Thin Film Deposition and Characterization in Micro- and Nano-Technology
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".
Deadline for manuscript submissions: 31 December 2025 | Viewed by 45
Special Issue Editor
Interests: synchrotron radiation and neutron beam applications; thin films; magnetism
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Thin film deposition is one of the most important processes in micromachining device fabrication, either before or after lithography. These processes include CVD, PVD, spin coating, electroplating, and other coating methods. The structure and quality of the thin film determines the success of these properties in micromachining device application. For example, the nanoscale defect density significantly affects electron transport and optical phenomena in nanoscale devices. In the film deposition, different thin film growth modes can result in more dislocations and grain boundaries, resulting in mechanical failure in the micromachining device. For optical applications, the efficiency of photonic crystal light transport or microwave transport also depends on the pattern perfection of thin film growth. Furthermore, in an electrochemical cell, ion transport depends on the porosity of the morphology and the roughness of the heterojunction. Material characterization needs to be informed by depth profile information. In addition, lateral nanoscale thin film growth is differs entirely from micro-scale thin film. Thin film materials in micromachining devices use nano-probes or nano-focus beams to probe with high-resolution lateral spatial resolution, involving non-conventional material characterization methods such as high-resolution SEM/TEM, nano-focus X-ray, and Raman scatting.
Prof. Dr. Chih-Hao Lee
Guest Editor
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.
Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- thin film deposition
- thin film characterization
- nanoprobe
- nanotechnology
Benefits of Publishing in a Special Issue
- Ease of navigation: Grouping papers by topic helps scholars navigate broad scope journals more efficiently.
- Greater discoverability: Special Issues support the reach and impact of scientific research. Articles in Special Issues are more discoverable and cited more frequently.
- Expansion of research network: Special Issues facilitate connections among authors, fostering scientific collaborations.
- External promotion: Articles in Special Issues are often promoted through the journal's social media, increasing their visibility.
- e-Book format: Special Issues with more than 10 articles can be published as dedicated e-books, ensuring wide and rapid dissemination.
Further information on MDPI's Special Issue policies can be found here.
