Search Results (204)

This article presents a comprehensive modeling and simulation framework for a capacitive MEMS accelerometer integrated with a sigma-delta analog-to-digital converter (ADC), with a focus on applications in wearable health and motion monitoring devices. The accelerometer used in the system is connected to a smartphone equipped with dedicated software and will be used to assess the risk of falling, which is crucial for patients with balance disorders. The authors designed the accelerometer with special attention paid to the specification required in a system, where the acceleration is ±2 g and the frequency is 100 Hz. They investigated the sensor’s behavior in the DC, AC, and time domains, capturing both the mechanical response of the proof mass and the resulting changes in output capacitance due to external acceleration. A key component of the simulation is the implementation of a second-order sigma-delta modulator designed to digitize the small capacitance variations generated by the sensor. The Simulink model includes the complete signal path from analog input to quantization, filtering, decimation, and digital-to-analog reconstruction. By combining MEMS+ modeling with MATLAB-based system-level simulations, the workflow offers a fast and flexible alternative to traditional finite element methods and facilitates early-stage design optimization for MEMS sensor systems intended for real-world deployment. Full article

Unbalanced accelerations occurring during tram travel have a significant impact on passenger comfort and safety, as well as on the rate of wear and tear on infrastructure and rolling stock. Ideally, these dynamic forces should be monitored continuously in real-time; however, traditional systems require high-precision accelerometers and proprietary software—investments often beyond the reach of municipally funded tram operators. To this end, as part of the research project “Accelerometer Measurements in Rail Passenger Transport Vehicles”, pilot measurement campaigns were conducted in Poland on tram lines in Gdańsk, Toruń, Bydgoszcz, and Olsztyn. Off-the-shelf smartphones equipped with MEMS accelerometers and GPS modules, running the Physics Toolbox Sensor Suite Pro app, were used. Although the research employs widely known methods, this paper addresses part of the gap in affordable real-time monitoring by demonstrating that, in the future, equipment equipped solely with consumer-grade MEMS accelerometers can deliver sufficiently accurate data in applications where high precision is not critical. This paper presents an analysis of a subset of results from the Gdańsk tram network. Lateral (x) and vertical (z) accelerations were recorded at three fixed points inside two tram models (Pesa 128NG Jazz Duo and Düwag N8C), while longitudinal accelerations were deliberately omitted at this stage due to their strong dependence on driver behavior. Raw data were exported as CSV files, processed and analyzed in R version 4.2.2, and then mapped spatially using ArcGIS cartograms. Vehicle speed was calculated both via the haversine formula—accounting for Earth’s curvature—and via a Cartesian approximation. Over the ~7 km route, both methods yielded virtually identical results, validating the simpler approach for short distances. Acceleration histograms approximated Gaussian distributions, with most values between 0.05 and 0.15 m/s², and extreme values approaching 1 m/s². The results demonstrate that low-cost mobile devices, after future calibration against certified accelerometers, can provide sufficiently rich data for ride-comfort assessment and show promise for cost-effective condition monitoring of both track and rolling stock. Future work will focus on optimizing the app’s data collection pipeline, refining standard-based analysis algorithms, and validating smartphone measurements against benchmark sensors. Full article

In the field of high-altitude operations, the frequent occurrence of fall accidents is usually closely related to safety measures such as the incorrect use of safety locks and the wrong installation of safety belts. At present, the manual inspection method cannot achieve real-time monitoring of the safety status of the operators and is prone to serious consequences due to human negligence. This paper designs a new type of high-altitude operation safety device based on the STM32F103 microcontroller. This device integrates ultra-wideband (UWB) ranging technology, thin-film piezoresistive stress sensors, Beidou positioning, intelligent voice alarm, and intelligent safety lock. By fusing five modes, it realizes the functions of safety status detection and precise positioning. It can provide precise geographical coordinate positioning and vertical ground distance for the workers, ensuring the safety and standardization of the operation process. This safety device adopts multi-modal fusion high-altitude operation safety monitoring technology. The UWB module adopts a bidirectional ranging algorithm to achieve centimeter-level ranging accuracy. It can accurately determine dangerous heights of 2 m or more even in non-line-of-sight environments. The vertical ranging upper limit can reach 50 m, which can meet the maintenance height requirements of most transmission and distribution line towers. It uses a silicon carbide MEMS piezoresistive sensor innovatively, which is sensitive to stress detection and resistant to high temperatures and radiation. It builds a Beidou and Bluetooth cooperative positioning system, which can achieve centimeter-level positioning accuracy and an identification accuracy rate of over 99%. It can maintain meter-level positioning accuracy of geographical coordinates in complex environments. The development of this safety device can build a comprehensive and intelligent safety protection barrier for workers engaged in high-altitude operations. Full article

This article aims to utilize a microelectromechanical system (MEMS) to modulate coupling behavior of silicon nitride (Si₃N₄) waveguides to perform an optical switch based on a directional coupling (DC) mechanism. There are two states of the switch. First state, a Si₃N₄ wire is initially positioned up suspended in the air. In the second state, this wire will be moved down to be placed between two arms of the DC waveguides, changing the coupling behavior to achieve bar and cross states of the optical switch function. In the future, the MEMS will be used to move this wire down. In this work, we present simulations of the two static states to optimize the DC structure parameters. Based on the simulated results, the device size is 8.8 μm × 55 μm. The insertion loss is calculated to be approximately 0.24 dB and 0.33 dB, the extinction ratio is approximately 24.70 dB and 25.46 dB, and the crosstalk is approximately −24.60 dB and −25.56 dB, respectively. In the C band of optical communication, the insertion loss ranges from 0.18 dB to 0.47 dB. As such, this device will exhibit excellent optical switch performance and provide advantages in many integrated optics-related optical systems applications. Furthermore, it can be used in optical communications, data centers, LiDAR, and so on, enhancing important reference value for such applications. Full article

We present a buffer-pH-modulated electrokinetic concentration strategy in MEMS microchannels that harnesses simple pH shifts to neutralize and charge proteins, reversibly “pausing” them at a planar electric-gate electrode by tuning to their isoelectric point (pI) and mobilizing them with slight pH offsets under an applied field. This synergistic coupling of dynamic pH control and electrode-gated focusing, which requires only buffer composition changes, enables rapid and tunable protein capture and release across diverse channel geometries for lab-on-chip, preparative, and point-of-care diagnostics. Moreover, it dovetails with established MEMS biomedical platforms ranging from diagnostics to drug delivery and microsurgery to gene and cell-manipulation devices. Future work on tailored electrode coatings and optimized channel profiles will further boost selectivity, speed, and integration in sub-100 µm MEMS devices. Full article

This study systematically compares the metrological characteristics of single- exposure, double-exposure, and continuous-exposure holographic interferometry for micro-deformation detection. Results demonstrate that the double-exposure method achieves optimal balance across critical performance metrics through its ideal cosine fringe field modulation. This approach (1) eliminates object wave amplitude interference via dual-exposure superposition, establishing submicron linear mapping between fringe displacement and deformation amplitude; (2) introduces a fringe gradient-based direction detection algorithm resolving deformation vector ambiguity; and (3) implements an error-compensated fusion framework integrating theoretical modeling, MATLAB 2015b simulations, and experimental validation. Experiments on drilled glass samples confirm their superior performance in terms of near-ideal fringe contrast (1.0) and noise suppression (0.06). The technique significantly improves real-time capability and anti-interference robustness in micro-deformation monitoring, providing a validated solution for MEMS and material mechanics characterization. Full article

On-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust operation in electromagnetically noisy environments. This paper focuses on the characterization of an easy-to-fabricate tri-axial fiber-free optical MEMS accelerometer, which employs a simple assembly consisting of a light emitting diode (LED), a quadrant photodetector (QPD), and a suspended proof mass, measuring acceleration through light power modulation. This configuration enables simple readout circuitry without the need for complex digital signal processing (DSP). Performance modeling was conducted to simulate the LED’s irradiance profile and its interaction with the proof mass and QPD. Additionally, experimental tests were performed to measure the device’s mechanical sensitivity and validate the mechanical model. Lateral mechanical sensitivity is obtained with acceptable discrepancy from that obtained from FEA simulations. This work consolidates the performance of the design adapted and demonstrates the accelerometer’s feasibility for practical applications. Full article

In this paper, we explore the use of chip-scale blown glass microbubble structures for MEMS packaging applications. Specifically, we demonstrate the efficacy of this method of packaging for the improvement of the lifetime of a ferrofluid-based magnetoviscous magnetometer. We have previously reported on the novel concept of a ferrofluid based magnetometer in which the viscoelastic response of a ferrofluid interfacial layer on a high frequency shear wave quartz resonator is sensitively monitored as a function of applied magnetic field. The quantification of the magnetic field is accomplished by monitoring the at-resonance admittance characteristics of the ferrofluid-loaded resonator. While the proof-of-concept measurements of the device have been successfully made, under open conditions, the evaporation of the carrier fluid of the ferrofluid continuously changes its viscoelastic properties and compromises the longevity of the magnetometer. To prevent the evaporation of the ferrofluid, here, we seal the ferrofluid on top of the micromachined quartz resonator within a blown glass hemispherical microbubble attached to it using epoxy. The magnetometer design used a bowtie-shaped thin film Metglas (Fe₈₅B₅Si₁₀) magnetic flux concentrator on the resonator chip. A four-times smaller noise equivalent, a magnetic field of 600 nT/√Hz at 0.5 Hz was obtained for the magnetometer using the Metglas flux concentrator. The ferrofluid-based magnetometer is capable of sensing magnetic fields up to a modulation frequency of 40 Hz. Compared with the unsealed ferrofluid device, the lifetime of the glass microbubble integrated chip packaged device improved significantly from only a few hours to over 50 days and continued. Full article

In order to meet the application requirements for high-precision and low-noise accelerometers in micro-vibration measurement and navigation fields, this paper presents the design and testing of an ultra-high-capacitance resolution capacitive readout circuit with attofarad-level precision. First, a differential charge amplifier circuit is employed for the first stage of capacitance detection. To suppress noise interference in the circuit, a frequency-domain modulation technique is utilized to mitigate low-frequency noise. Subsequently, a differential subtraction circuit is implemented to reduce common-mode noise. Additionally, an improved filtering circuit is designed to suppress noise interference in the final stage. The test results indicate that the designed circuit operates at a carrier frequency of 1 MHz, achieving a capacitance resolution of up to 0.103 aF/H${\mathrm{z}}^{1/2}$ and a noise floor of 25.6 $\mathsf{\mu }$g/H${\mathrm{z}}^{1/2}$, thereby meeting the requirements for high-precision and low-noise capacitance detection in MEMS accelerometers. Full article

This study presents a novel dual phase-locked loop two-dimensional synchronized motion modulation (TDSMM-DPLL) system designed to enhance the low-frequency detection capability of magnetoresistive (MR) sensors by effectively mitigating 1/f noise. The TDSMM-DPLL system integrates a comb-driven resonator and a piezoelectric cantilever beam resonator, achieving synchronized magnetic field modulation through a DPLL circuit that adjusts the resonant frequency of the comb-driven resonator to twice that of the cantilever beam resonator. Theoretical analysis and finite element simulations demonstrate a modulation efficiency of 38.98%, which is significantly higher than that of traditional one-dimensional modulation methods. Experimental validation confirms the system’s effectiveness, showing a 3.13-fold reduction in frequency Allan variance, decreasing from 217.32 ppb to 69.46 ppb, indicating substantial noise suppression. These results highlight the TDSMM-DPLL system’s potential to improve the performance of MR sensors in low-frequency applications, making it a promising solution for high-precision magnetic field detection. Full article

Electrostatic actuation is widely employed in microelectromechanical systems (MEMS) due to its distinct advantages. However, it requires high voltage, typically provided by a power supply and a high voltage amplifier, which is limited in gain, especially at high frequencies. Various methods have been proposed to amplify the voltage signal fed into the system by coupling it in series to an LC tank circuit. In this work, we analyze and compare three methods, resonance matching, multi-frequency excitation, and amplitude modulation. We also compare their performance to that of a voltage amplifier. We demonstrate that resonant circuits significantly enhance performance, offering a more effective solution for high-frequency MEMS actuation. Full article

Aging and age-related neurodegenerative disorders are characterized by the dysfunction or loss of brain nicotinic acetylcholine receptors (nAChRs), and these changes may be related to other senescence markers, such as oxidative stress and DNA repair dysfunction. However, the mechanism of nAChR loss in the aging brain and the modification of this process by drugs (e.g., memantine, Mem) are not yet fully understood. To study whether the differences in nAChR expression in the rat brain occur due to aging or oxidative stress and are modulated by Mem, we analyzed nAChR subunits (at RNA and protein levels) and other biomarkers by real-time quantitative polymerase chain reaction (RQ-PCR) and Western blot validation. Twenty-one female Wistar rats were divided into four groups, depending on age, and the oldest group received injections of Mem or water with the use of intragastric catheters. We studied the cerebral grey matter (CGM), subcortical white matter (SCWM), and cerebellum (Ce). Results showed an age-related decrease of α7 nAChR mRNA level in SCWM. The α7 nAChR mRNA loss was accompanied by reduced expression of 8-oxoguanine DNA glycosylase 1 (OGG1) and an increased tumor necrosis factor alpha (TNFα) level. In the water group, we observed a higher level of α7 nAChR protein in the SCWM and Ce. Biomarker levels changed, but to a different extent depending on the brain area. Importantly, the dysfunction in antioxidative status was stopped and even regressed under Mem treatment. After two weeks of treatment, an increase in TP53 protein level and a decrease in 8-oxo-2′deoxyguanosine (8-oxo-2′dG) level were observed. We conclude that Mem administration may be protective against the senescence process by antioxidative mechanisms. Full article

An innovative glass substrate surface technology including integrated micro-electro-mechanical systems (MEMS) is presented as an advanced light modulation, heat control, and energy management system. This smart technology is based on millions of metallic micromirrors per square meter fabricated on the glass surface, which are arranged in arrays and electrostatically actuated. The smart window application exploits an elaborate MEMS glass technology for active daylight steering and energy management in buildings, enabling energy saving, CO₂ emission reduction, a positive health impact, and improved well-being. When light interacts with a glass substrate that has regular, repetitive patterning at the microscopic scale on its surface, these microstructures can cause the diffraction of the transmitted light, resulting in the potential deterioration of the view quality through the smart glass. A reduction in optical artifacts for improved clear view is presented by using irregular geometric micromirror apertures. Several non-periodic, irregular micromirror aperture designs are compared with corresponding periodic regular designs. For each considered aperture geometry, the irregular array reveals a reduction in optical artifacts and, therefore, by far a clearer view than the corresponding regular array. A systematic and comprehensive study was conducted through design, simulation, technological fabrication, experimental characterization, and analysis. Full article

This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter arrays is provided. The main focus of this paper is MEMS micromirror arrays for smart glass in building windows and façades. This technology utilizes millions of miniaturized and actuatable micromirrors on transparent substrates, enabling use with transmissive substrates such as smart windows for personalized daylight steering, energy saving, and heat management in buildings. For the first time, subfield-addressable MEMS micromirror arrays with an area of nearly 1 m² are presented. The recent advancements in MEMS smart glass technology for daylight steering are discussed, focusing on aspects like the switching speed, scalability, transmission, lifetime study, and reliability of micromirror arrays. Finally, simulations demonstrating the potential yearly energy savings for investments in MEMS smart glazing are presented, including a comparison to traditional automated external blind systems in a model office room with definite user interactions throughout the year. Additionally, this platform technology with planarized MEMS elements can be used for laser safety goggles to shield pilots, tram, and bus drivers as well as security personal from laser threats, and is also presented in this paper. Full article

High-precision, low-power MEMS accelerometers are extensively utilized across civilian applications. Closed-loop accelerometers employing switched-capacitor (SC) circuit topologies offer notable advantages, including low power consumption, high signal-to-noise ratio (SNR), and excellent linearity. Addressing the critical demand for high-precision, low-power MEMS accelerometers in modern geophones, this work focuses on the design and implementation of closed-loop interface ASICs (Application-Specific Integrated Circuits). The proposed interface circuit, based on switched-capacitor modulation technology, incorporates a low-noise charge amplifier, sample-and-hold circuit, integrator, and clock divider circuit. To minimize average power consumption, a switched operational amplifier (op-amp) technique is adopted, which temporarily disconnects idle op-amps from the power supply. Additionally, a class-AB output stage is employed to enhance the dynamic range of the circuit. The design was realized using a standard 0.35 μm CMOS process, culminating in the completion of layout design and small-scale engineering fabrication. The performance of the MEMS accelerometers was evaluated under a 3.3 V power supply, achieving a power consumption of 3.3 mW, an accelerometer noise density below 1 μg/√Hz, a sensitivity of 1.65 V/g, a measurement range of ±1 g, a nonlinearity of 0.15%, a bandwidth of 300 Hz, and a bias stability of approximately 36 μg. These results demonstrate the efficacy of the proposed design in meeting the stringent requirements of high-precision MEMS accelerometer applications. Full article