Search Results (48)

Capacitive micromechanical ultrasonic transducers (CMUTs), as microelectromechanical systems (MEMS) devices, have broad application prospects in ultrasonic imaging and sensing. This study investigates the influence of surface acoustic waves (SAWs) using periodically arranged CMUTs as the fundamental unit cells. We first utilize finite element analysis (FEA) to calculate and analyze the band structure and bandgap characteristics of phononic crystals under infinite periodic conditions. Subsequently, for finite periodic structures in practical applications, acoustic transmission spectra were further simulated using FEA to verify the bandgap characteristics of the structure for SAWs. Accordingly, this paper leverages a deep learning framework based on a multilayer perceptron (MLP) architecture to achieve the inverse design and optimization of CMUT geometric parameters, tailored to specific target bandgap requirements. The results demonstrate that this approach can efficiently and accurately determine the optimal structural configurations, offering a robust and novel technical paradigm for the precise control of SAWs using CMUT-based periodic arrays. Full article

Acoustic emission (AE) monitoring in metal additive manufacturing (AM) requires compact sensors capable of high-frequency operation, broad bandwidth, and high sensitivity. However, increasing structural stiffness to achieve high resonance frequencies typically reduces electromechanical sensitivity. This work presents a finite element study of a coupled-resonator capacitive micromachined ultrasonic transducer (CMUT) designed to address this trade-off. The proposed architecture integrates three mechanically coupled silicon membranes with a stepped capacitive cavity that increases capacitance while preserving structural stiffness, enabling enhanced sensitivity without compromising high-frequency operation. COMSOL Multiphysics simulations were used to evaluate modal characteristics and frequency response under DC pre-stressed conditions. Modal coupling produced closely spaced resonances that broadened the effective bandwidth, while the stepped cavity significantly increased voltage output through improved electromechanical coupling. Compared to a single-resonator flat-cavity design, the coupled stepped-cavity configuration demonstrated nearly a threefold enhancement in output voltage while maintaining operation near 100 kHz. Additionally, adjusting the central resonator length enabled controlled frequency tuning for scalable array implementation. These results establish a proof of concept for a high-frequency, high-sensitivity micro-electro-mechanical systems (MEMS) CMUT architecture suitable for distributed AE monitoring in advanced manufacturing environments. Full article

This work presents the design, fabrication, and experimental characterization of microelectromechanical system (MEMS) ultrasonic transducers engineered for multi-frequency operation in photoacoustic imaging (PAI). The proposed devices integrate multiple resonant geometries, including circular diaphragms, floated crosses, anchored cross membranes, and cantilever arrays, within compact footprints to overcome the inherently narrow frequency response of conventional MEMS transducers. All devices were fabricated using the PiezoMUMPs commercial microfabrication process, with finite element simulations guiding modal optimization and laser Doppler vibrometry used for experimental validation in air. The circular diaphragm exhibited a narrowband response with a dominant resonance at 1.69 MHz and a quality factor (Q) of 268, confirming the bandwidth limitations of traditional geometries. In contrast, complex designs such as the floated cross and cantilever arrays achieved significantly broader spectral responses, with resonances spanning from 275 kHz to beyond 7.5 MHz. The cantilever array, with systematically varied arm lengths, achieved the highest modal density through asynchronous activation across the spectrum. Results demonstrate that structurally diverse MEMS devices can overcome the bandwidth constraints of traditional piezoelectric transducers. The integration of heterogeneous MEMS geometries offers a viable approach for broadband sensitivity in PAI, enabling improved spatial resolution and depth selectivity without compromising miniaturization or manufacturability. Full article

Blink monitoring has demonstrated significant application value in fields such as safety assessments, medical monitoring, and intelligent technologies. Traditional eye monitoring methods are limited by restricted adaptability, insufficient comfort, or potential risks. MEMS-based ultrasonic technology, as a non-contact approach, has garnered attention due to its strong environmental adaptability, privacy, and security. However, existing designs require high-sensitivity processing circuits and are incompatible with standard fabrication processes. This work proposes a dual-electrode piezoelectric micro-mechanical ultrasonic transducer (PMUT) design based on aluminum nitride (AlN) piezoelectric thin films, integrated into a glasses device to enable real-time blink activity monitoring. The design successfully identifies blink states through time-of-flight (TOF) pulse-echo technology and dynamic unsupervised learning methods. Fabricated using cost-effective standard multi-user MEMS processes, this device offers distinct merits in terms of wearability comfort, information security, biosafety, and reliability. Full article

This study investigates the effects of post-fabrication annealing on polymer-based capacitive micromachined ultrasonic transducers (polyCMUTs). These devices comprise microscopic diaphragms produced via photolithographic patterning of polymer layers. Critical point drying, required to release the diaphragms, can cause significant plastic deformation, thereby reducing electromechanical coupling. Post-fabrication annealing, carried out in incremental steps up to 190 °C, led to an effective increase in coupling by a factor of 5.4. Atomic Force Microscopy showed that the initial upward deflection of 162.7 nm decreased to 6.2 nm after annealing at 190 °C, while also improving surface uniformity. In parallel, the transducer’s resonance frequency rose from 2.33 MHz (unannealed) to 2.60 MHz, and the input impedance phase angle at resonance increased from −68.1° to −4.3°. Together, these changes indicate a significant improvement in resonator behavior and, consequently, device performance. Thus, post-fabrication annealing is an effective measure to achieve the designed performance while enhancing manufacturing yield, thereby increasing the applicability of polyCMUTs. Full article

Air-coupled ultrasonic detection demands high transmission performance from piezoelectric micromachined ultrasonic transducers (PMUTs). However, existing microelectromechanical system (MEMS)-based PMUTs deliver limited output, which compromises measurement accuracy and constrains further development. This work proposes a novel PMUT design with a cantilevered, boundary-suspended diaphragm that relieves residual stress, relaxes edge constraints, increases the mechanical degrees of freedom, and enables larger vibration amplitudes. Additionally, this work develops an accurate air-coupling model to predict device performance and a streamlined micro-nanofabrication process for device realization. Experimental results show that under a 1 Vpp (−5 Voffset) drive, the device achieves a peak acoustic pressure of 4.004 Pa at 69.3 kHz, measured at 10 cm distance in air, corresponding to a maximum sound pressure level of 106.02 dB (re 2 × 10⁻⁵ Pa). Compared to a traditional PMUT at 98.45 dB, this represents a 7.57 dB improvement and, to our knowledge, the highest reported sound pressure level at 10 cm for a single PMUT operating near 70 kHz under a 1 Vpp excitation. These results validate the significant enhancement in transmission performance achieved by the proposed topological structure, offering a solution to overcome the common bottleneck of insufficient output in PMUTs, and indicate strong potential for broader air-coupled sensing applications. Full article

Microelectromechanical systems (MEMSs) are increasingly used for both industrial and consumer applications. To improve the accuracy and efficiency of MEMS fabrication and to overcome the limitations of conventional contactless positioning systems, this study introduces a novel positioning concept that combines ultrasonic levitation with electromagnetic actuation. Squeeze-film effects generated by high-frequency ultrasonic transducers enable levitation, while fast-response reluctance forces from electromagnets govern the positioning dynamics without requiring bulky mounting frames. The focus of this paper is on proposing a novel double-acting ultrasonic transducer with a Gaussian profile horn, ensuring an approximately uniform vibration distribution and increased levitation force. The double-acting design enables levitation on both surfaces, simplifying the mounting and thermal compensation of the transducer’s expansion while reducing interactions among transducers. A model-based control strategy ensures resonant operation and constant vibration amplitude. Experiments demonstrate levitation forces up to 343 N, with a total levitation height of 25 µm, resulting from two levitation air gaps. Comprehensive performance characterization validates the feasibility of this transducer design for integration into the proposed positioning system. Full article

This paper presents a fully electronic, CMOS-compatible ultrasonic sensing system integrated into a 3D beamforming architecture for advanced automotive applications. The proposed system eliminates mechanical scanning by implementing a dual-path beamforming structure comprising programmable transmit (TX) and receive (RX) paths. The TX beamformer introduces per-element time delays derived from steering angles to control the direction of ultrasonic wave propagation, while the RX beamformer aligns echo signals for spatial focusing. Electrostatic actuation governs the CMOS-compatible ultrasonic transmission mechanism, whereas dynamic modulation under acoustic pressure forms the reception mechanism. The system architecture supports full horizontal and vertical angular coverage, leveraging delay-and-sum processing to achieve electronically steerable beams. The system enables low-power, compact, and high-resolution sensing modules by integrating signal generation, beam control, and delay logic within a CMOS framework. Theoretical modeling demonstrates its capability to support fine spatial resolution and fast response, making it suitable for integration into autonomous vehicle platforms and driver-assistance systems. Full article

Acoustic tweezers, as advanced micro/nano manipulation tools, play a pivotal role in biomedical engineering, microfluidics, and precision manufacturing. However, piezoelectric-based acoustic tweezers face performance limitations due to multi-physical coupling effects during microfabrication. This study proposes a novel approach using injection molding with embedded electronics (IMEs) technology to fabricate piezoelectric micro-ultrasonic transducers with micron-scale precision, addressing the critical issue of acoustic node displacement caused by thermal–mechanical coupling in injection molding—a problem that impairs wave transmission efficiency and operational stability. To optimize the IME process parameters, a hybrid multi-objective optimization framework integrating NSGA-II and MOPSO is developed, aiming to simultaneously minimize acoustic node displacement, volumetric shrinkage, and residual stress distribution. Key process variables—packing pressure (80–120 MPa), melt temperature (230–280 °C), and packing time (15–30 s)—are analyzed via finite element modeling (FEM) and validated through in situ tie bar elongation measurements. The results show a 27.3% reduction in node displacement amplitude and a 19.6% improvement in wave transmission uniformity compared to conventional methods. This methodology enhances acoustic tweezers’ operational stability and provides a generalizable framework for multi-physics optimization in MEMS manufacturing, laying a foundation for next-generation applications in single-cell manipulation, lab-on-a-chip systems, and nanomaterial assembly. Full article

This paper presents an ultrasonic driving and detection system based on a CMUT array using MEMS technology. Among them, the core component CMUT array is composed of 8 × 8 CMUT array elements, and each CMUT array element contains 6 × 6 CMUT units. The collapse voltage of a single CMUT unit obtained through finite element analysis is 95.91 V, and the resonant frequency is 3.16 MHz. The driving section achieves 64-channel synchronous driving, with key parameters including an adjustable excitation signal frequency ranging from 10 kHz to 5.71 MHz, a delay precision of up to 1 ns, and an excitation duration of eight pulse cycles. For the echo reception, a two-stage amplification circuit for high-frequency weak echoes with 32 channels was designed, achieving a gain of 113.72 dB and −3 dB bandwidth of 3.89 MHz. Simultaneously, a 32-channel analog-to-digital conversion based on a self-calibration algorithm was implemented, with a sampling rate of 50 Mbps and a data width of 10 bits. Finally, the experimental results confirm the successful implementation of the driving system’s designed functions, yielding a center frequency of 1.4995 MHz and a relative bandwidth of 127.9%@−6 dB for the CMUT operating in silicone oil. This paper successfully conducted the transmit–receive integrated experiment of the CMUT and applied Butterworth filtering to the echo data, resulting in high-quality ultrasonic echo signals that validate the applicability of the designed CMUT-based system for ultrasonic imaging. Full article

Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by continuously monitoring critical tire parameters, such as pressure and temperature, in real time during vehicle operation. Among these parameters, tire pressure is the most significant, necessitating the use of highly precise, cost-effective, and energy-efficient sensing technologies. With the rapid advancements in micro-electro-mechanical system (MEMS) technology, modern automotive sensing and monitoring systems increasingly rely on MEMS sensors due to their compact size, low cost, and low power consumption. This study presents a novel high-precision capacitive pressure sensor based on a capacitive micromachined ultrasonic transducer (CMUT) structure and a silicon–silicon direct bonding process. The proposed design offers exceptional performance with high accuracy, ultra-low power consumption, and reduced production costs, making it an optimal solution for enhancing the precision and efficiency of TPMS. Leveraging its low power requirements, capacitive sensing technology emerges as a superior choice for energy-efficient systems in the automotive industry. Full article

This study presents a novel, coil-only magnetostrictive ultrasonic detection method that operates effectively without permanent magnets, introducing a simpler alternative to conventional designs. The system configuration is streamlined, consisting of a single meander coil, an excitation source, and a nickel sheet, with both the bias magnetic field and ultrasonic excitation achieved by a composite excitation containing both DC and AC components. This design offers significant advantages, enabling high-frequency Lamb wave generation in nickel sheets for ultrasonic detection while reducing device complexity. Experimental validation demonstrated that an S0-mode Lamb wave at a frequency of 2.625 MHz could be effectively excited in a 0.2 mm nickel sheet using a double-layer meander coil. The experimentally measured wave velocity was 4.9946 m/s, with a deviation of only 0.4985% from the theoretical value, confirming the accuracy of the method. Additionally, this work provides a theoretical basis for future development of flexible MEMS-based magnetostrictive ultrasonic transducers, expanding the potential for miniaturized magnetostrictive patch transducers. Full article

Partial discharge is a fault that occurs at the site of insulation defects within a transformer. Dual instances of partial discharge origination discharging simultaneously embody a more intricate form of discharge, where the interaction between the discharge sources leads to more intricate and unpredictable insulation damage. Conventional piezoelectric transducers are magnetically affixed to the exterior metal tank of transformers. The ultrasonic signals emanating from partial discharge undergo deflection and reverberation upon traversing the windings, insulation paperboards, and the outer shell, resulting in signal attenuation and thus making it difficult to detect such faults. Furthermore, it is challenging to distinguish between simultaneous discharges from dual partial discharge sources and continuous discharges from a single source, often leading to missed detection and repairs of fault points, which increase the maintenance difficulty and cost of power equipment. With the advancement of MEMS (Micro-Electro-Mechanical System) technology, fiber-optic ultrasonic sensors have surfaced as an innovative technique for optically detecting partial discharges. These sensors are distinguished by their minute dimensions, heightened sensitivity, and robust immunity to electromagnetic disturbances. and excellent insulation properties, allowing for internal installation within power equipment for partial discharge monitoring. In this study, we developed an EFPI (Extrinsic Fabry Perot Interferometer) optical fiber ultrasonic sensor that can be installed inside transformers. Based on this sensor array, we also created a partial discharge ultrasonic detection system that estimates the directional information of single and dual partial discharge sources using the received signals from the sensor array. By utilizing the DOA (Direction of Arrival) as a feature recognition parameter, our system can effectively detect both simultaneous discharges from dual partial discharge sources and continuous discharges from a single source within transformer oil tanks, meeting practical application requirements. The detection methodology presented in this paper introduces an original strategy and resolution for pinpointing the types of partial discharges occurring under intricate conditions within power apparatus, effectively distinguishing between discharges from single and dual partial discharge sources. Full article

Ultrasound is widely applied in diverse domains, such as medical imaging, non-destructive evaluation, and acoustic communication. Piezoelectric micromachined ultrasonic transducers (PMUTs) capable of generating and receiving ultrasonic signals at the micrometer level have become a prominent technology in the field of ultrasound. It is important to enrich the models of the PMUTs to meet the varied applications. In this study, a series of PMUT devices featured with various top electrode configurations, square, circular, and doughnut, were designed to assess the influence of shape on the emission efficacy. It was demonstrated that the PMUTs with a circular top electrode were outperformed, which was calculated from the external acoustic pressure produced by the PMUTs operating in the fundamental resonant mode at a specified distance. Furthermore, the superior performance of PMUT arrays were exhibited through computational simulations for the circular top electrode geometries. Conventional microelectromechanical systems (MEMS) techniques were used to fabricate an array of PMUTs based on aluminum nitride (AlN) films. These findings make great contributions for enhancing the signal transmission sensitivity and bandwidth of PMUTs, which have significant potential in non-destructive testing and medical imaging applications. Full article

In this paper, we present a bolt preload monitoring system, including the system architecture and algorithms. We show how Finite Element Method (FEM) simulations aided the design and how we processed signals to achieve experimental validation. The preload is measured using a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) in pulse-echo mode, by detecting the Change in Time-of-Flight (CTOF) of the acoustic wave generated by the PMUT, between no-load and load conditions. We performed FEM simulations to analyze the wave propagation inside the bolt and understand the effect of different configurations and parameters, such as transducer bandwidth, transducer position (head/tip), presence or absence of threads, as well as the frequency of the acoustic waves. In order to couple the PMUT to the bolt, a novel assembly process involving the deposition of an elastomeric acoustic impedance matching layer was developed. We achieved, for the first time with PMUTs, an experimental measure of bolt preload from the CTOF, with a good signal-to-noise ratio. Due to its low cost and small size, this system has great potential for use in the field for continuous monitoring throughout the operative life of the bolt. Full article