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Journal: Proceedings, 2017
Volume: 1
Number: 391
Article:
Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing
Authors:
by
Mariazel Maqueda Lopez, Emanuele Andrea Casu, Montserrat Fernandez-Bolanos and Adrian Mihai Ionescu
Link:
https://www.mdpi.com/2504-3900/1/4/391
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