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Journal: Proceedings, 2018
Volume: 2
Number: 725

Article: Equivalent Circuit-Based Open-Circuit Sensitivity Modelling of a Capacitive-Type MEMS Acoustic Sensor on Wafer Level
Authors: by Jaewoo Lee, Jong-Pil Im, Jeong-Hun Kim, Sol-Yee Lim and Seung-Eon Moon
Link: https://www.mdpi.com/2504-3900/2/13/725

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