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Journal: Coatings, 2020
Volume: 10
Number: 34
Article:
Influence of N2 Gas Flow Ratio and Working Pressure on Amorphous Mo–Si–N Coating during Magnetron Sputtering
Authors:
by
Ki Seong Lim, Young Seok Kim, Sung Hwan Hong, Gian Song and Ki Buem Kim
Link:
https://www.mdpi.com/2079-6412/10/1/34
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