MEMS Resonators and Sensors
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: 21 March 2026 | Viewed by 42
Special Issue Editors
Interests: MEMS modelling; MEMS dynamics; parameter uncertainty in vibrating structures; random vibration
Special Issue Information
Dear Colleagues,
Microelectromechanical systems (MEMS) are a rapidly growing technology, with a wide range of applicability in various sectors such as the automotive and aerospace industries. The market for MEMS resonators in particular is largely driven by increasing demands for miniature, energy-efficient oscillators in applications such as frequency referencing, filters, and resonant sensors. MEMS sensors encompass a wide range of disciplines, with MEMS technology enabling the detection of displacements, pressure, temperature, among others. However, the maturity of many MEMS sensors and components poses challenges to achieving further performance improvements, requiring advances in the study of MEMS dynamics, design, fabrication, and operation.
This Special Issue aims to highlight research advances in the various aspects of MEMS resonators and sensors, such as dynamic analysis, design, and operation. Of particular interest are the impact and exploitation of approaches to enhance performance beyond the current state-of-the-art or the development of novel devices. Specifically, investigations involving any combinations of theoretical (mathematical modelling), computational, and experimental studies are highly welcome. Accepted papers will focus on a range of disciplines and applications of MEMS resonators and sensors, generally falling into one or more of the following themes: (1) MEMS resonator and sensor designs, (2) applications, (3) operation methods, (4) modelling methods, and (5) analysis of dynamics and control. This Special Issue is aimed to be of interest to MEMS researchers and practitioners actively engaged in enhancing MEMS resonator and sensor performance.
Dr. Stewart McWilliam
Guest Editor
Dr. Davin Arifin
Guest Editor Assistant
Manuscript Submission Information
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Keywords
- MEMS resonators
- structural vibrations
- dynamics
- inertial sensors
- actuators
- frequency referencing
- nonlinear oscillators
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