Cutting-Edge Developments in Materials and Devices for Micro-Electro-Mechanical Systems (MEMS)
A special issue of Materials (ISSN 1996-1944). This special issue belongs to the section "Electronic Materials".
Deadline for manuscript submissions: 10 May 2026 | Viewed by 46
Special Issue Editor
Special Issue Information
Dear Colleagues,
We invite you to contribute research on advanced materials and devices for micro-electromechanical systems (MEMS)—a dynamic field merging microfabrication, materials science, and engineering. These miniaturized systems, integrating mechanical and electrical components, enable precise microscale sensing, actuation, and control. Their versatility drives use in electronics, healthcare, aerospace, automotive, and environmental monitoring.
Materials innovation (e.g., piezoelectric films, flexible polymers) and device design breakthroughs (resonant, bio-integrated, energy-harvesting MEMS) advance capabilities, though challenges like harsh environment reliability, CMOS integration, and cost-effective fabrication persist.
We are pleased to invite you to contribute research to this Special Issue of Materials, entitled “Cutting-Edge Developments in Materials and Devices for Micro-Electro-Mechanical Systems (MEMS)”. We welcome submissions on novel materials (piezoelectric, ferroelectric), innovative architectures (RF MEMS, bioMEMS), fabrication advances, and application-focused optimization.
Your contributions will deepen MEMS and its role in global solutions. We look forward to receiving your work.
Dr. Kun Zhu
Guest Editor
Manuscript Submission Information
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Keywords
- advanced materials
- devices
- micro-nano manufacturing
- MEMS
- ferroelectricity
- piezoelectricity
- bio-integration
- sensing
- micro energy harvesting
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