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MEMS-Based Sensors: Technology and Applications

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (20 November 2023) | Viewed by 3061

Special Issue Editors

StethX Microsystems, Inc. Atlanta, GA 30308, USA
Interests: MEMS inertial sensors; wearable sensors; micro/nano-fabrication; sensor interface
Associate Professor, Department Automation and Measurement, Ocean University of China, Qingdao, China
Interests: control systems; MEMS
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

For decades, MEMS sensors have been widely used in consumer and automotive electronics such as smart phones and car stability control systems due to their small size and low cost. In recent years, significant progress has been made in advancing the performance of MEMS-based sensors and extending their usage to more demanding applications. For example, MEMS inertial sensors with low noise and drift have been widely researched for autonomous vehicles and inertial navigation applications, high-sensitivity MEMS pressure sensors and acoustic sensors have shown great potentials in biomedical applications, and robust high-dynamic-range MEMS sensors have attracted a lot of attention for industrial and defense applications.

This Special Issue therefore aims to publish the latest advancements in MEMS sensor technologies and their novel applications. The topics shall cover recent improvements in MEMS sensors based on novel device designs, sensing mechanisms, material and fabrication technologies, interface architectures, and packaging techniques, as well as investigations on emerging applications of MEMS sensors including, but not limited to, system implementation, performance characterization, and feasibility evaluation. Both original research contributions and review articles discussing the latest progresses in the MEMS sensor field are welcome.

Dr. Haoran Wen
Dr. Chong Li
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS inertial sensors
  • MEMS environment sensors
  • MEMS resonators
  • micro/nano-fabrication technologies
  • MEMS interface architectures
  • MEMS sensor packaging
  • inertial navigation applications
  • biomedical applications
  • IoT applications

Published Papers (2 papers)

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Research

28 pages, 3459 KiB  
Article
Numerical Approaches for Recovering the Deformable Membrane Profile of Electrostatic Microdevices for Biomedical Applications
by Mario Versaci and Francesco Carlo Morabito
Sensors 2023, 23(3), 1688; https://doi.org/10.3390/s23031688 - 03 Feb 2023
Cited by 3 | Viewed by 1251
Abstract
Recently, a circular symmetrical nonlinear stationary 2D differential model for biomedical micropumps, where the amplitude of the electrostatic field is locally proportional to the curvature of the membrane, was studied in detail. Starting from this, in this work, we first introduce a positive [...] Read more.
Recently, a circular symmetrical nonlinear stationary 2D differential model for biomedical micropumps, where the amplitude of the electrostatic field is locally proportional to the curvature of the membrane, was studied in detail. Starting from this, in this work, we first introduce a positive and limited function to model the dielectric properties of the material constituting the membrane according to experimental evidence which highlights that electrostatic capacitance variation occurs when the membrane deforms. Therefore, we present and discuss algebraic conditions of existence, uniqueness, and stability, even with the fringing field formulated according to the Pelesko–Driskoll theory, which is known to take these effects into account with terms characterized by reduced computational loads. These conditions, using “gold standard” numerical approaches, allow the optimal numerical recovery of the membrane profile to be achieved under different load conditions and also provide an important criterion for choosing the intended use of the device starting from the choice of the material constituting the membrane and vice versa. Finally, important insights are discussed regarding the pull-in voltage and electrostatic pressure. Full article
(This article belongs to the Special Issue MEMS-Based Sensors: Technology and Applications)
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20 pages, 6759 KiB  
Article
Submillimeter Sized 2D Electrothermal Optical Fiber Scanner
by Mandeep Kaur and Carlo Menon
Sensors 2023, 23(1), 404; https://doi.org/10.3390/s23010404 - 30 Dec 2022
Cited by 4 | Viewed by 1163
Abstract
Optical scanners are used frequently in medical imaging units to examine and diagnose cancers, assist with surgeries, and detect lesions and malignancies. The continuous growth in optics along with the use of optical fibers enables fabrication of imaging devices as small as a [...] Read more.
Optical scanners are used frequently in medical imaging units to examine and diagnose cancers, assist with surgeries, and detect lesions and malignancies. The continuous growth in optics along with the use of optical fibers enables fabrication of imaging devices as small as a few millimeters in diameter. Most forward viewing endoscopic scanners contain an optical fiber acting as cantilever which is vibrated at resonance. In many cases, more than one actuating element is used to vibrate the optical fiber in two directions giving a 2D scan. In this paper, it is proposed to excite the cantilever fiber using a single actuator and scan a 2D region from its vibrating tip. An electrothermal actuator is optimized to provide a bidirectional (horizontal and vertical) displacement to the cantilever fiber placed on it. A periodic current, having a frequency equal to the resonant frequency of cantilever fiber, was passed through the actuator. The continuous expansion and contraction of the actuator enabled the free end of fiber to vibrate in a circle like pattern. A small change in the actuation frequency permitted the scanning of the area inside the circle. Full article
(This article belongs to the Special Issue MEMS-Based Sensors: Technology and Applications)
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