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Proceedings 2017, 1(4), 470;

Design, Fabrication and Optimization of a Silicon MEMS Natural Gas Sensor

Electronic and Signal Processing Laboratory, EPFL, Lausanne, Switzerland
Microsystems for Space Technologies Laboratory, EPFL, Lausanne, Switzerland
Bright Sensors SA, Neuchatel, Switzerland
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 17 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [661 KB, uploaded 17 August 2017]


This study reports on the integration of a Silicon MEMS hotplate into a natural gas quality analyzer, i.e., a miniaturized gas viscometer used to measure the Wobbe Index (WI). COMSOL Multiphysics simulation was used for selection of the optimum geometry of the hotplate and gas sensing cell. Experimental characterization of the hotplate confirmed its stability under working condition of the sensor. The sensor has been tested by running various gases such as Nitrogen and Methane. The thermal analysis of the sensor and experimental results show a reduced response time of the sensor at lower power consumption and lower thermal time constant.
Keywords: gas sensor; micro-hotplate; viscometer; natural gas gas sensor; micro-hotplate; viscometer; natural gas
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Shaker, M.; Sundfør, E.; Farine, G.; Slater, C.; Farine, P.-A.; Briand, D. Design, Fabrication and Optimization of a Silicon MEMS Natural Gas Sensor. Proceedings 2017, 1, 470.

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