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Journal: Processes, 2025
Volume: 13
Number: 1094
1094
Article: Chemical–Mechanical Polishing of 4H-SiC Using Multi-Catalyst Synergistic Activation of Potassium Peroxymonosulfate
Authors: by Congzheng Li, Mengmeng Shen, Xuelai Li, Yuhan Fu, Yanfang Dong, Binghai Lyu and Julong Yuan
Link: https://www.mdpi.com/2227-9717/13/4/1094

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