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Journal: Photonics, 2025
Volume: 12
Number: 970
970
Article: High-Precision Beam Deflection and Diagnostics System for EUV Synchrotron Radiation Illumination
Authors: by Haigang Liu, Bo Zhao, Xiangyu Meng, Jun Zhao, Zhi Guo, Xiangzhi Zhang, Yong Wang, Qiushi Huang, Zhe Zhang, Zhanshan Wang and Renzhong Tai
Link: https://www.mdpi.com/2304-6732/12/10/970

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