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Journal: ProceedingsVolume: 1Number: 391
Article: Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing
- Authors:
- Mariazel Maqueda Lopez,
- Emanuele Andrea Casu and
- Montserrat Fernandez-Bolanos
- et al.
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