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Journal: Coatings, 2025
Volume: 15
Number: 535

Article: A Study on the Spectral Characteristics of 83.4 nm Extreme Ultraviolet Filters
Authors: by Qian Liu, Aiming Zhou, Hanlin Wang, Pingxu Wang, Chen Tao, Guang Zhang, Xiaodong Wang and Bo Chen
Link: https://www.mdpi.com/2079-6412/15/5/535

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