Research Progress and Key Applications of MEMS/MOEMS-Based Actuators
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: 28 February 2026 | Viewed by 16
Special Issue Editors
Interests: MEMS actuators; piezoelectric; electromagnetic; deformable mirrors; scanning mirrors
Special Issue Information
Dear Colleagues,
MEMS/MOEMS-based actuators incorporate miniaturized mechanical components for precise motion control. This Special Issue invites contributions from relevant fields that focus on, but are not limited to, the following:
- Material Innovations: Novel piezoelectric materials such as AlN, scandium-doped aluminum nitride (ScAlN), and PZT thin films, with their excellent electromechanical coupling performance and suitability for miniaturization, have become the core driving materials for MEMS actuators.
- Structural Design: Generative AI has transformed traditional MEMS actuator design workflows through automated topology generation and multi-objective optimization.
- Actuation Mechanisms: PiezoMEMS devices, especially those using AlN and PZT, are replacing traditional capacitive drives in high-precision, low-power applications; electromagnetic actuators with integrated microcoils enable large deflections in compact designs; electrothermal actuators using shape memory alloys (SMAs) allow for low-voltage operations; and combining multiple actuation principles enhances performance.
- Fabrication and Integration Technologies: The transition to 300 mm wafer fabrication promises cost reductions and improved scalability for MEMS actuators, enabling heterogeneous integration with CMOS electronics to support advanced systems. Meanwhile, 3D printing facilitates the creation of complex, multi-material structures, expanding design flexibility.
- Key Applications: Healthcare (implantable devices, minimally invasive surgery); optical and communication systems (LiDAR and optical scanning, RF switches); and consumer electronics (AR/VR, wearables).
Dr. Weimin Wang
Dr. Fangrong Hu
Guest Editors
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Keywords
- MEMS actuator mechanisms: electrostatic
- electromagnetic
- electrothermal
- piezoelectric, etc. MEMS actuator material: AlN
- PZT
- SMA
- FPC
- FR4
- NiFe
- steel
- polymer, etc. MEMS actuator fabrication: surface micromachining process
- bulk micromachining process
- LIGA
- CMOS-MEMS
- 3D printing
- printing circuit board manufacturing technology, etc. MEMS actuator applications: LiDAR
- AR/VR
- wearables
- RF switches
- OCT
- projection display, etc.
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