Chip-Based MEMS Platforms—2nd Edition
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: 30 September 2026 | Viewed by 1821
Special Issue Editor
Interests: bio-chemical MEMS sensors; gas sensors; chemical sensors; resonant microcantilever; integrated micro-hotplates; MEMS manufacturing techniques; sensing materials; low power sensors
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Special Issue Information
Dear Colleagues,
In order to meet the requirements of the Internet of Things (IoT), point-of-care detection (POCT), wearable electronic devices and other applications, it is urgent to develop micro sensors with low power consumption, high sensitivity, high integration, and high consistency. Emerging MEMS chip technology provides an ideal platform for the development of next-generation sensors.
This special issue of Sensors is dedicated to the latest research in the chip-based MEMS platforms. MEMS chips play a vital role in constructing low-power sensors, integrated smart sensors, consumer electronic devices, and biomedical sensors. Nowadays, the design, fabrication, and application of MEMS chips are popular research topics in the field of chip-based MEMS platforms. Recently, MEMS chips have also been successfully used to explore advanced materials and other emerging areas, such as in situ TEM and MEMS-based scientific instrumentation. In this special issue, we present the latest advances in the research field of chip-based MEMS, including the simulation, design, fabrication, and measurement of MEMS chips, as well as new applications for these chips.
Potential topics include but are not limited to the following:
- Design and Fabrication for MEMS chips
- Lab on a chip
- Physical & biochemical Sensors
- Power MEMS
- Emerging Technologies with MEMS chips.
Prof. Dr. Pengcheng Xu
Guest Editor
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Keywords
- MEMS chips
- integrated chips
- gas sensors
- biochemical sensors
- microfluidics
- internet of things
- point-of-care detection
- wearable electronics
- consumer electronics
- low power consumption
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Related Special Issue
- Chip-Based MEMS Platforms in Sensors (8 articles)
