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Controlled Focused Ion Beam Milling of Composite Solid State Nanopore Arrays for Molecule Sensing
- Péter Fürjes
Various nanoscale fabrication techniques are elaborated to form artificial nanoporous/nanochannel membranes to be applied for biosensing: one of the most prevalent is the micro-electromechanical systems (MEMS) compatible focused ion beam (FIB) millin...