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Actuators
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Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS
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Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS

A special issue of Actuators (ISSN 2076-0825).

Deadline for manuscript submissions: closed (15 February 2019) | Viewed by 36796

Special Issue Editors

Prof. Dr. Stefano Lenci

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Guest Editor
Dipartimento di Ingegneria Civile, Edile e Architettura, Università Politecnica delle Marche, Via Brecce Bianche, 60121 Ancona AN, Italy
Interests: nonlinear dynamics; dynamics of structures; nonlinear oscillations; chaos; control of chaos; nonlinear dynamics of MEMS and NEMS; nonlinear dynamics of mechanical systems and structures; bifurcations analysis; dynamical integrity
Prof. Dr. Farbod Alijani

E-Mail Website
Guest Editor
Faculty 3mE, Department Precision and Microsystems Engineering, TU Delft, Mekelweg 2, 2628 CD Delft, The Netherlands
Interests: non-linear vibrations; experimental modal analysis; bifurcation dynamics and chaos; non-linear identification; reduced-order modeling; dynamics of MEMS and NEMS; fluid-structure interactions
Dr. Pierpaolo Belardinelli

E-Mail Website
Guest Editor
Faculty 3mE, Department Precision and Microsystems Engineering, TU Delft, Mekelweg 2, 2628 CD Delft, The Netherlands
Interests: nonlinear dynamics; reduced-order modeling, perturbation methods; molecular dynamics; parallel computing; high performance computing; basins of attraction; dynamical integrity

Special Issue Information

Dear Colleagues,

This Special Issue, entitled “Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS”, aims at collecting major contributions on the interface among nonlinear dynamics, vibrations, and Micro-Electro-Mechanical Systems (MEMS). Countless applications, which range from sensing to actuation, make use of electrically-actuated microbeams to gain superior performances. Because of this background, their design, optimization, and control deserve detailed investigations, as well as a correct assessment of the actual dynamic capacity.

This Special Issue aims to collect papers having the common feature of involved non-linear aspects and complex phenomena.

Contributions with new methodological approaches, modelling, theoretical analyses are of major interest for this Special Issue. The gather of manuscripts collects and updates the most relevant knowledge on the topic, gaining microbeam-based MEMS to exceptional mechanical and motion characteristics.

Prof. Dr. Stefano Lenci
Prof. Dr. Farbod Alijani
Dr. Pierpaolo Belardinelli
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Actuators is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • nonlinear dynamics of MEMS
  • complex behaviour and chaos
  • advanced applications of electrically actuated micro-systems
  • modelling of MEMS
  • multiphysics phenomena
  • sensing and actuation

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Published Papers (5 papers)

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Research

18 pages, 3380 KiB  
Article
Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer
by Mehrdad Bagherinia and Stefano Mariani
Actuators 2019, 8(2), 36; https://doi.org/10.3390/act8020036 - 30 Apr 2019
Cited by 9 | Viewed by 5720
Abstract
Resonance features of slender mechanical parts of Lorentz force MEMS magnetometers are affected by the (weakly) coupled thermo-electro-magneto-mechanical multi-physics governing their dynamics. We recently showed that reduced-order models for such parts can be written in the form of the Duffing equation, whose nonlinear [...] Read more.
Resonance features of slender mechanical parts of Lorentz force MEMS magnetometers are affected by the (weakly) coupled thermo-electro-magneto-mechanical multi-physics governing their dynamics. We recently showed that reduced-order models for such parts can be written in the form of the Duffing equation, whose nonlinear term stems from the mechanical constraint on the vibrations and is affected by the driving voltage. As some device performance indices vary proportionally to the amplitude of oscillations at resonance, an optimization of the operational conditions may lead to extremely slender, imperfection-sensitive movable structures. In this work, we investigate the effects of imperfections on the mechanical response of a single-axis magnetometer. At the microscopic length-scale, imperfections are given in terms of uncertainties in the values of the over-etch depth and of the Young’s modulus of the vibrating polycrystalline silicon film. Their effects on the nonlinear structural dynamics are investigated through a Monte Carlo analysis, to show how the output of real devices can be scattered around the reference response trend. Full article
(This article belongs to the Special Issue Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS)
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14 pages, 7897 KiB  
Article
Modified U-shaped Microactuator with Compliant Mechanism Applied to a Microgripper
by Pedro Vargas-Chable, Margarita Tecpoyotl-Torres, Ramon Cabello-Ruiz, Jose Alfredo Rodriguez-Ramirez and Rafael Vargas-Bernal
Actuators 2019, 8(1), 28; https://doi.org/10.3390/act8010028 - 19 Mar 2019
Cited by 8 | Viewed by 8750
Abstract
In this paper, a modified U-shaped micro-actuator with a compliant mechanism is proposed. It was analyzed with a uniform and modified thin arm, as well as a similar variation in the corresponding flexure, in order to observe the impact of the compliant lumped [...] Read more.
In this paper, a modified U-shaped micro-actuator with a compliant mechanism is proposed. It was analyzed with a uniform and modified thin arm, as well as a similar variation in the corresponding flexure, in order to observe the impact of the compliant lumped mechanism. The use of these compliant mechanisms implies an increment in the deformation and a reduction in the equivalent stress of 25% and 52.25%, respectively. This characterization was developed using the Finite Element Method (FEM) in ANSYS Workbench. The design, analysis and simulation were developed with Polysilicon. In this study, the following performance parameters were also analyzed: force and temperature distribution. This device is supplied with voltage from 0 V up to 3 V, at room temperature. The modified U-shaped actuator was applied in both arms of a microgripper, and to evaluate its electrothermal performance, a static structural analysis has been carried out in Ansys Workbench. The microgripper has an increment in deformation of 22.33%, an equivalent stress reduction of 50%, and a decrease in operation frequency of 10.8%. The force between its jaws is of 367 µN. This low level of force could be useful when sensitive particles are manipulated. Full article
(This article belongs to the Special Issue Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS)
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15 pages, 12582 KiB  
Article
Piezoelectric Vibration-Based Energy Harvesting Enhancement Exploiting Nonsmoothness
by Rodrigo Ai, Luciana L. S. Monteiro, Paulo Cesar. C. Monteiro, Jr., Pedro M. C. L. Pacheco and Marcelo A. Savi
Actuators 2019, 8(1), 25; https://doi.org/10.3390/act8010025 - 10 Mar 2019
Cited by 14 | Viewed by 7339
Abstract
Piezoelectric vibration-based energy harvesting systems have been used as an interesting alternative power source for actuators and portable devices. These systems have an inherent disadvantage when operating in linear conditions, presenting a maximum power output by matching their resonance frequencies with the ambient [...] Read more.
Piezoelectric vibration-based energy harvesting systems have been used as an interesting alternative power source for actuators and portable devices. These systems have an inherent disadvantage when operating in linear conditions, presenting a maximum power output by matching their resonance frequencies with the ambient source frequencies. Based on that, there is a significant reduction of the output power due to small frequency deviations, resulting in a narrowband harvester system. Nonlinearities have been shown to play an important role in enhancing the harvesting capacity. This work deals with the use of nonsmooth nonlinearities to obtain a broadband harvesting system. A numerical investigation is undertaken considering a single-degree-of-freedom model with a mechanical end-stop. The results show that impacts can strongly modify the system dynamics, resulting in an increased broadband output power harvesting performance and introducing nonlinear effects as dynamical jumps. Nonsmoothness can increase the bandwidth of the harvesting system but, on the other hand, limits the energy capacity due to displacement constraints. A parametric analysis is carried out monitoring the energy capacity, and two main end-stop characteristics are explored: end-stop stiffness and gap. Dynamical analysis using proper nonlinear tools such as Poincaré maps, bifurcation diagrams, and phase spaces is performed together with the analysis of the device output power and efficiency. This offers a deep comprehension of the energy harvesting system, evaluating different possibilities related to complex behaviors such as dynamical jumps, bifurcations, and chaos. Full article
(This article belongs to the Special Issue Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS)
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18 pages, 4300 KiB  
Article
An Electro-Thermal Actuation Method for Resonance Vibration of a Miniaturized Optical-Fiber Scanner for Future Scanning Fiber Endoscope Design
by Aydin Aghajanzadeh Ahrabi, Mandeep Kaur, Yasong Li, Pierre Lane and Carlo Menon
Actuators 2019, 8(1), 21; https://doi.org/10.3390/act8010021 - 1 Mar 2019
Cited by 8 | Viewed by 7322
Abstract
Medical professionals increasingly rely on endoscopes to carry out many minimally invasive procedures on patients to safely examine, diagnose, and treat a large variety of conditions. However, their insertion tube diameter dictates which passages of the body they can be inserted into and, [...] Read more.
Medical professionals increasingly rely on endoscopes to carry out many minimally invasive procedures on patients to safely examine, diagnose, and treat a large variety of conditions. However, their insertion tube diameter dictates which passages of the body they can be inserted into and, consequently, what organs they can access. For inaccessible areas and organs, patients often undergo invasive and risky procedures—diagnostic confirmation of peripheral lung nodules via transthoracic needle biopsy is one example from oncology. Hence, this work sets out to present an optical-fiber scanner for a scanning fiber endoscope design that has an insertion tube diameter of about 0.5 mm, small enough to be inserted into the smallest airways of the lung. To attain this goal, a novel approach based on resonance thermal excitation of a single-mode 0.01-mm-diameter fiber-optic cantilever oscillating at 2–4 kHz is proposed. The small size of the electro-thermal actuator enables miniaturization of the insertion tube. Lateral free-end deflection of the cantilever is used as a benchmark for evaluating performance. Experimental results show that the cantilever can achieve over 0.2 mm of displacement at its free end. The experimental results also support finite element simulation models which can be used for future design iterations of the endoscope. Full article
(This article belongs to the Special Issue Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS)
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10 pages, 2262 KiB  
Article
Instability and Drift Phenomena in Switching RF-MEMS Microsystems
by Viviana Mulloni
Actuators 2019, 8(1), 15; https://doi.org/10.3390/act8010015 - 18 Feb 2019
Cited by 4 | Viewed by 6923
Abstract
MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the [...] Read more.
MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the paper also analyzes other important effects related to instability phenomena, which are very common in this type of technology. Instabilities due to dielectric charge trapping, fabrication tolerances, mechanical deformation, contact wear, and temperature variation are duly analyzed, giving a comprehensive view of the complexity encountered in the reliable functioning of these apparently simple devices. Full article
(This article belongs to the Special Issue Instability Phenomena and Complex Responses in Electrically-Actuated Microbeam-Based MEMS)
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