Search Results (36)

Piezoelectric materials are fundamental elements in modern science and technology due to their unique ability to convert mechanical and electrical energy bidirectionally. They are widely employed in sensors, actuators, and energy-harvesting systems. In this work, we investigate the behavior of commercial lead zirconate titanate (PZT) sensors under frequency-mode excitation using a combined approach of impedance spectroscopy and optical interferometry. The impedance spectra reveal distinct resonance–antiresonance features that strongly depend on geometry, while interferometric measurements capture dynamic strain fields through fringe displacement analysis. The strongest deformation occurs near the first kilohertz resonance, directly correlated with the impedance phase, enabling the extraction of an effective piezoelectric constant (~40 pC/N). Moving beyond the linear regime, laser-induced excitation demonstrates optically driven activation of piezoelectric modes, with a frequency-dependent response and nonlinear scaling with optical power, characteristic of coupled pyroelectric–piezoelectric effects. These findings introduce a frequency-mode approach that combines impedance spectroscopy and optical interferometry to simultaneously probe electrical and mechanical responses in a single setup, enabling non-contact, frequency-selective sensing without surface modification or complex optical alignment. Although focused on macroscale ceramic PZTs, the non-contact measurement and activation strategies presented here offer scalable tools for informing the design and analysis of piezoelectric behavior in micro- and nanoscale systems. Such frequency-resolved, optical-access approaches are particularly valuable in the development of next-generation nanosensors, MEMS/NEMS devices, and optoelectronic interfaces where direct electrical probing is challenging or invasive. Full article

MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the generated strain, thereby obtaining the targeted acoustic signal’s information, such as its intensity, direction, and distribution. Due to their advantages in miniaturization, low power consumption, high precision, high consistency, high repeatability, high reliability, and ease of integration, MEMS acoustic sensors are widely applied in many areas, such as consumer electronics, industrial perception, military equipment, and health monitoring. Through different sensing mechanisms, they can be used to detect sound energy density, acoustic pressure distribution, and sound wave direction. This article focuses on piezoelectric, piezoresistive, capacitive, and optical MEMS acoustic sensors, showcasing their development in recent years, as well as innovations in their structure, process, and design methods. Then, this review compares the performance of devices with similar working principles. MEMS acoustic sensors have been increasingly widely applied in various fields, including traditional advantage areas such as microphones, stethoscopes, hydrophones, and ultrasound imaging, and cutting-edge fields such as biomedical wearable and implantable devices. Full article

In recent years, civil engineering has increasingly embraced communication tools for automation, with sensors playing a pivotal role, especially in structural health monitoring (SHM). These sensors enable precise data acquisition, measuring parameters like force, displacement, and temperature and transmit data for timely interventions to prevent failures. This approach reduces reliance on manual inspections, offering more accurate outcomes. This review explores various sensor technologies in SHM, such as piezoelectric, fibre optic, force, MEMS devices, GPS, LVDT, electromechanical impedance techniques, Doppler effect, and piezoceramic sensors, focusing on advancements from 2019 to 2024. A bibliometric analysis of 1468 research articles from WOS and Scopus databases shows a significant increase in publications, from 15 in 2019 to 359 in 2023 and 52 in 2024 (and still counting). This analysis identifies emerging trends and applications in smart sensor integration in civil and structural health monitoring, enhancing safety and efficiency in infrastructure management. Full article

This paper presents a comprehensive review of cardiorespiratory auscultation sensing devices (i.e., stethoscopes), which is useful for understanding the theoretical aspects and practical design notes. In this paper, we first introduce the acoustic properties of the heart and lungs, as well as a brief history of stethoscope evolution. Then, we discuss the basic concept of electret condenser microphones (ECMs) and a stethoscope based on them. Then, we discuss the microelectromechanical systems (MEMSs) technology, particularly focusing on piezoelectric transducer sensors. This paper comprehensively reviews sensing technologies for cardiorespiratory auscultation, emphasizing MEMS-based wearable designs in the past decade. To our knowledge, this is the first paper to summarize ECM and MEMS applications for heart and lung sound analysis. Full article

As one of the most promising electronic devices in the post-Moore era, nanoscale vacuum field emission transistors (VFETs) have garnered significant attention due to their unique electron transport mechanism featuring ballistic transport within vacuum channels. Existing research on these nanoscale vacuum channel devices has primarily focused on structural design for logic circuits. Studies exploring their application potential in other vital fields, such as sensors based on VFET, are more limited. In this study, for the first time, the design of a vacuum field emission transistor (VFET) coupled with a piezoelectric microelectromechanical (MEMS) sensing unit is proposed as the artificial mechanoreceptor for sensing purposes. With a negative threshold voltage similar to an N-channel depletion-mode metal oxide silicon field effect transistor, the proposed VFET has its continuous current tuned by the piezoelectric potential generated by the sensing unit, amplifying the magnitude of signals resulting from electromechanical coupling. Simulations have been conducted to validate the feasibility of such a configuration. As indictable from the simulation results, the proposed piezoelectric VFET exhibits high sensitivity and an electrically adjustable measurement range. Compared to the traditional combination of piezoelectric MEMS sensors and solid-state field effect transistors (FETs), the piezoelectric VFET design has a significantly reduced power consumption thanks to its continuous current that is orders of magnitude smaller. These findings reveal the immense potential of piezoelectric VFET in sensing applications, building up the basis for using VFETs for simple, effective, and low-power pre-amplification of piezoelectric MEMS sensors and broadening the application scope of VFET in general. Full article

Polyimides (PIs) have been extensively used in thin film and micro-electromechanical system (MEMS) processes based on their excellent thermal and mechanical stability and high glass transition temperature. This research explores the development of a novel multilayer and multifunctional polymer composite electro-piezomagnetic device that can function as an energy harvester or sensor for current-carrying wires or magnetic field sensing. The devices consist of four layers of composite materials with a polyimide matrix. The composites have various nanoparticles to alter the functionality of each layer. Nanoparticles of Ag were used to increase the electrical conductivity of polyimide and act as electrodes; lead zirconate titanate was used to make the piezoelectric composite layer; and either neodymium iron boron (NdFeB) or Terfenol-D was used to make the magnetic and magnetostrictive composite layer, which was used as the proof mass. A novel all-polymer multifunctional polyimide composite cantilever was developed to operate at low frequencies. This paper compares the performance of the different magnetic masses, shapes, and concentrations, as well as the development of an all-magnetostrictive device to detect voltage or current changes when coupled to the magnetic field from a current-carrying wire. The PI/PZT cantilever with the PI/NdFeB proof mass demonstrated higher voltage output compared to the PI/Terfenol-D proof mass device. However, the magnetostrictive composite film could be operated without a piezoelectric film based on the Villari effect, which consisted of a single PI-Terfenol-D film. The paper illustrates the potential to develop an all-polymer composite MEMS device capable of acting as a magnetic field or current sensor. Full article

This work explores the potential of self-powered MEMS devices for application in the preventive conservation of cultural heritage. The main objective is to evaluate the effectiveness of piezoelectric aluminum nitride MEMS (AlN-MEMS) for monitoring vibrations and to investigate its potential for harvesting energy from vibrations, including those induced by visitors. A preliminary laboratory comparison was conducted between AlN-MEMS and the commercial device Tromino^®. The study was then extended to the Picture Gallery of Ursino Castle, where joint measurements with the two devices were carried out. The analysis focused on identifying natural frequencies and vibrational energy levels by key metrics, including spectral peaks and the Power Spectral Density (PSD). The results indicated that the response of the AlN-MEMS aligned well with the data collected by the commercial device, especially observing high vibrational energy around 100 Hz. Such results validate the potential of AlN-MEMS for effective vibration measurement and for converting kinetic energy into electrical power, thereby eliminating the need for external power sources. Additionally, the vibrational analysis highlighted specific locations, such as the measurement point Cu4, as exhibiting the highest vibrational energy levels. These points could be used for placing MEMS sensors to ensure efficient vibration monitoring and energy harvesting. Full article

An outstanding event related to the understanding of the physics of mechanical sensors occurred and was announced in 1954, exactly seventy years ago. This event was the discovery of the piezoresistive effect, which led to the development of semiconductor strain gauges with a sensitivity much higher than that obtained before in conventional metallic strain gauges. In turn, this motivated the subsequent development of the earliest micromachined silicon devices and the corresponding MEMS devices. The science and technology related to sensors has experienced noteworthy advances in the last decades, but the piezoresistive effect is still the main physical phenomenon behind many mechanical sensors, both commercial and in research models. On this 70th anniversary, this tutorial aims to explain the operating principle, subtypes, input–output characteristics, and limitations of the three main types of mechanical sensor: strain gauges, capacitive sensors, and piezoelectric sensors. These three sensor technologies are also compared with each other, highlighting the main advantages and disadvantages of each one. Full article

With the global market value of sensors on the rise, this paper focuses on the fabrication and testing of a proof-of-concept piezoelectric energy harvester which is able to harvest mechanical energy from the ambient environment and convert it into electrical energy in order to power wireless sensor networks. We focused on obtaining a new device structure based on a comb-type array of piezoelectric MEMS cantilevers (2 × 10) for a resonant frequency in the environmental application domain (a few hundred Hz) and a chip area of only 1 cm². The configuration of the lead-free piezoelectric cantilever consists of a Si substrate, a pair of Ti-Pt electrodes and a sputtered piezoelectric layer of 12% Sc-doped AlN with a thickness of 1000 nm, a dielectric constant of ~13 and e_31,f = 1.3 C/m². At a resonant frequency of 465.2 Hz and an acceleration of 1 g, the maximum value for the collected power was 2.53 µW for an optimal load resistance of 1 MΩ resulting in a power density of 60.2 nW/mm³ for the unpacked device, without taking into account the vibration volume. By increasing the excitation acceleration to 2 g RMS and using LTC3588-1 for the power circuitry we were able to obtain a stabilized output voltage of 1.8 V. Full article

Piezoelectric MEMS devices were fabricated on 200 mm Si wafers using both deposited and layer-transferred PZT films. In both cases, the PZT-based devices showed ferroelectric and piezoelectric properties at the level of current state-of-the-art devices. The wafer-to-wafer piezoelectric layer transfer process that was developed can thus be useful to bypass the thermal budgeting issue associated with the high crystallization temperature of PZT (~700 °C). It allows the integration of PZT capacitors on any kind of layer stack or substrate, for either actuator or sensor applications. Full article

The article presents the design concept of a surface acoustic wave (SAW)-based lab-on-a-chip sensor with multifrequency and multidirectional sensitivity. The conventional SAW sensors use delay lines that suffer from multiple signal losses such as insertion, reflection, transmission losses, etc. Most delay lines are designed to transmit and receive continuous signal at a fixed frequency. Thus, the delay lines are limited to only a few features, like frequency shift and change in wave velocity, during the signal analysis. These facts lead to limited sensitivity and a lack of opportunity to utilize the multi-directional variability of the sensing platform at different frequencies. Motivated by these facts, a guided wave sensing platform that utilizes simultaneous tone burst-based excitation in multiple directions is proposed in this article. The design incorporates a five-count tone burst signal for the omnidirectional actuation. This helps the acquisition of sensitive long part of the coda wave (CW) signals from multiple directions, which is hypothesized to enhance sensitivity through improved signal analysis. In this article, the design methodology and implementation of unique tone burst interdigitated electrodes (TB-IDT) are presented. Sensing using TB-IDT enables accessing multiple frequencies simultaneously. This results in a wider frequency spectrum and allows better scope for the detection of different target analytes. The novel design process utilized guided wave analysis of the substrate, and selective directional focused interdigitated electrodes (F-IDT) were implemented. The article demonstrates computational simulation along with experimental results with validation of multifrequency and multidirectional sensing capability. Full article

Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed–fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co_1-xFe_x)-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron–cobalt–hafnium alloy (Fe_0.5Co_0.5)_0.92Hf_0.08 that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed. Full article

Conversion of ambient energy to usable electrical energy is attracting attention from researchers since providing a maintenance-free power source for the sensors is critical in any IoT (Internet of Things)-based system and in SHM (structural health monitoring). Continuous health monitoring of structures is advantageous since the damage can be identified at inception and the necessary action taken. Sensor technology has advanced significantly, and MEMS (microelectromechanical systems)-based low-power sensors are available for incorporating into large structures. Relevant signal conditioning and transmission modules have also evolved, making them power-efficient and miniaturized. Various micro wireless sensor nodes (WSN) have also been developed in recent years that require very little power. This paper describes the applications of a novel tunable piezoelectric vibration energy harvester (PVEH) for providing autonomous power to low-power MEMS sensors for use in IoT and remote SHM. The novel device uses piezoelectric material and an ionic polymer–metal composite (IPMC) and enables electrical tuning of the resonant frequency using a small portion of the power generated. Full article

Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to big deformations, thus discouraging their use in wearable applications. Another step forward toward minimising the impacts of the sensors can be to avoid the use of cables and connectors by exploiting wireless transmissions at ultra-high frequencies (UHFs). Thin-film bulk acoustic wave resonators (FBARs) represent the most promising choice among all of the piezoelectric microelectromechanical system (MEMS) resonators for the climbing of radio frequencies. Accordingly, the fabrication of FBARs on flexible and wearable substrates represents a strategic step toward obtaining a new generation of highly sensitive wireless sensors. In this work, we propose the design and fabrication of a flexible gravimetric sensor based on an FBAR on a polymeric substrate. The resonator presents one of the highest electromechanical coupling factors in the category of flexible AlN-based FBARs, equal to 6%. Moreover, thanks to the polymeric support layer, the presence of membranes can be avoided, which leads to a faster and cheaper fabrication process and higher robustness of the structure. The mass sensitivity of the device was evaluated, obtaining a promising value of 23.31 ppm/pg. We strongly believe that these results can pave the way to a new class of wearable MEMS sensors that exploit ultra-high-frequency (UHF) transmissions. Full article

Recurrent Neural Networks (RNN) are basically used for applications with time series and sequential data and are currently being used in embedded devices. However, one of their drawbacks is that RNNs have a high computational cost and require the use of a significant amount of memory space. Therefore, computer equipment with a large processing capacity and memory is required. In this article, we experiment with Nonlinear Autoregressive Neural Networks (NARNN), which are a type of RNN, and we use the Discrete Mycorrhizal Optimization Algorithm (DMOA) in the optimization of the NARNN architecture. We used the Mackey-Glass chaotic time series (MG) to test the proposed approach, and very good results were obtained. In addition, some comparisons were made with other methods that used the MG and other types of Neural Networks such as Backpropagation and ANFIS, also obtaining good results. The proposed algorithm can be applied to robots, microsystems, sensors, devices, MEMS, microfluidics, piezoelectricity, motors, biosensors, 3D printing, etc. Full article