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Journal: ElectronicsVolume: 11Number: 176
Article: Peculiarities of the Acoustic Wave Propagation in Diamond-Based Multilayer Piezoelectric Structures as “Me1/(Al,Sc)N/Me2/(100) Diamond/Me3” and “Me1/AlN/Me2/(100) Diamond/Me3” under Metal Thin-Film Deposition
- Authors:
- Gennady Kvashnin1,
- Boris Sorokin1 and
- Nikita Asafiev1,2
- et al.
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