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Journal: Proceedings, 2017
Volume: 1
Number: 391

Article: Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing
Authors: by Mariazel Maqueda Lopez, Emanuele Andrea Casu, Montserrat Fernandez-Bolanos and Adrian Mihai Ionescu
Link: https://www.mdpi.com/2504-3900/1/4/391

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