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Cantilever Sensors for Industrial Applications: 2nd Edition

This special issue belongs to the section "Physical Sensors".

Special Issue Information

Keywords

  • MEMS/NEMS
  • micro-/nanomachining
  • semiconductor cantilevers
  • polymer cantilevers
  • piezoelectric cantilevers
  • self-exciting cantilevers
  • self-sensing cantilevers
  • 3D vertical cantilevers
  • cantilever arrays
  • contact resonance spectroscopy
  • environmental sensors
  • biochemical/medical sensors
  • scanning probe microscopy
  • tactile surface metrology

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Published Papers

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Sensors - ISSN 1424-8220