Search Results (18)

In early-warning scenarios for thermal runaway in energy storage batteries, carbon monoxide (CO) may interfere with hydrogen detection and reduce the reliability of signal interpretation. To mitigate CO cross-interference under representative mixed-gas conditions and improve sensing stability, a fiber-optic microelectromechanical systems (MEMS) hydrogen sensor based on a Pd–Cu alloy-sensitive layer was developed. The sensor employs a single-cantilever structure and a reflective Fabry–Pérot (F–P) interferometer for optical readout. Comparative experiments were carried out using sensors coated with pure Pd and Pd–Cu-sensitive layers under pure H₂, CO background interference, and temperature-fluctuation conditions. The Pd–Cu sensor exhibited a good linear response over 0–500 ppm H₂, with a sensitivity of 0.0845 nm/ppm. Under a mixed atmosphere of 200 ppm H₂ and 500 ppm CO, the Pd–Cu sensor measured 198 ppm, whereas the pure Pd sensor measured 176 ppm, corresponding to relative errors of approximately 1% and 12%, respectively. In addition, the Pd–Cu sensor showed faster response/recovery behavior and better output stability after temperature compensation. These results indicate that, under the investigated conditions, the selected Pd–Cu-sensitive layer can effectively reduce CO-induced interference and improve the accuracy and stability of fiber-optic MEMS hydrogen sensing, supporting its feasibility for representative early-warning-related monitoring scenarios in energy storage batteries. Full article

The present work presents an innovative marine sensing robotics device based on piezoelectric cantilever-integrated micro-electro-mechanical systems (MEMSs) modeled on fish lateral lines. The device comprises 12 cantilevers of different shapes and sizes in a cross-shaped configuration, embedded between molybdenum (Mo) electrodes in a piezoelectric thin film (PbTiO₃, GaPO₄). It has the advantage of a directional response due to the unique design of the circular cantilevers. In COMSOL software 5.5, we designed, modeled, and simulated a piezoelectric device based on a comparative study of these piezoelectric materials. Simulations were performed on cantilever microstructures ranging in length from 100 µm to 500 µm. These materials perform best when lead titanate (PbTiO₃) is used. A maximum voltage of 4.9 mV was obtained with the PbTiO₃-material cantilever with a displacement of 37 µm. A laser Doppler vibrometer was used to measure the resonance frequency mode and displacement. Our simulations and experiments were in good agreement. Its performance and compactness allow us to envision its employment in underwater acoustics for monitoring marine cetaceans and ultrasound communications. In conclusion, MEMS piezoelectric transducers can be used as hydrophones to sense underwater acoustic pulses. Full article

Helium is integral in several industries, including nuclear waste management and semiconductors. Thus, developing a sensing method for detecting helium is essential to ensure the proper operation of such facilities. Several approaches can be used for helium detection, including based on the high thermal conductivity of helium, which is several times higher than air. This work utilizes the high thermal conductivity of helium to design and analyze a bimorph MEMS sensor for helium sensing applications. COMSOL Multiphysics software (version 6.2) is used to carry out this investigation. The sensor is constructed from poly-silicon and SiO₂ materials with a trenched cantilever beam configuration. The sensor is electrically heated, and its morphed displacement depends on the surrounding gas’s composition, which decreases in the presence of helium. Several factors were investigated to probe their effect on the sensor’s sensitivity to helium, including the thickness of the poly-silicon layer, the configuration of the trench, and the thickness and location of SiO₂ layer. The simulations showed that the best performance, up to 2 ppm helium detection level, can be achieved with thinner beams and medium trench lengths. Full article

We developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the elements of the sensor and, therefore, can be removed from under the suspended elements of the MEMS structure in an ultrasonic bath. The glass–ceramic MEMS is a cantilever structure equipped with a Pt-based microheater on the end edge with the sensing layer. Screen-printing provides cheap fabrication, robustness, and low power (~120 mW at 450 °C) for the sensing element. Full article

The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was used to identify chemical ingredients in materials with high sensitivity, and external voltage was measured in mV. The maximum voltage generated for the sensor was 39 mV. This range of voltage is suitable for sensing electronic systems. The angle change in a microcantilever in a liquid or gas environment identifies a material’s chemical ingredients. A microcantilever deflects, resulting in varying voltages in the analysis of materials. COMSOL software and equations were used for analytical simulations to determine the optimal design parameters. COMSOL software model development and MEMS design were involved in the analytical simulations. This paper examines an analytical model of the cantilever and discusses the fabrication process. Full article

As a volatile air pollutant, formaldehyde can enter people’s living environment through interior decoration, furniture and paint, causing serious harm to human health. Therefore, it is necessary to develop a sensor for the real-time detection of formaldehyde in low concentrations. According to the chemical interaction between amino groups and formaldehyde, a MIL-101(Cr) aminated-material-based formaldehyde cantilever sensor was prepared, of which ethylenediamine- functionalized MIL-101(Cr) named ED-MIL-101(Cr)) showed the best gas sensing performance. Using quasi-in situ infrared spectroscopy, ED-MIL-101(Cr) was found bound to formaldehyde through a Schiff base. The adsorption enthalpy of formaldehyde-bound ED-MIL-101(Cr) was −52.6 kJ/mol, which corresponds to weak chemical adsorption, so the material showed good selectivity. In addition, ED-MIL-101(Cr) has the most active sites, so its response value to formaldehyde is larger and it takes longer to reach saturation adsorption than bare MIL-101(Cr). Through the research on the gas sensing performance of functionalized MIL-101(Cr) material, we found that it has a strong application potential in the field of formaldehyde monitoring, and the material performance can be quantitatively and accurately evaluated through combining calculation and experimentation for understanding the gas sensing mechanism. Full article

Antenna miniaturization technology has been a challenging problem in the field of antenna design. The demand for antenna miniaturization is even stronger because of the larger size of the antenna in the low-frequency band. In this paper, we consider MEMS magnetoelectric antennas based on mechanical resonance, which sense the magnetic fields of electromagnetic waves through the magnetoelectric (ME) effect at their mechanical resonance frequencies, giving a voltage output. A 70 μm diameter cantilever disk with SiO₂/Cr/Au/AlN/Cr/Au/FeGaB stacked layers is prepared on a 300 μm silicon wafer using the five-masks micromachining process. The MEMS magnetoelectric antenna showed a giant ME coefficient is 2.928 kV/cm/Oe in mechanical resonance at 224.1 kHz. In addition, we demonstrate the ability of this MEMS magnetoelectric antenna to receive low-frequency signals. This MEMS magnetoelectric antenna can provide new ideas for miniaturization of low-frequency wireless communication systems. Meanwhile, it has the potential to detect weak electromagnetic field signals. Full article

Micro-cantilever sensors are a known reliable tool for gas sensing in industrial applications. We have demonstrated the application of cantilever sensors on the detection of a meat freshness volatile biomarker (cadaverine), for determination of meat and fish precise expiration dates. For achieving correct target selectivity, the cantilevers need to be functionalized with a cadaverine-selective binder, based on a cyclam-derivative. Cantilever surface properties such as surface energy strongly influence the binder morphology and material clustering and, therefore, target binding. In this paper, we explore how chemical and physical surface treatments influence cantilever surface, binder morphology/clustering and binding capabilities. Sensor measurements with non-controlled surface properties are presented, followed by investigations on the binder morphology versus surface energy and cadaverine capture. We demonstrated a method for hindering binder crystallization on functionalized surfaces, leading to reproducible target capture. The results show that cantilever surface treatment is a promising method for achieving a high degree of functionalization reproducibility for industrial cantilever sensors, by controlling binder morphology and uniformity. Full article

We propose a new concept of photoacoustic gas sensing based on capacitive transduction which allows full integration while conserving the required characteristics of the sensor. For the sensor’s performance optimization, trial and error method is not feasible due to economic and time constrains. Therefore, we focus on a theoretical optimization of the sensor reinforced by computational methods implemented in a Python programming environment. We present an analytic model to optimize the geometry of a cantilever used as a capacitive transducer in photoacoustic spectroscopy. We describe all the physical parameters which have to be considered for this optimization (photoacoustic force, damping, mechanical susceptibility, capacitive transduction, etc.). These parameters are characterized by opposite trends. They are studied and compared to obtain geometric values for which the signal output and signal-to-noise ratio are maximized. Full article

Photoacoustic (PA) detection of H₂ and NH₃ using plasmonic excitation in Pt- and Pd-decorated GaN piezotransistive microcantilevers were investigated using pulsed 520-nm laser illumination. The sensing performances of 1-nm Pt and Pd nanoparticle (NP) deposited cantilever devices were compared, of which the Pd-coated sensor devices exhibited consistently better sensing performance, with lower limit of detection and superior signal-to-noise ratio (SNR) values, compared to the Pt-coated devices. Among the two functionalization layers, Pd-coated devices were found to respond only to H₂ exposure and not to NH₃, while Pt-coated devices exhibited repeatable response to both H₂ and NH₃ exposures, highlighting the potential of the former in performing selective detection between these reducing gases. Optimization of the device-biasing conditions were found to enhance the detection sensitivity of the sensors. Full article

Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based aerosol mass sensors and reduce gas damping. A finite element fluid-structure interaction model was used to investigate the performance of MCL. It is found that (I) the mass sensitivity and quality factor decline with the increasing of length-to-width ratio which alters the resonant frequency of the MCL. The optimum conditions, including the length-to-width ratio (σ_lw = 5) and resonant frequency (f₀ = 540.7 kHz) of the MCL, are obtained with the constant surface area (S = 45,000 μm²) in the frequency domain ranging from 0 to 600 kHz. (II) The slots can enhance the read-out signal and bring a small Q factor drop. (III) The edge serrations on MCL significantly reduce the gas damping. The results provide a reference for the design of aerosol mass sensor, which makes it possible to develop aerosol mass sensor with high frequency, sensitivity, and quality. Full article

In this work the application of a self-sensing and self-actuating cantilever for gas-flow measurement is investigated. The cantilever placed in the flow is excited permanently at its first resonance mode. Simultaneously the resonance amplitude, the resonance frequency and the static bending of the cantilever are detected. All three sizes are related to the velocity of the gas-flow. Full article

In this work we present the results on the application of additive technology that is aerosol and ink jet technique for the fabrication of high-temperature metal oxide gas sensors. The application of thin (12 μm) alumina membrane, aerosol jet printing of Pt microheater (line width 40–60 μm), printed sensing layer made of nanocristalline tin dioxide based material, laser cutting of the membrane enabled the fabrication of full-printed cantilever-shaped high-temperature sensor with optimal power consumption (~80 mW at 450 °C) applicable in wireless instruments for the detection of combustible and toxic gases including methane. Full article

Measurement of gas density and viscosity was conducted using a micro-cantilever beam. In parallel, the validity of the proposed modeling approach was evaluated. This study also aimed to widen the database of the gases on which the model development of the micro-cantilever beams is based. The density and viscosity of gases are orders of magnitude lower than liquids. For this reason, the use of a very sensitive sensor is essential. In this study, a micro-cantilever beam from the field of atomic force microscopy was used. Although the current cantilever was designed to work with thermal activation, in the current investigation, it was activated with an electromagnetic force. The deflection of the cantilever beam was detected by an integrated piezo-resistive sensor. Six pure gases and sixteen mixtures of them in ambient conditions were investigated. The outcome of the investigation showed that the current cantilever beam had a sensitivity of 240 Hz/(kg/m³), while the accuracy of the determined gas density and viscosity in ambient conditions reached ±1.5% and ±2.0%, respectively. Full article

Preventing unexpected explosive attacks and tracing explosion-related molecules require the development of highly sensitive gas-vapor detection systems. For that purpose, a micromechanical cantilever-based olfactory sensing system including a sample preconcentrator was developed to detect 2,4-dinitrotoluene (2,4-DNT), which is a well-known by-product of the explosive molecule trinitrotoluene (TNT) and exists in concentrations on the order of parts per billion in the atmosphere at room temperature. A peptide receptor (His-Pro-Asn-Phe-Ser-Lys-Tyr-Ile-Leu-His-Gln-Arg) that has high binding affinity for 2,4-DNT was immobilized on the surface of the cantilever sensors to detect 2,4-DNT vapor for highly selective detection. A micro-preconcentrator (µPC) was developed using Tenax-TA adsorbent to produce higher concentrations of 2,4-DNT molecules. The preconcentration was achieved via adsorption and thermal desorption phenomena occurring between target molecules and the adsorbent. The µPC directly integrated with a cantilever sensor and enhanced the sensitivity of the cantilever sensor as a pretreatment tool for the target vapor. The response was rapidly saturated within 5 min and sustained for more than 10 min when the concentrated vapor was introduced. By calculating preconcentration factor values, we verified that the cantilever sensor provides up to an eightfold improvement in sensing performance. Full article