Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering
Abstract
:1. Introduction
2. Experimental Section
Powder target ID | Compound powder target mass (g) | |
---|---|---|
Tin oxide | Tin fluoride | |
SnO2 | 60.0 | 0 |
SnO2:F1 | 57.5 | 2.5 |
SnO2:F2 | 52.7 | 7.3 |
SnO2:F3 | 46.1 | 13.9 |
SnO2:F4 | 43.2 | 16.8 |
3. Results and Discussion
3.1. Elemental Analysis
Sample ID | Element at.% in targets | Element at.% in films | Film thickness (nm) | ||||
---|---|---|---|---|---|---|---|
O | F | Sn | O | F | Sn | ||
SnO2 | 66.7 | 0.0 | 33.4 | 68.4 | 0.0 | 31.7 | 403 |
SnO2:F1 | 63.3 | 3.3 | 33.3 | 66.4 | 2.8 | 30.8 | 410 |
SnO2:F2 | 60.0 | 6.6 | 33.3 | 64.0 | 5.3 | 30.7 | 405 |
SnO2:F3 | 56.7 | 10.0 | 33.2 | 62.8 | 6.2 | 30.9 | 415 |
SnO2:F4 | 53.4 | 13.0 | 33.3 | 60.1 | 7.4 | 32.5 | 395 |
3.2. Structural Properties
Sample ID | 2θ (°) | Peak | Lattice parameters | Grain size D | Texture coefficient P | |
---|---|---|---|---|---|---|
(hkl) | a (Å) | c (Å) | (nm) | |||
SnO2 | 26.6 | 110 | 4.74 | 3.35 | 15 | 0.48 |
37.7 | 200 | 4.75 | 2.37 | 24 | 0.42 | |
51.7 | 211 | 4.32 | 1.77 | 22 | 1.27 | |
SnO2:F1 | 26.5 | 110 | 4.79 | 3.39 | 28 | 0.73 |
37.8 | 200 | 4.77 | 2.38 | 23 | 0.95 | |
51.6 | 211 | 4.34 | 1.77 | 34 | 1.48 | |
SnO2:F2 | 26.5 | 110 | 4.79 | 3.38 | 31 | 0.77 |
37.8 | 200 | 4.81 | 2.4 | 38 | 1.11 | |
51.7 | 211 | 4.32 | 1.77 | 33 | 1.31 | |
SnO2:F3 | 26.6 | 110 | 4.77 | 3.38 | 13 | 0.47 |
37.7 | 200 | 4.78 | 2.39 | 14 | 0.6 | |
51.6 | 211 | 4.34 | 1.77 | 15 | 1.01 | |
SnO2:F4 | 26.6 | 110 | 4.81 | 3.4 | 9 | 0.3 |
51.4 | 211 | 4.35 | 1.78 | 7 | 0.49 |
3.3. Electrical Properties
3.4. Optical Properties
3.5. Morphological Properties
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Banyamin, Z.Y.; Kelly, P.J.; West, G.; Boardman, J. Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering. Coatings 2014, 4, 732-746. https://doi.org/10.3390/coatings4040732
Banyamin ZY, Kelly PJ, West G, Boardman J. Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering. Coatings. 2014; 4(4):732-746. https://doi.org/10.3390/coatings4040732
Chicago/Turabian StyleBanyamin, Ziad Y., Peter J. Kelly, Glen West, and Jeffery Boardman. 2014. "Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering" Coatings 4, no. 4: 732-746. https://doi.org/10.3390/coatings4040732
APA StyleBanyamin, Z. Y., Kelly, P. J., West, G., & Boardman, J. (2014). Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering. Coatings, 4(4), 732-746. https://doi.org/10.3390/coatings4040732