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Plasmochemical Processes and Their Technological Applications

This special issue belongs to the section "Materials Processes".

Special Issue Information

Keywords

  • plasma etching
  • plasma deposition
  • plasma surface modification
  • plasma and microelectronics
  • plasma chemical synthesis
  • plasma in medical technology
  • plasma processing of materials
  • plasma in industry
  • diamond film growth
  • superconducting film growth

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Published Papers

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Processes - ISSN 2227-9717