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Proceedings 2017, 1(4), 553;

Post Fabrication Processing of Foundry MEMS Structures Exhibiting Large, Out-of-Plane Deflections

Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH 45433, USA
Air Force Institute of Technology, Wright-Patterson AFB, OH 45433, USA
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 18 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [2237 KB, uploaded 12 October 2017]


This research effort is focused on the development of large angle, out-of-plane bimorph MEMS micromirrors fabricated in the PolyMUMPs foundry process. Based on design constraints of the PolyMUMPs process, current designs fabricated do not meet the requirements to enable large angle optical steering. Through Comsol modeling and simulation, several post-processing techniques were discovered that could be used to meet the required large out-of-plane deflections. We have performed several post-processing techniques to include silicon nitride and high temperature evaporated gold to verify our Comsol modeling results. Our experimental tests validate the Comsol results of greater than 400 μm deflections are achievable
Keywords: MEMS; Bimorph; micromirror; PolyMUMPs MEMS; Bimorph; micromirror; PolyMUMPs
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Starman, L.; Walton, J.; Hall, H.; Lake, R. Post Fabrication Processing of Foundry MEMS Structures Exhibiting Large, Out-of-Plane Deflections. Proceedings 2017, 1, 553.

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