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Journal: Coatings, 2020
Volume: 10
Number: 34

Article: Influence of N2 Gas Flow Ratio and Working Pressure on Amorphous Mo–Si–N Coating during Magnetron Sputtering
Authors: by Ki Seong Lim, Young Seok Kim, Sung Hwan Hong, Gian Song and Ki Buem Kim
Link: https://www.mdpi.com/2079-6412/10/1/34

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