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Open AccessArticle

Influence of Sputtering Power of ZrB2 Target on Structure and Properties of Nanocomposite Zr-B-O Films

by Yang Xu 1,2, Dong Mao 1,2, Lei Dong 1,2,*, Mengli Zhao 1,2, Jie Wu 1,2 and Dejun Li 1,2,*
1
College of Physics and Materials Science, Tianjin Normal University, Tianjin 300387, China
2
Tianjin International Joint Research Centre of Surface Technology for Energy Storage Materials, Tianjin Normal University, Tianjin 300387, China
*
Authors to whom correspondence should be addressed.
Coatings 2019, 9(10), 611; https://doi.org/10.3390/coatings9100611
Received: 31 August 2019 / Revised: 20 September 2019 / Accepted: 23 September 2019 / Published: 25 September 2019
(This article belongs to the Special Issue Advances in Multi-Target Physical Vapor Deposition Techniques)
The nanocomposite Zr-B-O films based on ZrB2 and ZrO2 are successfully deposited on Si (100) and stainless-steel substrates via a multi-target magnetron co-sputtering system. The influence of the sputtering power of ZrB2 target on sample structure and performance was analyzed by scanning electron microscope (SEM), transmission electron microscope (TEM), X-ray diffraction (XRD), and X-ray photoelectron spectrometer (XPS). Nano scratch tests were conducted to measure the films’ mechanical properties. Their oxidation resistance in an aerobic environment was tested by high-temperature oxidation in a muffle furnace. Corrosion behaviors of the Zr-B-O films were evaluated by potentiodynamic polarization and electrochemical impedance spectroscopy. It shows that the interior of the composite films has a high degree of non-crystallization. The maximum hardness (26.76 GPa) and corresponding elastic modulus (268.05 Gpa) of the film were obtained at the sputtering power of 120 W. The hardest film also shows the better oxidation resistance with a mass change of around 0.1% before and after oxidation under 1000 °C for 1 h. However, the corrosion resistance of Zr-B-O nanocomposite films is negatively correlated with the power of ZrB2, which is related to the microstructure of the composite film. View Full-Text
Keywords: Zr-B-O nanocomposite films; magnetron co-sputtering; sputtering power; hardness; oxidation resistance; corrosion resistance Zr-B-O nanocomposite films; magnetron co-sputtering; sputtering power; hardness; oxidation resistance; corrosion resistance
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Xu, Y.; Mao, D.; Dong, L.; Zhao, M.; Wu, J.; Li, D. Influence of Sputtering Power of ZrB2 Target on Structure and Properties of Nanocomposite Zr-B-O Films. Coatings 2019, 9, 611.

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