Advances in Microelectromechanical Systems (MEMS) and Asymmetry/Symmetry

A special issue of Symmetry (ISSN 2073-8994). This special issue belongs to the section "Engineering and Materials".

Deadline for manuscript submissions: 30 June 2026 | Viewed by 1745

Special Issue Editors


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Guest Editor
Department of Physics, University of Science and Technology Beijing, Beijing 100083, China
Interests: microelectromechanical system (MEMS) devices; electric field sensors; magnetic field sensors; resonators

E-Mail Website
Guest Editor
Department of Physics, University of Science and Technology Beijing, Beijing 100083, China
Interests: flexible electronic materials; wearable devices; electrospinning; synchrotron radiation structure refinement; sensors
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
Department of Physics, University of Science and Technology Beijing, Beijing 100083, China
Interests: microelectromechanical system (MEMS) devices; sensors; actuators; magnetic field sensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

The rapid evolution of microelectromechanical systems (MEMS) has driven remarkable technological breakthroughs, thereby enabling compact, high-performance devices for diverse applications. Central to these advancements are the design and analysis of components where symmetry and asymmetry play significant roles. Symmetry, defined by proportional balance, is a key feature in both natural systems and engineered designs, while intentional asymmetry can unlock innovative functionalities and enhance performance in MEMS.

This Special Issue, titled "Advances in Microelectromechanical Systems (MEMS) and Asymmetry/Symmetry," seeks to explore how symmetric and asymmetric properties shape the development of MEMS systems and circuits. We invite researchers and engineers to submit original research, reviews, or case studies addressing challenges and innovations in this domain. Topics may include symmetric design strategies, asymmetric component optimization, fabrication techniques, or applications in sensors, actuators, and beyond.

We look forward to receiving your contributions.

Dr. Xiaolong Wen
Dr. Yuting Wang
Prof. Dr. Jianhua Li
Guest Editors

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Keywords

  • microelectromechanical system (MEMS)
  • symmetry/asymmetry
  • microfabrication
  • coupled resonators
  • sensors
  • actuators
  • vibration mechanics
  • dynamics
  • microfluids
  • PMUT
  • accelerometer
  • electric field sensor
  • thermometer
  • mass sensor
  • quantum dots
  • phonon–photon interaction
  • internal resonance
  • biosensor
  • energy harvester
  • microphone

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Published Papers (2 papers)

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Research

9 pages, 1297 KB  
Article
Online SF6 Gas Monitoring Sensing System Based on Lithium Niobate Tuning Fork in Impedance Mode
by Chunlin Song, Huanghe Zhu, Yiwei Liu, Yue Chen, Huaixi Chen, Jiaying Chen, Xiaoli Lin, Yanjin Lu, Xianzeng Zhang, Xinkai Feng and Haizhou Huang
Symmetry 2026, 18(3), 528; https://doi.org/10.3390/sym18030528 - 19 Mar 2026
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Abstract
In this work, we present a novel online acoustic sulfur hexafluoride (SF6) monitoring system utilizing a miniaturized lithium niobate tuning fork (LNTF) sensor. The proposed system demonstrates enhanced stability and a broadband vibration–frequency response. The LNTF exhibits a fundamental resonance frequency [...] Read more.
In this work, we present a novel online acoustic sulfur hexafluoride (SF6) monitoring system utilizing a miniaturized lithium niobate tuning fork (LNTF) sensor. The proposed system demonstrates enhanced stability and a broadband vibration–frequency response. The LNTF exhibits a fundamental resonance frequency of 32,901 Hz, and its quality factor (Q-factor) decreases from 19,700 to 18,300 as the SF6 concentration increases at atmospheric pressure. Verification experiments at room temperature reveal a quantifiable correlation between the SF6/N2 mixture concentration ratio and the sensor’s mechanical impedance. Specifically, an impedance shift of 100 Ω corresponds to a concentration change of 0.0145 g/L. In air, with a signal integration time of 80 s, the measured noise voltage and current are 0.13 µV and 0.18 pA, respectively. These results underscore the potential of the LNTF as a compact, high-stability sensing platform for greenhouse gas monitoring in electrical infrastructure and industrial environments. Full article
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15 pages, 3646 KB  
Article
Research on the Frequency Modulation Micro-Electro-Mechanical System Electric Field Sensor
by Ying Zhang, Shourong Nie, Huixian Li, Boyixiao Pang, Weiyang Li, Xun Sun and Xiaolong Wen
Symmetry 2026, 18(2), 270; https://doi.org/10.3390/sym18020270 - 31 Jan 2026
Viewed by 863
Abstract
High-sensitivity, high-resolution electric field sensors (EFS) find extensive applications across multiple domains, including atmospheric monitoring, aerospace, power grid management, and industrial automation. While conventional electric field measurement techniques suffer from integration challenges and high-power consumption, micro-electromechanical systems (MEMS)-based EFS offer distinct advantages through [...] Read more.
High-sensitivity, high-resolution electric field sensors (EFS) find extensive applications across multiple domains, including atmospheric monitoring, aerospace, power grid management, and industrial automation. While conventional electric field measurement techniques suffer from integration challenges and high-power consumption, micro-electromechanical systems (MEMS)-based EFS offer distinct advantages through miniaturization, integration capability, and functional intelligence. This research incorporates frequency modulation technology into MEMS EFS, leveraging its inherent noise immunity, long-range transmission capacity, and compatibility with digital systems to enhance measurement precision. The sensor’s lateral and axial symmetry configurations are systematically investigated to reveal how asymmetric stiffness perturbations (negatives vs. positives) optimize performance, aligning with symmetry principles in MEMS design. Experimental results demonstrate that the lateral configuration achieves optimal performance with a sensitivity of 0.091√Hz/(kV/m) and a resolution of 1.01 kV/m, whereas the axial configuration yields an average sensitivity of 0.038 √Hz/(kV/m) with a corresponding resolution of 2.37 kV/m. The measurement range of the sensor is from −193.4 kV/m to 193.4 kV/m. Full article
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