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Journal: Proceedings, 2017
Volume: 1
Number: 553
Article:
Post Fabrication Processing of Foundry MEMS Structures Exhibiting Large, Out-of-Plane Deflections
Authors:
by
LaVern Starman, John Walton, Harris Hall and Robert Lake
Link:
https://www.mdpi.com/2504-3900/1/4/553
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