Castillo-Saenz, J.; Nedev, N.; Valdez-Salas, B.; Curiel-Alvarez, M.; Mendivil-Palma, M.I.; Hernandez-Como, N.; Martinez-Puente, M.; Mateos, D.; Perez-Landeros, O.; Martinez-Guerra, E.
Properties of Al2O3 Thin Films Grown by PE-ALD at Low Temperature Using H2O and O2 Plasma Oxidants. Coatings 2021, 11, 1266.
https://doi.org/10.3390/coatings11101266
AMA Style
Castillo-Saenz J, Nedev N, Valdez-Salas B, Curiel-Alvarez M, Mendivil-Palma MI, Hernandez-Como N, Martinez-Puente M, Mateos D, Perez-Landeros O, Martinez-Guerra E.
Properties of Al2O3 Thin Films Grown by PE-ALD at Low Temperature Using H2O and O2 Plasma Oxidants. Coatings. 2021; 11(10):1266.
https://doi.org/10.3390/coatings11101266
Chicago/Turabian Style
Castillo-Saenz, Jhonathan, Nicola Nedev, BenjamÃn Valdez-Salas, Mario Curiel-Alvarez, MarÃa Isabel Mendivil-Palma, Norberto Hernandez-Como, Marcelo Martinez-Puente, David Mateos, Oscar Perez-Landeros, and Eduardo Martinez-Guerra.
2021. "Properties of Al2O3 Thin Films Grown by PE-ALD at Low Temperature Using H2O and O2 Plasma Oxidants" Coatings 11, no. 10: 1266.
https://doi.org/10.3390/coatings11101266
APA Style
Castillo-Saenz, J., Nedev, N., Valdez-Salas, B., Curiel-Alvarez, M., Mendivil-Palma, M. I., Hernandez-Como, N., Martinez-Puente, M., Mateos, D., Perez-Landeros, O., & Martinez-Guerra, E.
(2021). Properties of Al2O3 Thin Films Grown by PE-ALD at Low Temperature Using H2O and O2 Plasma Oxidants. Coatings, 11(10), 1266.
https://doi.org/10.3390/coatings11101266
