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Keywords = RF–plasma

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15 pages, 728 KB  
Article
Outcomes of Lobar and Sublobar Resection for Clinical Stage I Lung Neuroendocrine Tumors: An ENETS Center of Excellence Experience
by Ranin Hojerat, Islam Idais, Gal Aviel, Anat Bel-Ange, Simona Grozinsky-Glasberg, Simona Ben-Haim, Benjamin Nisman, Ofra Maimon, Karine Atlan, Oz M. Shapira, Amit Korach, Uzi Izhar, Guy Pines and Ori Wald
J. Clin. Med. 2025, 14(22), 7927; https://doi.org/10.3390/jcm14227927 (registering DOI) - 8 Nov 2025
Abstract
Objectives: Lung neuroendocrine tumors (LNETs) are rare, comprising 1–2% of lung cancers. This study aimed to compare overall survival (OS) and recurrence-free survival (RFS) after lobar resection versus sublobar resection for LNETs and to identify factors associated with prognosis and resection extent. Methods: [...] Read more.
Objectives: Lung neuroendocrine tumors (LNETs) are rare, comprising 1–2% of lung cancers. This study aimed to compare overall survival (OS) and recurrence-free survival (RFS) after lobar resection versus sublobar resection for LNETs and to identify factors associated with prognosis and resection extent. Methods: We retrospectively analyzed patients with clinical stage I (T ≤ 4 cm, N0M0) typical or atypical carcinoid who underwent curative resection at Hadassah Medical Center and Kaplan medical Center between 2010 and 2024. Results: Seventy patients (mean age 56.8 ± 16 years; 63% female) were included. Lobar resection was performed in 40 (57%) and sublobar resection in 30 (43%; 15 segmentectomies, 15 wedge resections). Pathology revealed 50 typical carcinoid (71.43%) and 20 atypical carcinoid (28.57%). Final pathological stage was I in 57 patients (81.42%), II in 9 (12.86%), and III in 4 (5.71%), reflecting surgical upstaging in 13 patients (18.57%), all due to nodal involvement. Atypical carcinoid was associated with worse RFS, nodal upstaging, and adjuvant therapy (all p < 0.01). Patients undergoing sublobar resection were older, had higher comorbidity scores, more frequently presented with peripheral tumors, and underwent less frequent lymph node assessment (all p < 0.01). At a median follow-up of 3.8 years for OS and 2.0 years for RFS, survival rates were 95.7% for both. Neither OS, RFS, nor postoperative normalization of plasma pro-gastrin-releasing peptide (ProGRPp) levels differed significantly between lobar resection and sublobar resection (p = 0.94, p = 0.42, and p = 0.205, respectively). Conclusions: Sublobar resection may represent an acceptable surgical option for selected patients with clinical stage I LNETs, particularly for peripheral tumors ≤ 2 cm in older or comorbid patients. The high rate of nodal upstaging underscores the need for lymph node assessment, irrespective of resection extent. Full article
(This article belongs to the Special Issue Latest Advances in Thoracic Surgery: 2nd Edition)
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13 pages, 534 KB  
Article
Comparative Evaluation of Machine Learning Models for Discriminating Honey Geographic Origin Based on Altitude-Dependent Mineral Profiles
by Semra Gürbüz and Şeyda Kıvrak
Appl. Sci. 2025, 15(22), 11859; https://doi.org/10.3390/app152211859 - 7 Nov 2025
Abstract
Authenticating the geographical origin of honey is crucial for ensuring its quality and preventing fraudulent labeling. This study investigates the influence of altitude on the mineral composition of honey and comparatively evaluates the performance of chemometric and machine learning models for its geographic [...] Read more.
Authenticating the geographical origin of honey is crucial for ensuring its quality and preventing fraudulent labeling. This study investigates the influence of altitude on the mineral composition of honey and comparatively evaluates the performance of chemometric and machine learning models for its geographic discrimination. Honey samples from three distinct altitude regions in Türkiye were analyzed for their mineral content using Inductively Coupled Plasma-Mass Spectrometry (ICP-MS). Results revealed that Calcium (Ca), Potassium (K), and Sodium (Na) were the predominant minerals. A significant moderate negative correlation was found between altitude and Ca concentration (r = −0.483), alongside a weak negative correlation with Copper (Cu) (r = −0.371). Among the five supervised models tested (Partial Least Squares-Discriminant Analysis (PLS-DA), Random Forest (RF), Support Vector Machine (SVM), Extreme Gradient Boosting (XGBoost), and Artificial Neural Network (ANN)), PLS-DA achieved the highest classification accuracy (94.9%). Variable importance analysis consistently identified Ca as the most influential discriminator across all models, followed by Barium (Ba) and Cu. These minerals, therefore, represent key markers for differentiating honey by geographical origin. This research demonstrates that an integrated model utilizing mineral profiles provides a robust, practical, and reliable method for the geographical authentication of honey. Full article
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12 pages, 2956 KB  
Article
Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride
by Soheila Mardani, Bjorn Jongebloed, Ward A. P. M. Hendriks, Meindert Dijkstra and Sonia M. Garcia-Blanco
Micromachines 2025, 16(11), 1259; https://doi.org/10.3390/mi16111259 - 6 Nov 2025
Viewed by 147
Abstract
Aluminum nitride (AlN) is a wide-bandgap semiconductor (6.2 eV) with a broad transparency window spanning from the ultraviolet (UV) to the mid-infrared (MIR) wavelength region, making it a promising material for integrated photonics. In this work, AlN thin films using reactive RF sputtering [...] Read more.
Aluminum nitride (AlN) is a wide-bandgap semiconductor (6.2 eV) with a broad transparency window spanning from the ultraviolet (UV) to the mid-infrared (MIR) wavelength region, making it a promising material for integrated photonics. In this work, AlN thin films using reactive RF sputtering are deposited, followed by annealing at 600 °C in a nitrogen atmosphere to reduce slab waveguide propagation losses. After annealing, the measured loss is 0.84 dB/cm at 978 nm, determined using the prism coupling method. A complete microfabrication process flow is then developed for the realization of optical channel waveguides. A key challenge in the processing of AlN is its susceptibility to oxidation when exposed to water or oxygen plasma, which significantly impacts device performance. The process is validated through the fabrication of microring resonators (MRRs), used to characterize the propagation losses of the AlN channel waveguides. The fabricated MRRs exhibit a quality factor of 12,000, corresponding to a propagation loss of 4.4 dB/cm at 1510–1515 nm. The dominant loss mechanisms are identified, and strategies for further process optimization are proposed. Full article
(This article belongs to the Special Issue Recent Advances in Micro/Nanofabrication, 2nd Edition)
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22 pages, 5410 KB  
Article
Diagnostic Biomarker Candidates Proposed Using Targeted Lipid Metabolomics Analysis of the Plasma of Patients with PDAC
by Sung-Sik Han, Sang Myung Woo, Jun Hwa Lee, Joon Hee Kang, Sang-Jae Park, Woo Jin Lee, Hyeong Min Park, Jung Won Chun, Su Jung Kim, Hyun Ju Yoo, Kyung-Hee Kim and Soo-Youl Kim
Cancers 2025, 17(18), 2988; https://doi.org/10.3390/cancers17182988 - 12 Sep 2025
Viewed by 818
Abstract
Background/Objectives: We recently discovered that tumors rely on blood fatty acids as an energy source for growth. Therefore, we investigated biomarkers in the lipid fractions of plasma from patients with pancreatic ductal adenocarcinoma (PDAC) for the screening diagnosis of PDAC. Methods: [...] Read more.
Background/Objectives: We recently discovered that tumors rely on blood fatty acids as an energy source for growth. Therefore, we investigated biomarkers in the lipid fractions of plasma from patients with pancreatic ductal adenocarcinoma (PDAC) for the screening diagnosis of PDAC. Methods: We screened common fatty acid types in human (normal 99, PDAC 103) and mouse (normal 7, KPC 22) plasma samples using a non-targeted approach. Subsequently, we identified targets in human plasma (set A: normal 68, PC 102) that could distinguish between healthy individuals and patients with cancer. Next, we verified whether the identified targets were useful in a new human set (set B: 96 normal, 78 PC). We combined sets A and B to create set C and further divided it into a training set (7:3 ratio; normal 115, pancreatic cancer 126) and a validation set (normal 49, PC 54). The identified targets were used to train three statistical models (logistic regression (LR), random forest (RF), and support vector machine (SVM) with a radial basis function (RBF) kernel). Results: The comparison of human and mouse plasma identified eight common lipid metabolites. We further identified four platforms containing these metabolites for target analysis: acylcarnitines, phospholipids, fatty acid amides, and sphingolipids. We analyzed the four platforms using sets A, B, and C and found 20 lipids (1 acylcarnitine, 1 sphingolipid, and 18 phospholipids) that met the criterion of AUC ≥ 0.75 in all three sets. Based on an average AUC for LR models with 11 or more phospholipids, the separation performance between healthy individuals and patients with cancer was 0.9207 (sensitivity, 90.74%; specificity, 86.22%; PPV, 87.90%; NPV, 89.42%), and the AUC of the validation set for CA19-9 in the same groups was 0.7354. The addition of CA19-9 to the LR models resulted in a separation performance of 0.9427 (90.74%; 88.01%; 89.32%; 89.61%) for the validation set. Conclusions: We identified 18 candidate fatty acid metabolites that could serve as biological markers in the serum lipid fractions of pancreatic cancer patients and confirmed that all of them decreased in patients. Additionally, we developed an algorithm utilizing these markers, which demonstrated a 25% increase in discriminatory power compared to the AUC value of CA19-9, an FDA-approved biomarker for pancreatic cancer. In summary, we identified candidate metabolites and algorithms that could serve as biomarkers in the lipid fractions of plasma from patients with pancreatic cancer. Full article
(This article belongs to the Special Issue Advancements in “Cancer Biomarkers” for 2025–2026)
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13 pages, 3321 KB  
Article
Plasma Controlled Growth Dynamics and Electrical Properties of Ag Nanofilms via RF Magnetron Sputtering
by Jiali Chen, Yanyan Wang, Tianyuan Huang, Peiyu Ji and Xuemei Wu
Coatings 2025, 15(9), 1062; https://doi.org/10.3390/coatings15091062 - 10 Sep 2025
Viewed by 367
Abstract
Silver thin films are widely utilized in plasmonic, electronic, and catalytic devices due to their excellent conductivity, optical properties, and surface activity. However, the nanostructure and performance of Ag films are highly dependent on deposition parameters, particularly during radio-frequency magnetron sputtering (RF-MS). In [...] Read more.
Silver thin films are widely utilized in plasmonic, electronic, and catalytic devices due to their excellent conductivity, optical properties, and surface activity. However, the nanostructure and performance of Ag films are highly dependent on deposition parameters, particularly during radio-frequency magnetron sputtering (RF-MS). In this study, we systematically investigate the effects of RF power, sputtering time, and substrate type on the growth behavior, crystallinity, and electrical conductivity of Ag films. Optical emission spectroscopy (OES) and Langmuir probe diagnostics were employed to analyze the plasma environment, revealing the evolution of electron temperature and plasma density with varying RF powers. Structural characterizations using XRD, SEM, and AFM demonstrate that higher RF power results in reduced grain size, increased film density, and improved crystallinity, while deposition time influences film thickness and grain coalescence. Substrate material also plays a key role, with Cu substrates promoting better crystallinity due to improved lattice matching. Electrical measurements show that denser films with larger grains exhibit lower sheet resistance. These findings provide a comprehensive understanding of the plasma–film interplay and offer strategic insights for optimizing silver nanofilms in high-performance optoelectronic and catalytic systems. Full article
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14 pages, 1741 KB  
Article
Heavy Metal Accumulation in Cattle from Western Pará: Human Health Risk Assessment
by Antonio Humberto Hamad Minervino, Osvaldo Gato Nunes Neto, Fábio Edir Amaral Albuquerque, Kelly Cristiny Gomes da Paixão Albuquerque, Francisco Flávio Vieira de Assis, Rejane Santos Sousa, Raimundo Alves Barrêto Júnior, Marta López-Alonso and Marta Miranda
Toxics 2025, 13(9), 740; https://doi.org/10.3390/toxics13090740 - 31 Aug 2025
Viewed by 1183
Abstract
Western Pará, northern Brazil, is a significant region for mineral exploration, leading to the deposition of potentially toxic elements in soils and water basins. This study evaluated concentrations of mercury (Hg), lead (Pb), cadmium (Cd), and arsenic (As) in cattle muscle tissue from [...] Read more.
Western Pará, northern Brazil, is a significant region for mineral exploration, leading to the deposition of potentially toxic elements in soils and water basins. This study evaluated concentrations of mercury (Hg), lead (Pb), cadmium (Cd), and arsenic (As) in cattle muscle tissue from three municipalities: Oriximiná, Itaituba, and Monte Alegre. Metal concentrations were determined using inductively coupled plasma mass spectrometry (ICP-MS). The estimated daily intake (EDI) of toxic metals via beef consumption (71 g/person/day) was below oral reference doses values (RfDo). Target hazard quotient (THQ) and total THQ (TTHQ) values for all metals were below 1, indicating no significant non-carcinogenic health risk. Monte Alegre exhibited the highest THQ for As and Pb, Oriximiná for Cd, and Itaituba for Hg. Although the overall assessment suggests low risk, elevated Hg concentrations were detected in 10% of the samples, with at least one animal from each municipality exceeding the European Union maximum residue limit (0.01 mg/kg). These findings indicate localized contamination and potential mercury bioaccumulation. Given the rising anthropogenic activities (such as mining and deforestation), continued monitoring of heavy metal levels in animal tissues is recommended to ensure long-term food safety and public health. Full article
(This article belongs to the Special Issue Harmful Outcomes of Environmental and Food Pollutants on Human Health)
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16 pages, 1838 KB  
Article
Nano-Thin Oxide Layers Formed on Hydrogen Plasma Modified Crystalline Si for Advanced Applications
by Sashka Alexandrova, Anna Szekeres and Evgenia Valcheva
Nanomanufacturing 2025, 5(3), 12; https://doi.org/10.3390/nanomanufacturing5030012 - 12 Aug 2025
Viewed by 602
Abstract
Since the early days of silicon manufacturing, hydrogen gas treatment has been used to control the defect concentrations. Its beneficial effect can be enhanced using hydrogen plasma as a source of active atomic hydrogen. Hydrogen plasma modification of c-Si surface can be challenging [...] Read more.
Since the early days of silicon manufacturing, hydrogen gas treatment has been used to control the defect concentrations. Its beneficial effect can be enhanced using hydrogen plasma as a source of active atomic hydrogen. Hydrogen plasma modification of c-Si surface can be challenging because the plasma can induce precursors of defect centers that can persist at the interface and/or grown oxide after subsequent thermal oxidation. In the present study, we investigate nanoscale silicon dioxides with thicknesses in the range of 6–22 nm grown at low temperature (850 °C) in dry oxygen on radio frequency (RF) hydrogen plasma-treated silicon surface. The properties of these oxides are compared to oxides grown following standard Radio Corporation of America (RCA) Si technology. Electroreflectance measurements reveal better interface quality with enhanced electron mobility and lowered oxidation-induced stress levels when the oxides are grown on H-plasma modified c-Si substrates. These results are in good accordance with the reduced defect concentration established from the analysis of the current–voltage (I-V) and multifrequency capacitance–voltage (C-V) characteristics of metal-oxide-semiconductor (MOS) capacitors incorporating the Si-SiO2 structures. The study proves the potential of hydrogen plasma treatment of Si prior to oxidation for various Si-based applications. Full article
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14 pages, 3135 KB  
Article
Selective Gelation Patterning of Solution-Processed Indium Zinc Oxide Films via Photochemical Treatments
by Seullee Lee, Taehui Kim, Ye-Won Lee, Sooyoung Bae, Seungbeen Kim, Min Woo Oh, Doojae Park, Youngjun Yun, Dongwook Kim, Jin-Hyuk Bae and Jaehoon Park
Nanomaterials 2025, 15(15), 1147; https://doi.org/10.3390/nano15151147 - 24 Jul 2025
Viewed by 627
Abstract
This study presents a photoresist-free patterning method for solution-processed indium zinc oxide (IZO) thin films using two photochemical exposure techniques, namely pulsed ultraviolet (UV) light and UV-ozone, and a plasma-based method using oxygen (O2) plasma. Pulsed UV light delivers short, high-intensity [...] Read more.
This study presents a photoresist-free patterning method for solution-processed indium zinc oxide (IZO) thin films using two photochemical exposure techniques, namely pulsed ultraviolet (UV) light and UV-ozone, and a plasma-based method using oxygen (O2) plasma. Pulsed UV light delivers short, high-intensity flashes of light that induce localised photochemical reactions with minimal thermal damage, whereas UV-ozone enables smooth and uniform surface oxidation through continuous low-pressure UV irradiation combined with in situ ozone generation. By contrast, O2 plasma generates ionised oxygen species via radio frequency (RF) discharge, allowing rapid surface activation, although surface damage may occur because of energetic ion bombardment. All three approaches enabled pattern formation without the use of conventional photolithography or chemical developers, and the UV-ozone method produced the most uniform and clearly defined patterns. The patterned IZO films were applied as active layers in bottom-gate top-contact thin-film transistors, all of which exhibited functional operation, with the UV-ozone-patterned devices exhibiting the most favourable electrical performance. This comparative study demonstrates the potential of photochemical and plasma-assisted approaches as eco-friendly and scalable strategies for next-generation IZO patterning in electronic device applications. Full article
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18 pages, 3737 KB  
Article
Simulation-Based RF-ICP Torch Optimization for Efficient and Environmentally Sustainable Radioactive Waste Management
by Roman Stetsiuk, Mustafa A. Aldeeb and Hossam A. Gabbar
Recycling 2025, 10(4), 139; https://doi.org/10.3390/recycling10040139 - 15 Jul 2025
Viewed by 791
Abstract
This study examines methods to improve the energy efficiency of radiofrequency inductively coupled plasma (RF-ICP) torches for radioactive waste treatment, with a focus on surpassing the typical energy efficiency limit of approximately 70%. To improve energy efficiency and plasma performance, this research investigates [...] Read more.
This study examines methods to improve the energy efficiency of radiofrequency inductively coupled plasma (RF-ICP) torches for radioactive waste treatment, with a focus on surpassing the typical energy efficiency limit of approximately 70%. To improve energy efficiency and plasma performance, this research investigates the transition from axial gas flow to vortex gas flow patterns using COMSOL Multiphysics software v6.2. Key plasma parameters, including energy efficiency, number of gas vortices, heat transfer, and temperature distribution, were analyzed to evaluate the improvements. The results indicate that adopting a vortex flow pattern increases energy conversion efficiency, increases heat flux, and reduces charge losses. Furthermore, optimizing the torch body design, particularly the nozzle, chamber volume, and gas entry angle, significantly improves plasma properties and energy efficiency by up to 90%. Improvements to RF-ICP torches positively impact waste decomposition by creating better thermal conditions that support resource recovery and potential material recycling. In addition, these improvements contribute to reducing secondary waste, mitigating environmental risks, and fostering long-term public support for nuclear technology, thereby promoting a more sustainable approach to waste management. Simulation results demonstrate the potential of RF-ICP flares as a cost-effective and sustainable solution for the thermal treatment of low- to intermediate-level radioactive waste. Full article
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27 pages, 10769 KB  
Article
Cold Plasma Treatment Alters the Morphology, Oxidative Stress Response and Specialized Metabolite Content in Yellow Iris (I. reichenbachii) Callus
by Slađana Jevremović, Milica Milutinović, Ksenija Veličković, Uroš Gašić, Nikola Škoro, Nevena Puač and Suzana Živković
Horticulturae 2025, 11(7), 781; https://doi.org/10.3390/horticulturae11070781 - 3 Jul 2025
Cited by 1 | Viewed by 3535
Abstract
The application of non-thermal (cold) plasmas is considered an environmentally friendly method that could affect plant metabolism and cellular development or can be used for the commercial production of natural products that cannot be chemically synthesized. In the present study, the non-embryogenic callus [...] Read more.
The application of non-thermal (cold) plasmas is considered an environmentally friendly method that could affect plant metabolism and cellular development or can be used for the commercial production of natural products that cannot be chemically synthesized. In the present study, the non-embryogenic callus of iris (Iris reichenbachii Heuff.) was treated with a Radio Frequency (RF) plasma needle device using He as a working gas. We investigated short-term (up to seven days) and long-term (up to one year) changes on morphological, physiological and biochemical levels. An increased production of O2 and H2O2 was observed in the callus tissue after plasma treatment. The enzymes SOD and CAT represented the frontline in the antioxidant defense against reactive oxygen species (ROS) produced during the first hour of treatment, while POX was the leading antioxidant enzyme seven days after plasma treatment. Significant long-term morphological changes were observed in the calli due to the increased mitotic activity of the plant cells. In addition, three flavonoids (naringenin, apigenin and acacetin) and two isoflavonoids (irisolidone and irilone) were detected only in the plasma-treated tissue even one year after plasma treatment. The present study emphasizes the application of the plasma technique to promote meristematic activity and stimulate the production of specialized metabolites in iris calli. Full article
(This article belongs to the Special Issue Innovative Micropropagation of Horticultural and Medicinal Plants)
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11 pages, 2422 KB  
Article
Low-Temperature Degradation of Aflatoxins via Oxygen Plasma: Kinetics and Mechanism Driven by Atomic Oxygen Flux
by Nina Recek, Rok Zaplotnik, Gregor Primc, Peter Gselman and Miran Mozetič
Materials 2025, 18(13), 2924; https://doi.org/10.3390/ma18132924 - 20 Jun 2025
Viewed by 778
Abstract
Aflatoxins are toxic organic substances that are synthesized on the surfaces of seeds, nuts, and similar products by some fungi under elevated humidity. They decompose at temperatures well above 130 °C, so standard heating or autoclaving is an obsolete technique for the degradation [...] Read more.
Aflatoxins are toxic organic substances that are synthesized on the surfaces of seeds, nuts, and similar products by some fungi under elevated humidity. They decompose at temperatures well above 130 °C, so standard heating or autoclaving is an obsolete technique for the degradation of toxins on surfaces without significant modification of the treated material. Non-equilibrium plasma was used to degrade aflatoxins at low temperatures and determine the efficiency of O atoms. A commercial mixture of aflatoxins was deposited on smooth substrates, and the solvent was evaporated so that about a 3 nm thick film of dry toxins remained on the substrates. The samples were exposed to low-pressure oxygen plasma sustained by an inductively coupled radiofrequency (RF) discharge in either the E or H mode. The gas pressure was 20 Pa, the forward RF power was between 50 and 700 W, and the O-atom flux was between 1.2 × 1023 and 1.5 × 1024 m−2 s−1. Plasma treatment caused the rapid degradation of aflatoxins, whose concentration was deduced from the fluorescence signal at 455 nm upon excitation with a monochromatic source at 365 nm. The degradation was faster at higher discharge powers, but the degradation curves fitted well when plotted against the dose of O atoms. The experiments showed that the aflatoxin concentration dropped below the detection limit of the fluorescence probe after receiving the O-atom dose of just above 1025 m−2. This dose was achieved within 10 s of treatment in plasma in the H mode, and approximately a minute when plasma was in the E mode. The method provides a low-temperature solution for the efficient detoxification of agricultural products. Full article
(This article belongs to the Special Issue Advances in Plasma Treatment of Materials)
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24 pages, 5461 KB  
Article
Classification and Prediction of Unknown Thermal Barrier Coating Thickness Based on Hybrid Machine Learning and Terahertz Nondestructive Characterization
by Zhou Xu, Jianfei Xu, Yiwen Wu, Changdong Yin, Suqin Chen, Qiang Liu, Xin Ge, Luanfei Wan and Dongdong Ye
Coatings 2025, 15(6), 725; https://doi.org/10.3390/coatings15060725 - 17 Jun 2025
Cited by 1 | Viewed by 975
Abstract
Thickness inspection of thermal barrier coatings is crucial to safeguard the reliability of high-temperature components of aero-engines, but traditional destructive inspection methods are difficult to meet the demand for rapid assessment in the field. In this study, a new non-destructive testing method integrating [...] Read more.
Thickness inspection of thermal barrier coatings is crucial to safeguard the reliability of high-temperature components of aero-engines, but traditional destructive inspection methods are difficult to meet the demand for rapid assessment in the field. In this study, a new non-destructive testing method integrating terahertz time-domain spectroscopy and machine learning algorithms is proposed to systematically study the thickness inspection of 8YSZ coatings prepared by two processes, namely atmospheric plasma spraying (APS) and electron beam physical vapor deposition (EB-PVD). By optimizing the preparation process parameters, 620 sets of specimens with thicknesses of 100–400 μm are prepared, and three types of characteristic parameters, namely, time delay Δt, frequency shift Δf, and energy decay η, are extracted by combining wavelet threshold denoising and time-frequency joint analysis. A CNN-RF cascade model is constructed to realize coating process classification, and an attention-LSTM and SVR weighted fusion model is developed for thickness regression prediction. The results show that the multimodal feature fusion reduces the root-mean-square error of thickness prediction to 8.9 μm, which further improves the accuracy over the single feature model. The classification accuracy reaches 96.8%, of which the feature importance of time delay Δt accounts for 62%. The hierarchical modeling strategy reduces the detection mean absolute error from 6.2 μm to 4.1 μm. the method provides a high-precision solution for intelligent quality assessment of thermal barrier coatings, which is of great significance in promoting the progress of intelligent manufacturing technology for high-end equipment. Full article
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15 pages, 3262 KB  
Article
Optimization of Diamond Polishing Process for Sub-Nanometer Roughness Using Ar/O2/SF6 Plasma
by Lei Zhao, Xiangbing Wang, Minxing Jiang, Chao Zhao, Nan Jiang, Kazhihito Nishimura, Jian Yi and Shuangquan Fang
Materials 2025, 18(11), 2615; https://doi.org/10.3390/ma18112615 - 3 Jun 2025
Viewed by 1085
Abstract
Diamond, known for its exceptional physical and chemical properties, shows great potential in advanced fields such as medicine, semiconductors, and optics. However, reducing surface roughness is critical for enhancing its performance. This study employs inductively coupled plasma (ICP) polishing to etch single-crystal diamond [...] Read more.
Diamond, known for its exceptional physical and chemical properties, shows great potential in advanced fields such as medicine, semiconductors, and optics. However, reducing surface roughness is critical for enhancing its performance. This study employs inductively coupled plasma (ICP) polishing to etch single-crystal diamond and analyzes the impact of different etching parameters on surface roughness using atomic force microscopy (AFM). Using the change in surface roughness before and after etching as the main evaluation metric, the optimal etching parameters were determined: Ar/O2/SF6 gas flow ratio of 40/50/10 sccm, ICP power of 200 W, RF bias power of 40 W, chamber pressure of 20 mTorr, and etching time of 10 min. Results show that increased etching time and SF6 flow rate raise surface roughness; although higher ICP and RF power reduce roughness, they also cause nanostructure formation, affecting surface quality. Lower chamber pressure results in smaller roughness increases, while higher pressure significantly worsens it. Based on the optimized process parameters, the pristine single-crystal diamond was further etched in this study, resulting in a significant reduction of the surface roughness from 2.22 nm to 0.562 nm, representing a 74.7% decrease. These improvements in surface roughness demonstrate the effectiveness of the optimized process, enhancing the diamond’s suitability for high-precision optical applications. Full article
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15 pages, 3590 KB  
Article
Carbon Nanosheets Grown via RF-PECVD on Graphite Films and Thermal Properties of Graphite Film/Aluminum Composites
by Yifu Ma, Jinrui Qian, Ping Zhu, Junyao Ding, Kai Sun, Huasong Gou, Rustam Abirov and Qiang Zhang
Nanomaterials 2025, 15(10), 773; https://doi.org/10.3390/nano15100773 - 21 May 2025
Cited by 1 | Viewed by 777
Abstract
In this study, carbon nanosheets were deposited on the surface of graphite films for surface modification using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The effects of catalyst addition and concentration, growth gas flow rate, and hydrogen plasma pretreatment on the [...] Read more.
In this study, carbon nanosheets were deposited on the surface of graphite films for surface modification using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The effects of catalyst addition and concentration, growth gas flow rate, and hydrogen plasma pretreatment on the size, morphology, and density of the deposited carbon nanosheets were investigated. These factors influence the deposition results by affecting the nucleation and growth processes of the carbon nanosheets, while the growth process affects their size. The surface morphology and distribution of the carbon nanosheets were characterized using scanning electron microscopy (SEM). Graphite film/aluminum composites were prepared using graphite films modified under different process conditions as reinforcements. The composite prepared with graphite films modified without catalysts showed significant improvement in thermal conductivity, achieving an xy-direction thermal conductivity of 705 W/(m·K) and a z-direction thermal conductivity of 14.8 W/(m·K), both of which are higher than those of unmodified graphite film/aluminum composites. X-ray diffraction (XRD) analysis was conducted to identify the phase composition of the resulting composites and confirm the structural integrity of the reinforcement after processing. Full article
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13 pages, 72508 KB  
Article
Fabrication of Anti-Reflective Composite Structures on Inverted Pyramids Using Inductively Coupled Plasma Etching
by Zhiwei Fan, Liang Xu, Biyun Zhou and Tao Chen
Micromachines 2025, 16(5), 503; https://doi.org/10.3390/mi16050503 - 26 Apr 2025
Cited by 1 | Viewed by 1242
Abstract
The anti-reflective properties of silicon surfaces play a pivotal role in determining the light absorption efficiency of various silicon-based optoelectronic devices, with surface micro-nanostructures emerging as a crucial technological approach for achieving enhanced anti-reflection. In this study, inverted pyramid structures were employed as [...] Read more.
The anti-reflective properties of silicon surfaces play a pivotal role in determining the light absorption efficiency of various silicon-based optoelectronic devices, with surface micro-nanostructures emerging as a crucial technological approach for achieving enhanced anti-reflection. In this study, inverted pyramid structures were employed as the micron-scale framework, and micro-nano composite structures were successfully prepared using an inductively coupled plasma (ICP) etching system. This paper, mainly focused on the micro-nano fabrication, investigated the effects of gas flow rate ratio (SF6:O2:C4F8), ICP power, RF power, and etching time on the surface morphology and reflectance of the composite structures. The results demonstrate that the optimal anti-reflective micro-nano composite structure was achieved under the following conditions: SF6 flow rate of 18 sccm, O2 flow rate of 9 sccm, C4F8 flow rate of 4 sccm, ICP power of 300 W, RF power of 5 W, and etching time of 5 min. The average reflectivity of the prepared surface structure was as low as 1.86%. Full article
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