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Journal: Proceedings, 2017
Volume: 1
Number: 470

Article: Design, Fabrication and Optimization of a Silicon MEMS Natural Gas Sensor
Authors: by Marjan Shaker, Erik Sundfør, Gaël Farine, Conor Slater, Pierre-André Farine and Danick Briand
Link: https://www.mdpi.com/2504-3900/1/4/470

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