Order Article Reprints
Journal: CoatingsVolume: 11Number: 822
Article: The Effect of Match between High Power Impulse and Bias Voltage: TiN Coating Deposited by High Power Impulse Magnetron Sputtering
- Authors:
- Chi-Lung Chang1,2,
- Ching-Yen Lin1 and
- Fu-Chi Yang2
- et al.
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