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J. Imaging 2018, 4(7), 88; https://doi.org/10.3390/jimaging4070088

Imaging with a Commercial Electron Backscatter Diffraction (EBSD) Camera in a Scanning Electron Microscope: A Review

1
Department of Mining and Materials Engineering, McGill University, Montréal, QC H3A 0C5, Canada
2
Institut de Recherche d’Hydro-Québec, 1806 Boulevard Lionel-Boulet, Varennes, QC J3X 1S1, Canada
*
Author to whom correspondence should be addressed.
Received: 21 May 2018 / Revised: 14 June 2018 / Accepted: 20 June 2018 / Published: 1 July 2018
(This article belongs to the Special Issue Phase-Contrast and Dark-Field Imaging)
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Abstract

Scanning electron microscopy is widespread in field of material science and research, especially because of its high surface sensitivity due to the increased interactions of electrons with the target material’s atoms compared to X-ray-oriented methods. Among the available techniques in scanning electron microscopy (SEM), electron backscatter diffraction (EBSD) is used to gather information regarding the crystallinity and the chemistry of crystalline and amorphous regions of a specimen. When post-processing the diffraction patterns or the image captured by the EBSD detector screen which was obtained in this manner, specific imaging contrasts are generated and can be used to understand some of the mechanisms involved in several imaging modes. In this manuscript, we reviewed the benefits of this procedure regarding topographic, compositional, diffraction, and magnetic domain contrasts. This work shows preliminary and encouraging results regarding the non-conventional use of the EBSD detector. The method is becoming viable with the advent of new EBSD camera technologies, allowing acquisition speed close to imaging rates. This method, named dark-field electron backscatter diffraction imaging, is described in detail, and several application examples are given in reflection as well as in transmission modes. View Full-Text
Keywords: dark-field (DF); electron channeling contrast imaging (ECCI); electron channeling pattern (ECP); electron backscatter diffraction (EBSD); deformation; scanning electron microscope (SEM); transmission kikuchi diffraction (TKD; t-EFSD; t-EBSD) dark-field (DF); electron channeling contrast imaging (ECCI); electron channeling pattern (ECP); electron backscatter diffraction (EBSD); deformation; scanning electron microscope (SEM); transmission kikuchi diffraction (TKD; t-EFSD; t-EBSD)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Brodusch, N.; Demers, H.; Gauvin, R. Imaging with a Commercial Electron Backscatter Diffraction (EBSD) Camera in a Scanning Electron Microscope: A Review. J. Imaging 2018, 4, 88.

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