024, 13(13), 2428; https://doi.org/10.3390/electronics13132428 - 21 Jun 2024
Viewed by 1504
Abstract
In the application domain of large-scale high-precision measurement systems, accurately calibrating the precision of point position measurements is a pivotal issue. Traditional calibration methods rely on laser interferometers and high-precision displacement stages, which are not only costly but also challenging to implement in [...] Read more.
In the application domain of large-scale high-precision measurement systems, accurately calibrating the precision of point position measurements is a pivotal issue. Traditional calibration methods rely on laser interferometers and high-precision displacement stages, which are not only costly but also challenging to implement in fixed measurement systems. Addressing this challenge, this study introduces an evaluation method for the spatial point measurement accuracy in large-scale fixed high-precision measurement systems. The models for the relationship between the limit deviation and the maximum deviation of finite measurements were established, as well as the limit deviation and point position measurement accuracy. The spatial point position accuracy of the measurement field was calculated by the measurement errors of a calibration rod. The algorithm was validated using a large-scale measurement platform based on photogrammetric technology. Experimental results demonstrate that the method achieved a point position measurement accuracy calibration better than 0.1 mm within a 20 m measurement range, effectively enhancing the measurement data’s accuracy and reliability. This research optimizes the calibration process for large-scale fixed measurement systems, improves calibration efficiency, and obviates the need for complex equipment to complete the calibration process, which is of considerable importance to the development of high-precision spatial point position measurement technology. Full article
(This article belongs to the Special Issue New Advances in Optical Imaging and Metrology)
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