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Journal: Proceedings, 2017
Volume: 1
Number: 386
386
Article: Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications
Authors: by Baptiste Neff, Fabrice Casset, Arnaud Millet, Vincent Agache, Nicolas Verplanck, François Boizot and Stéphane Fanget
Link: https://www.mdpi.com/2504-3900/1/4/386

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