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Journal: ProceedingsVolume: 1Number: 553
Article: Post Fabrication Processing of Foundry MEMS Structures Exhibiting Large, Out-of-Plane Deflections
  • Authors:
  • LaVern Starman1,*,
  • John Walton1 and
  • Harris Hall1
  • et al.
Link: https://www.mdpi.com/2504-3900/1/4/553

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